ProVIA-Plasma-System-NordsonMARCH-Ltr.pdf - 第2页
Specica tions MARCH Pro VIA ™ Plasma Syst em Enclosure Dimensions W x D x H – Footprint 1652 W x 1747 D x 2445 H mm (65 W x 69 D x 97 H in.) Net W eight 1776 kg (3915 lbs) Chamber A vailable Cells 13 Electrodes Congura…
The ProVIA
™
plasma system supports high-throughput PCB
manufacturing with excellent plasma treatment uniformity.
The ProVIA
system provides:
Industry-Leading Eiciency and Plasma Uniformity
• Patented system technologies produce superior process
uniformity at high throughput levels
• Vertical loading and easy-to-use carts minimize idle time
to increase productivity. The fast vacuum pump down
and enhanced process cycle time boost productivity even
further.
• The vacuum system, plasma chamber, control electronics,
and 40 kHz power supply are housed in a single space-saving
enclosure.
Application Flexibility
• Equipped with a touch-screen PC Operator Interface, the
system provides a wide range of control and data collection
capabilities.
• Unlimited recipes can be stored for easy batch-to-batch
transition. Password protection prevents unauthorized
login.
• Accommodates a variety of panel sizes within a small
footprint.
Key Application Details
• Uniform PCB treatment for desmear,
landing pad cleaning, and etchback of HDI
and exible and rigid circuit boards
• Low CF4 gas consumption for desmear
applications, contributes to the lowest cost
of ownership in its class
• Unique vacuum and gas ow technology,
advanced electrode designs, and superior
temperature management.
• Front and rear system access to all interior
components for convenient service, the
pump is positioned on rollers for easy
removal, and side access is not required
MARCH ProVIA
Plasma System
High-Throughput PCB Plasma Treatment
Specications
MARCH ProVIA
™
Plasma System
Enclosure
Dimensions
W x D x H – Footprint 1652 W x 1747 D x 2445 H mm (65 W x 69 D x 97 H in.)
Net Weight 1776 kg (3915 lbs)
Chamber
Available Cells 13
Electrodes
Conguration Temperature Controlled Power-Power
Working Area 762 D x 610 H mm; (30 D x 24 H in.)
RF Power
Standard Wattage 5 kW
Optional Wattage 10 kW
Frequency 40 kHz
Gas Control
Available Flow Volumes 500, 1000, 2000 or 5000 sccms
Maximum Number of MFCs 5
Control System
Interface EPC with PC-Based Touch Screen Interface
Vacuum Pump
Standard Purged Pump Package 530 cfm
Cooling Water Flow 9.5 slm
N2 Pump Purge Flow 14 slm
Facilities
Power Supply 208 VAC, 50 A, 3-Phase + Ground; 50/60 Hz
Process Gas Fitting Size & Type 6.35 mm (0.25 in.) Swagelok
Process Gas Purity CF4 = 99.97%; O2 = 99.996%; N2 = 99.99%;
Ar = 99.999%; H2 = 99.999%
Process Gas Pressure 1.03 bar (15 psig) min. to 1.7 bar (25 psig) max., regulated
Purge Gas Fitting Size & Type 9.5 mm (0.375 in.) Swagelok Tube
Purge Gas Purity N2 = 99%
Purge Gas Pressure 1.03 bar (15 psig) min. to 1.7 bar (25 psig) max., regulated
Pneumatic Valve Fitting Size & Type 9.5 mm (0.375 in.) Swagelok
Pneumatic Gas Purity CDA, Oil Free, Dewpoint ≤7°C (45°F), Particulate Size <5 µm
Pneumatic Gas Pressure 6.2 bar (90 psig) min. to 6.9 bar (100 psig) max., regulated
Exhaust Fitting NW 40 @ Utility Panel
Compliance
USA EH&S/Ergonomics
International CE Marked
Ancillary
Equipment
Gas Generators Nitrogen, Hydrogen
(requires Additional Non-Optional Hardware)
Facilities Chiller, Scrubber, Transformer
For more information,
speak with your Nordson
representative or contact
your Nordson regional
oce.
We have several global
locations to serve you.
Americas
Asia Pacic
EMEA
https://www.nordson.com/en/
divisions/march/contact-us/
global-locations-and-sales-
contacts
+1.925.827.1240
nordsonmarch.com
MARCH Products
2470-A Bates Avenue
Concord, CA 94520-1294, U.S.A
info@nordsonmarch.com
Published July 2021