00192576-01.pdf - 第37页

1 1.1 3 37 1 1 1 (1) (2) " " (3) (4) (5) Z (6)

1

1.12

36

1

–

– Y

– Y

1

Y

1

(7) (8)

2.5 m/sec.

1 - 688.5 mm

2 - 768.5 mm

3 - 688.5 mm

4 - 768.5 mm

1530 mm

1µm

1

1.13

37

1

1

1

(1) (2) " "

(3) (4)

(5) Z (6)

1

1.13

38

1

–

–

–

–

– 12 "

– "

–

1

BGA,µBGA,flip-chip,TSOP,QFP,PLCC, SO

SO32, DRAM 0402 PLCC44

6mm

0.5 mm

0.35 mm

0.2 mm

0.5 mm x 1.0 mm

18.7 mm x 18.7 mm

2g

16 mm

2.4 5.0 N

12,500 /h

9xx

±0.70° /4σ

±90µm/4σ