00192553-01.pdf - 第269页
;< ± ± Å Å (6& : x-Achse + : x-Achse - : y-Achse…
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Å 5(7851
Å
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Å
Å (6&
: x-Achse +
: x-Achse -
: y-Achse +
: y-Achse -
1..6: x/y-Schritt.
x-Pos. [µm]= .......... y-Pos. [µm]= .........
x/y-Achsen verfahren
x/y - Schrittw. =
;<
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