DECAN_S1_TRM(Ver1.2_CS19.11).pdf - 第90页
Page +$1:+$ 88 DE CA N S 1 Air (1/6) HP09-000007 KM11-08-12-10 VACUUM PUMP (AIR OPTION) MAIN MANIFOLD ASS'Y 초기 진공도달압 : -93.3 k Pa 이하 교체 기준 : -87 kPa VACUUM PUMP (OPTION) FRONT AIR PANEL ASS'Y STANDARD AIR ASSY …
Page
+$1:+$
87
DECAN
S1
Cover (2/2)
NO. PART NO. PART NAME Q'TY Old No. Supply Supply LT Reference
61 J7452038A MOUSE PAD - OPTICAL 1
62 CD04-001004 COMPUTER MOUSE 1
63 FC15-002156A COVER-LCD BASE 45 1 SPECIAL OPTION
64 FC15-002154A COVER-M SUB BKT 45 D 1 SPECIAL OPTION
65 AM03-013511A ASSY,COVER-SAFETY EXT-CV 1
66 FC29-900195 HINGE 3
67 FC15-002787A COVER-ACRYL DOOR EXT-CV 1
68 FC29-900169 HANDLE_BOLT 2
69 FC10-000068 CUSHION,RUBBER 4
70 FC15-002794A COVER-SIDE R EXT-CV 1
71 FC15-002796A COVER-MIDDLE EXT-CV 2
72 FC15-002786A COVER-TOP EXT-CV 1
73 FC15-002795A COVER-BOTTOM EXT-CV 1
74 TO04-001377A JIG-DOOR CLAMPING 2
75 FC15-004436D COVER-SIDE UPPER R2 S;STD 1
76 FC15-004437C COVER-SIDE UPPER L2 S;STD 1
77 FC15-006429A COVER-UPPER_RR-D1 1
Page
+$1:+$
88
DECAN
S1
Air (1/6)
HP09-000007
KM11-08-12-10
VACUUM PUMP (AIR OPTION)
MAIN MANIFOLD ASS'Y
초기 진공도달압 : -93.3 kPa 이하
교체 기준 : -87 kPa
VACUUM PUMP (OPTION)
FRONT AIR PANEL ASS'Y
STANDARD AIR ASSY
HP03-000096
CXSJM10-40-A93
HP03-900013
CM2C32-50-XC3BB
HP06-900047
SQL04-M5
2-HP06-900056
KQ2L04-01
CONVEYOR ASS'Y
HP06-900072
PY4M
3-HP06-900027
KQ2L04-M5
Feeder Base (DC)
4-HP06-900018
KQ2U06-00
REAR
DOCKING CART ASS'Y (OPTION)
FRONT도 DC OPTION 일 때, 동일 구조
2-HP03-900011
AIR CYLINDER(SMC)
FRONT
FEEDER BASE ASS'Y (STANDARD)
REAR도 STANDARD일 때, 동일 구조
Feeder Base
VACUUM GENERATOR (AIR OPTION)
LEFT CABLE DUCT ASSY
1
3
2
(A)
4
3
(R)
SUPPLY BLOW
∅4
(A)
4
(B)
2
3
(R)
1
(P)
BLOW
∅4
0.1MPa
OVER BLOW
∅4
0.5MPa
HP09-000127
KM11-04-08-10
Y CABLE DUCT ASSY
STOPPER ASSY(WORK)
ANC ASSY
BUT ASSY
(NONE STAGE OPTION)
EDGE FIXER OPTION (SPECIAL)
U2-4-6*4
HP06-000226
FITTING KQ2R10-12
(ST OPTION 㢰 ᷱ㟤
KQ2P-10 㥐ᶤ䚌Ḕ ⵤ㉔䚔 ᶷ)
FC14-900641
PLUG KQ2P-10
FC14-900644
PLUG KQ2P-08
FC14-900644
PLUG KQ2P-08
FC14-900644
PLUG KQ2P-08
FC14-900644
PLUG KQ2P-08
FC14-900644
PLUG KQ2P-08
HP06-900282
KQ2R06-08
HP06-900282
KQ2R06-08
HP06-900282
KQ2R06-08
HP06-900282
KQ2R06-08
'a'
'b'
HP11-001019
VACUUM PUMP
KHB200A-304A-G1
HP06-900104
FITTING
KQ2L06-02S
U2-4-6*4(YELLOW)
HP06-900043
FITTING
KQ2F04-01
TE07-900096
ANALOG GAUGE (VACUUM)
GZ46-K-01-C1
HP09-001019
REGULATOR
ARP20-02BG-CJSZ1406
HP04-001016
AIR FILTER
AC30-03D-CJSZ2045
U2-4-12*8 U2-4-12*8
HP09-000150
DIGITAL GAUGE
SPABT-P10-R18-2N-K1-SA
U2-4-4*2.5
HP06-900255
FITTING
KQ2H04-M5
HP03-000083
CYLINDER CUJB12-5D
AM03-007232A (기본 3연 SOL VALVE 모듈)
ASSY,AIR-SM482_SOL_VALVE_MODULE
U2-4-4*2.5(YELLOW)
HP03-900054
ACP1B16-20T-R6224
2-HP14-900087
AS1211F-M3-04
미터 인
HP06-900027
KQ2L04-M5
HP14-900083
AS1201F-M5
-04-X214
미터 아웃
3-HP06-000275
PLUG
DIN
908-G1/8
3
5
U2-4-4*2.5(BLACK)
HP14-900088
AS1211F-M5-04
미터 인
HP06-000074
KQ2S04-M5N
HP09-000157
MANIFOLD
VABM-L1-10S-G18-4
2-HP09-000164
SILENCER
U-E-1/8-S
HP06-000279
FITTING QS-E-1/8-8-C
1
4
2
4
2
2-HP06-000278
FITTING
QS-E-M5-4-I-C
2-HP06-000278
FITTING
QS-E-M5-4-I-C
4
2
2-HP14-000431
SPEED CONTROLLER
GRLZ-M5-QS-4-D
미터 인
HP15-000010
PLATE
VABB-L1-10-S
U2-4-4*2.5(YELLOW)
U2-4-4*2.5(BLACK)
U2-4-4*2.5(YELLOW)
U2-4-4*2.5(BLACK)
A
B
EP07-000858
SOLENOID VALVE
VUVG-S10-M52-RT-Q4(BM5)-1H2L
HP09-900109
REGULATOR
AR10-M5BG
HP03-900039
CQ2B6-CJJC2948
3-HP
14-000397
SOLENOID VALVE
VUVG-L10-M52-RT-M5-1H2L
AM03-007338A
EDGE FIXER가 추가 된
4연 SOL VALVE 모듈
4-HP06-900027
KQ2L04-M5
U2-4-4*2.5
2-HP06-900300
KS-4-M5-SA34698KR
U2-4-4*2.5
U2-4-4*2.5
5-HP06-900014
KQ2L06-01
U2-4-4*2.5
2-HP06-900299
KD-M5-SA34697KR
2-HP06-900047
KQ2L04-M5
HP14-900026
K180-4E1-21-DC24V
HP14-900026
K180-4E1-21-DC24V
HP14-900092
AKH06-00
AN101-01
HP06-900018
KQ2U06-00
HP06-900050
SQU04-06-W
3-FC14-900724
U2-4-6*4
U2-4-4*2.5
HP06-900050
SQU04-06-W
U2-4-4*2.5
2-HP06-900027
KQ2L04-M5
BLOW DUMP
BLOW DUMP
BLOW DUMP
HP11-000074
INJECTOR-P5010.00.AJ.01. (PI48-3)
HP06-000277
KQ2L12-04S
HP06-900041
KQ2L04-01S
'a'
'b'
HP14-000978
SOLENOID VALVE
VUVG_L18_M52
3-DIN908-G1/4
2-QSL-E-1/4-10
VUVG-L18-M52-RT-G14-1H2L
U2-4-6*4, BLACK
U2-4-6*4, YELLOW
U2-4-4*2.5, BLACK
U2-4-12*8, BLACK
' c'
'c'
' d'
' d'
'
c'
'd'
U2-4-10*6.5, BALCK
VACUUM GENERATOR (OPTION)
㐐, ḩ㚉 ⵤ㉔䚔 ᶷ
U2-4-10*6.5, BACLK
U2-4-10*6.5, BLACK
U2-4-4*2.5, BLACK
U2-4-12*8, BLACK
U2-4-8*5, BLACK
U2-4-6*4, BLACK
U2-4-12*8, BACLK
U2-4-4*2.5, BALCK
U2-4-6*4, BALCK
U2-4-6*4, BLACK
U2-4-6*4, YELLOW
U2-4-12*8, BLACK
U2-4-6*4, BALCK
U2-4-6*4, BLACK
U2-4-8*5, BLACK
U2-4-6*4, BLACK
U2-4-6*4, YELLOW
U2-4-12*8, BLACK
U2-4-6*4, BALCK
U2-4-6*4, BLACK
U2-4-6*4, BLACK
U2-4-6*4, BLACK
HP06- 00032 4
FITTING
KQ2L12 -02 AS
HP06- 000235
FITTING
KQ2
U12
-00
HP06- 900046
FITTING
KQ2R04 -08
HP06- 000234
FITTING
KQ2R08 -12
Air Shower
'e'
'e'
'e'
HP06- 001071
FITTING
M-5ALHU-4
HP06-
900054
FITTING
KQ2U04 - 00
HP06- 900054
FITTING
KQ2
U04 - 00
HP14 - 900036
SOLENOID VALVE
[V114A-5MOU]
2xHP13-000037A
UML-412
BU1-YL1-BK10
3.7M
12
1
2x2-J67111035A
KQ2H04-06
HEAD 10 HEAD 1HEAD 2HEAD 3HEAD 4HEAD 5HEAD 6HEAD 7HEAD 8HEAD 9
HP06-000235
KQ2U12-00
2-HP06-000234
KQ2R08-12
U2-4-8*5, BLACK
Front HEAD Air Module
Feeder Base (DC)
4-HP06-900018
KQ2U06-00
REAR
DOCKING CART ASS'Y (OPTION)
FRONT
도
DC OPTION
일
때
,
동일
구조
2-HP03-900011
AIR CYLINDER(SMC)
FRONT
FEEDER BASE ASS'Y (STANDARD)
REAR
도
STANDARD
일
때
,
동일
구조
Feeder Base
U2-4-6*4
4-HP06-900027
KQ2L04-M5
U2-4-4*2.5
2-HP06-900300
KS-4-M5-SA34698KR
U2-4-4*2.5
U2-4-4*2.5
5-HP06-900014
KQ2L06-01
U2-4-4*2.5
2-HP06-900299
KD-M5-SA34697KR
2-HP06-900047
KQ2L04-M5
HP14-900026
K180-4E1-21-DC24V
HP14-900026
K180-4E1-21-DC24V
HP14-900092
AKH06-00
AN101-01
HP06-900018
KQ2U06-00
K
HP06-900050
SQU04-06-W
3-FC14-900724
U2-4-6*4
U2-4-4*2.5
HP06-900050
SQU04-06-W
U2-4-4*2.5
2-HP06-900027
KQ2L04-M5
BLOW DUMP
B
BLOW DUMP
O
B
BLOW DUMP
'
c
'
'
c
'
'
d
'
'
d
'
'
c
'
'
d
'
U2-4-6*4, BLACK
U2-4-6*4, YELLOW
U2-4-12*8, BLACK
U2-4-6*4, BALCK
U2-4-6*4, BLACK
Air Shower
A
'
e
'
'
e
'
'
e
'
HP06-
001071
FITTING
M-5ALHU-4
HP06-
900054
FITTING
K
Q2
U
04
-
00
HP06-
P
900054
FITTING
T
KQ2
Q
U04
-
00
HP
14
-
900036
SOLENOID VALVE
[V114A-5MOU]
S
UPPLY BLOW
∅
4
(
A
)
4
(
B
)
2
3
(R)
1
(P)
BLOW
∅
4
0.1MP
a
OVER BLO
W
∅
4
0
.5MP
a
HP09-000127
KM11-04-08-10
Y CABLE DUCT ASSY
,
2xHP13-000037A
UML-412
BU1-YL1-BK10
3.7M
12
1
2x2-J67111035A
KQ2H04-06
HEAD 1
0
HEAD 1HEAD
2
HEAD 3
HEAD 4
HEAD
5
HEAD
6
HEAD
7
H
EAD
8
HEAD
9
HP06-000235
KQ2U12-00
2-HP06-000234
KQ2R08-12
2
U
2-4-8
*
5, BLA
CK
1
3
2
(A)
4
3
(
R
)
Front HEAD Air Module
초기
진공도달압
: -93.3 kPa
이하
교
체
기준
: -87 kPa
VACUUM PUMP (OPTION)
FRONT AIR PANEL ASS'Y
VACUUM GENERATOR (AIR OPTION)
'a'
'
b'
HP11-001019
VACUUM PUMP
KHB200A-304A-G1
HP06-900104
FITTIN
G
KQ2L06-02S
U2-4-6*4(YELLOW)
4
HP06-900043
FITTING
KQ2F04-01
TE07-900096
ANALOG GAUGE (VACUUM)
GZ46-K-01-C1
HP09-001019
REGULATOR
ARP20-02BG-CJSZ1406
HP04-001016
AIR FILTER
AC30-03D-CJSZ2045
U2-4-12*8
U2-4-12*8
HP09-000150
DIGITAL GAUGE
SPABT-P10-R18-2N-K1-SA
U
2-4-4*2.
5
HP06-900255
FITTING
KQ2H04-M5
HP11-000074
INJECTOR-P5010.00.AJ.01. (PI48-3)
HP06-000277
KQ2L12-04S
HP06-900041
KQ2L04-01S
'a'
'
'b'
'
HP14-000978
SOLENOID VALVE
VUVG_L18_M52
3-DIN908-G1/4
2-QSL-E-1/4-10
VUVG-L18-M52-RT-G14-1H2L
H
U2-4-6*4, BLACK
4
U2-4-6*4, YELLOW
4
U2-4-4*2.5, BLACK
U
2-4-12
*
8, BLA
CK
U2-4-10*6.5, BALCK
VACUUM GENERATOR (OPTION)
㐐
,
ḩ
㚉
ⵤ㉔䚔
ᶷ
U2-4-10*6.5, BACLK
U2-4-12*8, BACLK
U2-4-4*2.5, BALCK
HP06-
00032
4
FITTING
KQ2
L
12
-02
A
S
AA
HP06-
000235
FITTING
KQ
2
U12
-
00
HP06-
900046
FITTING
KQ2
R0
4
-
08
HP06-
000234
FITTING
KQ2
R08
-
12
HP09-000007
KM11-08-12-10
VACUUM PUMP (AIR OPTION)
MAIN MANIFOLD ASS'Y
STANDARD AIR ASSY
S
LEFT CABLE DUCT ASSY
Y
A
HP06-000226
FITTING KQ2R10-12
(ST OPTION
㢰
ᷱ㟤
KQ2P-10
㥐ᶤ䚌Ḕ
ⵤ㉔䚔
ᶷ
)
FC14-900641
PLUG KQ2P-10
F
C
14-
9006
4
4
P
LUG KQ2P-0
8
FC14-900644
P
LU
G
K
Q
2P-08
FC14-900644
PLUG KQ2P-08
F
C
14-
9006
4
4
P
LUG KQ2P-0
8
F
C
14-
9006
4
4
P
LUG KQ2P-08
HP06-900282
KQ2R06-08
HP06-900282
KQ2R06-08
H
P06-90028
2
K
Q
2R06-08
H
P06-90028
2
KQ
2R06-08
U2-4-10*6.5, BLACK
U2-4-4*2.5, BLACK
U2-4-12*8, BLACK
U2-4-8*5, BLACK
U2-4-6*4, BLACK
U2-4-6*4, BALCK
U2-4-6*4, BLACK
U
U2-4-6*4, BLACK
000
1
CONVEYOR ASS'Y
3-HP06-900027
KQ2L04-M5
EDGE FIXER OPTION (SPECIAL)
AM03-007232A (
기본
3
연
SOL VALVE
모
듈
)
ASSY,AIR-SM482_SOL_VALVE_MODULE
U2-4-4*2.5(YELLOW)
87
04
HP06-90002
KQ2L04-M5
00083
F-M5
4
웃
3-HP06-000275
PLU
G
DIN
908-G1/8
3
5
U2-4-4*2.5
(
BLACK
)
HP06-900072
0
PY4M
ANC ASSY
HP03-000083
CYLINDER CUJB12-5D
224
2-HP14-90008
AS1211F-M3-0
미터
인
HP09-000157
MANIFOLD
VABM-L1-10S-G18-4
2-HP09-000164
S
ILEN
C
ER
U
-E-1
/
8-
S
HP06-000279
FITTING QS-E-1/8-8-C
1
4
4
4
4
2
4
4
4
4
2
2-HP06-000278
FITTING
QS-E-M5-4-I-C
2-HP06-000278
FITTING
QS-E-M5-4-I-C
4
4
2
2-HP14-000431
SPEED CONTROLLER
GRLZ-M5-QS-4-D
미
터
인
HP15-000010
PLATE
VABB-L1-10-S
U2-4-4*2.5(YELLOW)
U2-4-4*2.5(BLACK)
2
U2-4-4*2.5(YELLOW)
U2-4-4*2.5(BLACK)
A
A
A
A
A
B
EP07-000858
-
SOLENOID VALVE
N
VUVG-S10-M52-RT-Q4(BM5)-1H2L
G
HP09-900109
REGULATOR
AR10-M5BG
HP03-900039
3
CQ2B6-CJJC2948
9
C
3-HP
14-000397
SOLENOID VALVE
VUVG-L10-M52-RT-M5-1H2L
AM03-007338A
EDGE FIXER
가
추
가
된
4
연
SOL VALVE
모듈
U2-4-8*5, BLACK
U2-4-6*4, BLACK
U2-4-6*4, YELLOW
U2-4-12*8, BLACK
U2-4-6*4, BALCK
U2-4-6*4, BLACK
56
(NONE STAGE OPTION)
HP03-900054
ACP1B16-20T-R6
27
HP14-900088
AS1211F-M5-04
미터
인
HP06-000074
KQ2S04-M5N
HP03-000096
CXSJM10-40-A93
HP06-900047
0
SQL04-M5
M
STOPPER ASSY(WORK)
HP14-90
AS1201F
-04-X214
미터
아웃
HP03-900013
CM2C32-50-XC3BB
2-HP06-90
KQ2L04-0
BUT ASSY
A
B
C
D
E
Page
+$1:+$
89
DECAN
S1