Wafer Clamping System 12inch SWS (2,4)_20211123_112730.pdf - 第4页
Wafer Clamping System 12inch SWS (2,4) Page 4 / 4 23.11.2021 Pos. Item no. Description Part marking 00519711-01 WAFER CLAMPING SYSTEM 12INCH SWS (2,4) 2 00387412-02 WAFER HOLDER 12 - SWS12 (2,4) 3 03066721-01 SOLENOID VA…
Wafer Clamping System 12inch SWS (2,4)
Page 2 / 4 23.11.2021
Wafer Clamping System 12inch SWS (2,4)
Page 3 / 4 23.11.2021
Wafer Clamping System 12inch SWS (2,4)
Page 4 / 4 23.11.2021
Pos. Item no. Description Part marking
00519711-01 WAFER CLAMPING SYSTEM 12INCH
SWS (2,4)
2 00387412-02 WAFER HOLDER 12 - SWS12 (2,4)
3 03066721-01 SOLENOID VALVE SPARE PART
4 00385357-01 CYLINDER SPARE PART
5 03066505S01 DIFFUSE MODE SENSOR SPARE PART
6 00386114-01 PRESSURE UNIT SPARE PART
7 03042552-01 ISO 4762 - M 4 X 10-A2-70 STANDARD PARTS
8 00386209-01 WAFER SUPPORT
9 00386560-01 ACTUATOR SPARE PART
10 03056913-01 ISO 4762 - M 4 X 5-A2-70 STANDARD PARTS
11 00386242-01 SWIVEL CYLINDER SPARE PART
12 03063134-01 NAEHERUNGSSCHALTER SME-10-KL-
LED-24
SPARE PART
13 00386142-01 BOARD AD-DA SPARE PART
14 03062594-01 EARTH CONNECTION SCREW M4 (4.
CHOICE)
15 00095472-01 PLAIN WASHER A 4.3-140HV-ST
16 00341997-01 LABEL GROUNDING POINT GNYE
D12.5
17 03045194-01 DIN EN ISO 7380-M3 X 6-A2-70 STANDARD PARTS
Powered by TCPDF (www.tcpdf.org)