00195372-0102_AI_Vakuumpumpe_D1D2_DE+EN.pdf - 第48页
2 Assembly instructi ons for vacuum pump D1 / D2 11/2006 Edition 48
D1 / D2 2 Assembly instructions for vacuum pump
11/2006 Edition
47
Fig. 2.9.7 4 gantry with C&P12: compare the pressure drop at 1, 2, 3... open nozzles
2
Relative Vacuum [mbar]
Number of open nozzles
Vacuum curve for HS60 with ELMO 2BL 1 1000 vacuum pump and 914 nozzles
12-seg. head, gantry 1
12-seg. head, gantry 2
12-seg. head, gantry 3
12-seg. head, gantry 4
2 Assembly instructions for vacuum pump D1 / D2
11/2006 Edition
48
D1 / D2
Ausgabe 11/2006
49
2.10 Anhang / attachment
Abb. 2.10.1 Pneumatik Verschlauchung SIPLACE D2 (Druckluft)
Fig. 3.0.1 SIPLACE D2 pneumatic tubing (compressed air)
2