operating_instructions_from_finetech_beamsplitter_alignment.pdf - 第2页

The Components Scale A 11 lines, 19 11 lines, 19 11 lines, 19 11 lines, 19 µ mp i t c h pitch pitch pitch Scale B 20 lines , 10 20 lines , 10 20 lines , 10 20 lines , 10 µ mp i t c h pitch pitch pitch Pick-up Tool

How to Calibrate the Beam Splitter on a Finetech System

CGS May 27, 2014 page 1 of 1

 Place Bottom Die

 Pick up top Die

Note: Verify all mating surfaces

are clean before using

 Align Top/Bottom pattern

Note: Theta alignment and

then X/Y axis

 Place top die onto the bottom die

 Record the Z micrometer

reading

 Focus onto vernier pattern

 Read/record the offset

 Set Z micrometer to

recorded/original position

 Pick up die

Top/Bottom

still Aligned?

Yes

Spec?

Yes

Calibration

Complete

Note: Look for stable

top/bottom die

Clean Die

and tool

 Adjust the X/Y screws

for the Beam Splitter

The Components

Scale A

11 lines, 19

11 lines, 19 11 lines, 19

11 lines, 19 µmpitch

pitchpitch

pitch

Scale B

20 lines, 10

20 lines, 10 20 lines, 10

20 lines, 10 µmpitch

pitchpitch

pitch

Pick-up Tool

Load the verniers

 Clean

B, and

tool

tool in IPA

 Place larger scale (A) on vacuum plate (pattern UP)

 Small scale on the tool (B), (pattern OUT)