icube_mpl_e.pdf - 第8页
6 Maintenance Parts Nozzle / 4M Nozzle / FF , SS (For SS,FF Head) 4 5 6 7 3 8 A 6 6 e p y T A 3 6 e p y T A 2 6 e p y T A 1 6 e p y T T ype64 A T ype65A 1 2 5 6 1 3 4 T ype71A (For 4M Head) T ype72 A T ype73 A T ype76 A …
Maintenance Parts
5
Head / FF
14
16
3
3
2 (Head1)
1 (Head2)
7
8
9
15
22
4
19
17
18
23
6
10
5
20
12
11
13
21
No. Part No. Part Name Q'ty Remarks Rank
1 KU1-M7137-00X BELT,R MOTOR 1 A
2 KV7-M8145-00X BELT,R MOTOR 1 A
3 KV7-M653A-30X SENSOR,1 ASSY. 2 B
4 KV7-M653A-60X SENSOR,1 ASSY. (L=500) 1 R1-ORG B
5 KG2-M7181-00X PACKING MYA 4 2 A
6 KW7-M8160-00X EJECTOR 1 B
7 90K55-4107GA AC SERVO MOTOR 1 Z1 B
8 90K55-4107GB AC SERVO MOTOR 1 Z2 B
9 90K55-4W07GC AC SERVO MOTOR 1 R1 B
10 90K55-4W073D AC SERVO MOTOR 1 R2 B
11 90185-00J00 NUT U 2 FU00SS(M10) A
12 $TSR4-M5 JOINT 2 A
13 KV7-M812H-A0X ENCODER, SPARE 2 B
14 KV7-M8171-00X PLATE,SPRING 4 A
15 KV7-M7210-01X CCD CAMERA 1 B
16 KV7-M7600-00X
FIDUCIAL LIGHT ASSY. 1B
17 KM1-M4592-12X
VAC SENSOR BOARD ASS
Y
2B
18 KH5-M7182-C0X FILTER 2 A
19 90990-17J006 O-RING 2 A
20 KW7-M83S0-00X SHAFT,F-HEAD ASSY 2 B
21 KW7-M8333-B0X VALVE,FORCE 1 B
22 90K55-4W4745 AC SERVO MOTOR 1 Z CAM. B
23 KV7-M653A-502 SENSOR,1 ASSY. (L=400) 1 R2-ORG B
JUL./2003
6
Maintenance Parts
Nozzle / 4M
Nozzle / FF , SS
(For SS,FF Head)
4
5
6
7
3
8
A66epyTA36epyTA26epyTA16epyT Type64A Type65A
1
2
5
6
1
3
4
Type71A
(For 4M Head)
Type72A Type73A Type76A Type77A
2
No. Part No. Part Name Q'ty Remarks Rank
1 KV8-M7710-A1X NOZZLE 71A ASSY. 1 A
2 KV8-M7720-A1X NOZZLE 72A ASSY. 1 A
3 KV8-M7730-00X NOZZLE 73A 1 A
4 KV8-M7760-00X NOZZLE 76A 1 A
5 KV8-M7770-A0X NOZZLE 77A ASSY. 1 A
6 90990-17J013 O-RING 1 A
No. Part No. Part Name Q'ty Remarks Rank
1 KV7-M7710-A1X NOZZLE 61A ASSY. 1 A
2 KV7-M7720-A1X NOZZLE 62A ASSY. 1 A
3 KV7-M7730-00X NOZZLE 63A 1 A
4 KV7-M7740-A0X NOZZLE 64A ASSY. 1 A
5 90990-17J013 O-RING 1 A
6 KV7-M7750-A0X NOZZLE 65A ASSY. 1 A
7 90990-17J015 O-RING 1 A
8 KV7-M7760-00X NOZZLE 66A 1 A
Maintenance Parts
7
Nozzle Changer / 4M
3
1
2
No. Part No. Part Name Q'ty Remarks Rank
1 KM1-M9605-03X CYL.,CLAMP 1 B
2 KM1-M9611-03X CYL.,U/D 1 B
3 KH5-M655A-A1X SENSOR,1-1 15 B
JUL./2003