Wafer Vision Inspection Handler Wi8 i G2 - ViTrox.pdf - 第2页
Field of View 12.8mm x 12.8mm 6.4mm x 6.4mm 2.5mm x 2.5mm System Capability Offline Verifier Optimize production yield. Once wafer inspection is completed, user can identify , review and r eclassify inspection result with …
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Wi8 i G2 : Wafer Vision Inspection Handler
Wi8 i G2 Wafer Vision Inspection Handler offers advanced solution for 2D surface defect inspections, measurements
and multiple handling mechanisms to support different wafer forms including raw wafer, hoop ring, and framed wafer
range from 100mm (4”) to 300mm (12”).
Model Type Wi8 i G2
Wafer Input Type &
Size
Raw Wafer - 6” (150mm) , 8” (200mm) , 12” (300mm)
Framed Wafer - 6” (150mm) , 8” (200mm) , 12” (300mm)
Hoop Ring - 4” (100mm) , 6” (150mm) , 8” (200mm)*
Camera Lens
1X 2X 5X
Accuracy
2.5 μm / pixel 1.25 μm / pixel 0.5 μm / pixel
Field of View
12.8mm x 12.8mm 6.4mm x 6.4mm 2.5mm x 2.5mm
System Capability
Offline Verifier
Optimize production yield. Once wafer inspection is completed, user can identify, review and reclassify inspection
result with Offline Verifier.
Wafer Automated Loader-Unloader
Auto handling supports up to 300mm (12”) raw wafer, hoop ring and framed wafer.
*Only manual loading available | Specifications are subject to change.
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