VOC_Thermal_Oxidizer_EN.pdf - 第2页
VOC Thermal Oxidiz er for a clean process The drying process of solar wafer metallization pastes evaporates fumes and smoke fr om volatile components of the organic compounds (VOCs). These fumes need to be safely remo ve…
VOC Thermal Oxidizer
Solar Equipment
99,9 % reduced VOC
The Thermal Oxidizer allows for it!
VOC Thermal Oxidizer
for a clean process
The drying process of solar wafer metallization pastes
evaporates fumes and smoke from volatile components of
the organic compounds (VOCs). These fumes need to be
safely removed from the process chamber of the dryer to
ensure a high quality production of solar cells.
Due to the high temperatures inside the unit, the Thermal
Oxidizer destroys the VOCs contained in the flue gas, such
as alcohols, toluene, and terpineol with an efciency of up to
99,9 %. Lowest concentrations of pollutants in the exhaust
of the dryer ensure compliance with legal standards (i.e. TA
Luft, Germany). Essentially the released gas from the oxidi-
zing unit contains water and carbon dioxide elements.
Rehm Thermal Systems GmbH | Leinenstrasse 7 | 89143 Blaubeuren, Germany | www.rehm-group.com
* measured in a real production process (Aluminium Backside Dryer)
at Suniva USA
Run No. 1 Run No. 2 Run No. 3
Oxidizer Inlet VOC
Concentration (g/m³)
1,64 1,71 2,07
Oxidizer Outlet VOC
Concentration (g/m³)
0,00273 0,00145 0,00305
VOC Destruction
Rate (%)*
99,8 99,9 99,8
Facts and gures
Detail Information of the VOC Thermal Oxidizer
System Types
Overall Length:
Overall Width:
Hight (without exhaust tube):
Weight:
Voltage supply:
connected load:
total required suction capacity²
Max. Solvent troughput³
similar wafer throughput value
max. Air troughput
Case of Application:
OXIDIZER SIZE M
1,18 m
1,12 m
1,4 m
500 kg
3x400 VAC +/-5 %
50/60 Hz
34 KW
approx. 1000 m³/h
1600 g/h
4000 Wafer/h
115 Nm³/h
VOC destruction /
Ag and Al paste
OXIDIZER SIZE L
2,3 m
1,2 m
1,3 m
650 kg
3x400 VAC +/-5 %
50/60 Hz
66 KW
approx. 1500 m³/h
2120 g/h
5300 Wafer/h
153 Nm³/h
-
-
² depending on required mixing temperature at handover to facility exhaust
³ with technical limitation of solvent throughput / available for Rehm dryers ex works or retrot to Rehm dryers