SL-SSL-series-EN_Feb2023.pdf - 第2页
Y OUR ALL Y IN TECHNOL OGICAL DISCOVER Y, AL WA YS . ADVANCED DISPENSING VISION SOFTWARE WITH MOTION CONTROL K&S advanced dispensing vision software integrates motion control and vision alignment with the following f…
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OUR ALLY IN TECHNOLOGICAL DISCOVERY, ALWAYS.
SL / SSL series are specifically designed for semiconductor
micro fluid packaging applications for narrow gap
filling, fine line dispensing and micro underfill with small
machine footprint.
SL / SSL has outstanding performance of motion route
repeatability and accuracy, capable of precisely filling
silver epoxy into 170μm narrow gap as well as precisely
dispensing 0.2nl material in total volume along the
dispensing route regardless of line, square, circle or any
other shapes.
SL / SSL series are designed to accept up to 12" wafer.
SSL has similar features as SL except higher acceleration
up to 2.5G for higher throughput.
SL / SSL Series
Advanced Semiconductor Micro Dispensing Platform
FOR SIP / WAFER LEVEL UNDERFILL /
EXTREME FINE SILVER PASTE DISPENSING /
NARROW GAP FILLING
HIGH PRECISION HARDWARE SPECIFICATIONS
SL / SSL series come with a special machine base and gantry engineered
to meet the highest repeatability accuracy of ±1μm and position accuracy
of ±2μm.
(Simulation analysis schematic)
(SSL series)
(SL series)
Y
OUR ALLY IN TECHNOLOGICAL DISCOVERY, ALWAYS.
ADVANCED DISPENSING VISION SOFTWARE WITH MOTION CONTROL
K&S advanced dispensing vision software integrates motion control and vision alignment with the following
features :
Support SECS / GEM and mapping requirements
Close loop flow volume control
Quick process parameters setting
Effective dispensing delay time control
Stream motion
Real time dispensing height measurement and compensation
Fiducial on fly
Remote teaching
VERSATILE DISPENSING APPLICATORS FOR ALL PRECISION APPLICATIONS
Piezo jet valve for high speed jetting
Progressive Cavity Pump(PCP) for precision high viscosity contact dispensing
Deposition pump for < 100μm dispensing
Solder paste jetting valve
Thin film ultrasonic spray coater
10:1 high precision mixing and dispensing
High precision air spray coater
YOUR ALLY IN TECHNOLOGICAL DISCOVERY, ALWAYS.
POST DISPENSING AUTOMATIC OPTICAL INSPECTION
SL / SSL series provide post dispensing inspection. Our glue inspection system is uniquely designed and has the
capability to provide high and accurate detection rate. The SL series customized vision inspection can assure 98-
99% detection rate. Options for conveyor with tray, cassette, magazine, wafer cassette or FOUP are available.
X-Y-Z Max Travel：410mm x 640mm x 40mm
X-Y Dispensing Area：320mm x 440mm x 40mm
Dimensions：700mm(W) x 1571mm(D) x 1603mm(H)
All Dimensions：1379mm(W) x 1714mm(D) x 1730mm(H)
Robot Weight：700 kg
XYZ Speed(mm/sec)：1500, 1500, 50mm/sec
XYZ Acceleration(mm/sec²)：1.5G, 1.5G, 0.25G
Repeatability(XYZ ±μm @3Sigma)：1, 1, 3
Position Accuracy(XYZ ±μm @3Sigma)：2, 2, 6
Resolution(XYZ μm)：0.1, 0.1, 0.1
X-Y-Z Max Travel：500mm x 700mm x 100mm
X-Y Dispensing Area：400mm x 500mm x 100mm
Dimensions：840mm(W) x 1300mm(D) x 1510mm(H)
All Dimensions：900mm(W) x 1540mm(D) x 1700mm(H)
Robot Weight：1700 kg
XYZ Speed(mm/sec)：500, 500, 250mm/sec
XYZ Acceleration(mm/sec²)：0.25G, 0.25G, 0.25G
Repeatability(XYZ ±μm @3Sigma)：1, 1, 3
Position Accuracy(XYZ ±μm @3Sigma)：2, 2, 6
Resolution(XYZ μm)：0.1, 0.1, 0.1
SL Series Robot Specications :
SSL Series Robot Specications :