presentazione_laboratorio.pdf - 第2页
MIS Microsystems Head of Department: Mario Zen The department designs and realises silicon microsystems, especially: • silicon particle detectors; • sensors for bio-medical and env ironmental applications; • micro-electr…
ITC-irst
Researchers 217
Post docs 13
PhD students 20
250
MM area
FCS – Physics & Chemistry of Surfaces and Interfaces
MIS – Microsystems
IT area
SRA – Automated Reasoning Sytems
SSI – Interactive Sensory Systems
TCC – Cognitive and Communication Technologies
MIS Microsystems
Head of Department: Mario Zen
The department designs and realises silicon
microsystems, especially:
• silicon particle detectors;
• sensors for bio-medical and environmental
applications;
• micro-electro-mechanic systems (MEMS) for
industrial and consumer applications;
• electro-optic microsystems for vision and non-
destructive measurements.
Low temperature Wafer Bonding
MEMS Technological fabrication modules
Silicon anisotropic etching with TMAH solution
Composite suspended membranes
Lithography with thick film of photoresist
Gold Electrodeposition