AXP2.0_Handout2020.pdf - 第2页

AXP 2.0 T echnical Specications www .akr ometrix.com sales@akrometrix.com 1-404-486-0880 AXP Base Platform, 100LPI Grating 200LPI Grating 300LPI Grating Vision Measur ement T echnology Shadow Moir é Shadow Moir é Shadow…

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akrometrix.com
sales@akrometrix.com
1-404-486-0880
• Accommodatessubstrates
up to 375mm x 375mm
• FieldofViewMeasurement
in 2 seconds
• Withzresolution down to
0.85 microns
• RunsontheAkrometrix
Studio Software Suite
• OptionalCapabilities:
• DFP2
• Subroom to -55°C
• DIC for CTE Capability
• PCBs
• Panels
• Wafers
• Stacked Die
• Individual Die
• Populated Boards
• Wafers on Film Frame
• Components
• Fan out Wafers
AXP2.0
Thermal Warpage
System
For Fast Thermal
Surface Topography
ONVIRTUALLYANYSUBSTRATE
AXP 2.0 Technical Specications
www.akrometrix.com
sales@akrometrix.com
1-404-486-0880
AXP Base Platform,
100LPI Grating
200LPI Grating 300LPI Grating
Vision Measurement Technology Shadow Moiré Shadow Moiré Shadow Moiré
Maximum Field of View (FOV) (mm) 375x375 375x375 250x250
Minimum Field of View (FOV) (mm) 348x260 232x173 116x87
Maximum Sample Size (mm) 400x400 400x400 250x250
Minimum Sample Size (mm) 6x6 4x4 2x2
Maximum Measured Surface Coplanarity 4000 microns 1000 microns 250 microns
Resolution, Z-axis (vertical displacement) 2.5 microns 1.25 microns 0.85 micons
Accuracy, Z-axis (vertical displacement) 2.5 microns / 3% 1.25 microns/ 3% 0.85 micons/ 3%
Resolution, XY-axes (horizontal displacement) N/A N/A N/A
Strain Resolution N/A N/A N/A
Maximum Measurement Points per Acquisition 1,447,680 1,447,680 1,447,680
Maximum Measurement Density (points per mm²) 16 64 144
Minimum Measurement Density (points per mm²) 7 7 18
Thermal Processing Technology Radiant IR Radiant IR Radiant IR
Maximum Heating Rate, 50°C to 250°C (°C/s)* 3.5 3.5 3.5
Maximum Cooling Rate, 250°C to 125°C (°C/sec)* 2.25 2.25 2.25
Maximum Temperature (°C) 300 300 300
Cycle Time 25°C to 250°C to 25°C (minutes)* 10 10 10
Software Akrometrix Studio 8.1
or later
Akrometrix Studio 8.1
or later
Akrometrix Studio 8.1
or later
Data Export Formats .dat, .txt, .png .dat, .txt, .png .dat, .txt, .png
Sample Set-up time, typical 2 minutes 2 minutes 2 minutes
Sample preparation method, typical none white paint white paint
Data Acquisition (Measurement) Time, approximate 2 seconds 2 seconds 2 seconds
Data Analysis Time per Acquisition, approximate 2 seconds 2 seconds 2 seconds
MaximumThermalProles Unlimited Unlimited Unlimited
Maximum Thermal Cycles Time Unlimited Unlimited Unlimited
Maximum Acquisitions per Cycle Unlimited Unlimited Unlimited
Automated Data Collection yes yes yes
Batch Data Analysis yes yes yes
Appromixate Length, Width, Height (mm) 1280x970x1780 1280x970x1780 1280x970x1780
Appromixate Weight (kg) 575 575 575
Electrical Requirements 220VAC, 3 phase, 45A 220VAC, 3 phase, 45A 220VAC, 3 phase, 45A
Air Requirements N/A N/A N/A
Other Utilities exhaust 14286 lpm exhaust 14286 lpm exhaust 14286 lpm
*Heating/cooling rates and cycle times based on 27x27x1.4mm substrates sample