WaferSense APS3 Datasheet EN.pdf - 第2页
DS-APS3-180424 For more inf ormation, speak with your Nordson represent ative or c ontact your Nordson re gional oice Nordson T est & Inspection Europe, SEA, Africa ti-sales-eu@nordson.com Nordson T est & Inspec…
www.nordson.com/TestInspect
WS
The next generation APS3 improves equipment set-up and yields by wirelessly monitoring airborne particles in real-time.
Quickly monitors, identifies and enables troubleshooting of airborne particles down to 0.14μm within semiconductor process
equipment and automated material handling systems. Easily identifies when and where the particles originate.
Now in 150mm, 200mm and 300mm sizes. Chemically Hardened Glass (CHG)
version available in 300mm.
Thinner. Lighter. Precision Accuracy.
WaferSense
®
Airborne Particle Sensor™ (APS3)
Semiconductor fabs and OEMs worldwide value the accuracy, precision and
versatility of the WaferSense APS3 – The most eicient and eective wireless
measurement device for airborne particles.
Save Time Save Expense Improve Yields
NEW
Thinner &
Lighter
Weight
DS-APS3-180424
For more information,
speak with your Nordson
representative or contact
your Nordson regional oice
Nordson Test & Inspection
Europe, SEA, Africa
ti-sales-eu@nordson.com
Nordson Test & Inspection
Americas
ti-sales-us@nordson.com
Nordson Test & Inspection China
ti-sales-cn@nordson.com
Nordson Test & Inspection Japan
ti-sales-jp@nordson.com
Nordson Test & Inspection
Singapore
ti-sales-eu@nordson.com
Nordson Test & Inspection
Taiwan
ti-sales-tw@nordson.com
Nordson Test & Inspection Korea
ti-sales-korea@nordson.com
www.nordson.com/TestInspect
Detect particles in real-time without
opening the tool, so you don’t need to
expose process areas to the environment.
Thinner and lighter APS3 goes where
wafers go to find the place where particles
contaminate wafers. Once the location
of particles is identified, tools may be
selectively cleaned. Open only the dirty
portion, keep the clean areas clean.
Lower Equipment Expenses
With objective and reproducible data.
Raise your first-pass monitor wafer success,
reduce your qualification expense and
increase availability with APS3.
Receive early warning for impending
equipment failures and optimize your
preventative maintenance plans.
Establish a baseline from a known clean
tool, then cycle APS3 through a candidate
tool before committing monitor wafers.
Speed Equipment Qualification
With wireless measurements.
Collect and display small and large particle
data wirelessly using APS3 and the new
CyberSpectrum™ soware for real-time
equipment diagnostics.
Compare past and present data as well as
one tool to another easier and faster without
opening an additional application, now
with Review functionality integrated with
CyberSpectrum.
Save time by swily locating contamination
sources and see the eect of cleanings,
adjustments and repairs in real time.
Shorten Maintenance Cycles
Shorten equipment maintenance cycles with
wafer-like form factor.
Airborne Particle Sensor™ (APS3)
Specifications
Form factor
Available in 150mm,
200mm and 300mm
Part numbers
8025825 (150mm), 8025824 (200mm),
8025754 (300mm)
Soware
Reports x-y-z oset from the
teaching wafer to a target inside
the equipment so you can teach wafer
transfer coordinates
Accuracy
Measures particles greater than 0.14μm.
Size channels: Reports particles in
0.1μm and 0.5μm bin sizes and larger
particles in 2, 5, 10 and 30 μm bin sizes.
Less than 5 false counts per hour
Housing material
Carbon fiber composite substrate,
Chemically Hardened Glass (CHG) for
APS3 300G only
Weight
150mm (122g); 200mm (139g); 300mm
(190g) (± 7%); 300mm G (243.7g)
Airflow
0.07CFM (2.0 L/min)@ 1 atmosphere
Operating pressure
0 to 1.6 atmospheres
Operating internal
temperature
15 to 45 °C non-condensing
Laser power output
and wavelength
APS devices are a Class 1 laser product,
405nm
Battery-duration
>1 hour per charge. Inductive wireless
charging and handsfree operation
Communication
Bluetooth, Class 1, 2.4GHz
Operating system
Windows 10
Product components
Particle measurement device, charging
clean case, carrying suitcase, USB
communications link module
Calibration
Factory recalibration
recommended annually
CyberSpectrum
TM
Soware
Displays real-time numeric and
visual feedback, cumulative or
dierential counting modes and
particle frequency.
Review functionality integrated;
replays log file data for review
and analysis.
WaferSense
®
Dimensions