PD-Pro-Plasma-System-NordsonMARCH-A4.pdf - 第2页
Specif ications: PD - Pro Pl asma Deposi tion System For mor e inform ation , speak wi th your l ocal represen tativ e or co ntact yo ur regio nal offi ce . North A merica Headquarters Concord, CA +1.925.827.1240 China S…
PD-Pro Plasma Deposition System
Features and Benefits
Pulsed 13.56 MHz RF to enhance the
properties of plasma polymerized films
Gas vapor or heated liquid monomer
vapor delivery system to deposit
coatings
Patented system technologies produce
superior process uniformity at high
throughput
High throughput of for maximum
production flexibility
Accommodates large product sizes
within a small footprint to consume
minimal floor space
Fast units per hour (UPH) processing
to meet today’s demanding
manufacturing schedules
Optional intraluminal deposition
capability
Superior Plasma Deposition Uniformity for
High Throughput Treatment
Nordson MARCH’s PD-Pro system is specifically
configured to meet the demands of today’s high-
throughput manufacturing operations where plasma
deposition uniformity is key to success. The PD-Pro
system delivers!
The PD-Pro system is completely self-contained,
requiring minimal floor space. The vacuum system,
plasma chamber, control electronics, and 13.56 MHz
power supply are housed in a single enclosure. Full front
and rear access allows for convenient service to all
interior components. The pump is positioned on rollers
for easy removal. No side access is required allowing for
even greater floor space savings. The vapor delivery
system is expertly integrated into the base system for
ease of access, maintenance and control.
Application-Specific Deposition Technology
The PD-Pro system incorporates the best of Nordson
MARCH’s market-leading technology combined with
novel, application-specific technology development that
is based on our 30+ years of experience. Through
extensive research and development, the PD-Pro system
presents unique vacuum and gas flow technology,
electrode designs, and superior temperature
management. The careful balance of these critical design
elements and process recipe parameters delivers a system
that creates the most uniform plasma deposition for key
applications.
The PD-Pro system’s superior performance capabilities
are complemented by low cost of ownership.. The
system features a compact and service-friendly design.
The vertical or horizontal loading configuration and the
use of loading carts minimizes idle time, which generates
high levels of productivity. The fast vacuum pump-down
and greatly enhanced process cycle times further add to
the throughput and productivity of the system.
Equipped with a touch-screen PC Operator Interface,
the PD-Pro system provides a wide breadth of control
capability and data collection. Unlimited recipes can be
stored for easily switching plasma deposition processes
from batch to batch. Password protection ensures that
no unauthorized entries can be made.
Specifications: PD-Pro Plasma Deposition System
For more information, speak with your local representative or contact your regional office.
North America
Headquarters
Concord, CA
+1.925.827.1240
China
Shanghai
+86.21.3866.9166
EMEA
Maastricht,
Netherlands
+31.65.155.4996
S.E. Asia
Singapore
+65.6796.9500
Korea
Seoul
+82.31.739.6374
Taiwan
New Taipei City
+886.2.2902.1860
India & South
Asia
Chennai
+91.44.4353.9024
www.nordsonmarch.com info@nordsonmarch.com
Published 2017-01-19
Enclosure
Dimensions
W x D x H – Footprint
1652W x 1939 D x 2502H mm
(65W x 76.25D x 98.5H in.)
Net Weight
1776 kg (3915 lbs.)
Chamber
Maximum Volume
0.86 m
3
(30 ft
3
)
Variable Electrode Configurations
Power-Ground, Ground-Power, Power-Power
Number of Electrode Positions
14 electrodes (fixed) or 13 cells
Electrode Pitch
63.5 mm (2.5 in.) (fixed)
Electrodes
Configuration
Temperature Controlled Power-Power
Working Area
762D x 610H mm; (30D x 24H in.)
RF Power
Standard Wattage
5 kW
Frequency
13.56 MHz
Gas Control
Available Flow Volumes
50, 100, 250, 500, 1000, 2000 or 5000 sccms
Maximum Number of MFCs
5
Control
Interface
PLC with PC-Based Touch Screen Interface
Vacuum
Pump
Standard Purged Dry Pump
63 cfm
Standard Booster Pump
612 cfm
Facilities
Power Supply
208-230 VAC, 60 A, 3-Phase, 6AWG, 4 wire 50/60 Hz
Process Gas Fitting Size & Type
6.35 mm (0.25 in.) Swagelok
Process Gas Purity
Industrial Grade or better
Process Gas Pressure
0.69 bar (10 psig) min. to 1.7 bar (25 psig) max., regulated
Purge Gas Fitting Size & Type
9.5 mm (0.375 in.) Swagelok Tube
Purge Gas Purity
97% N2
Purge Gas Pressure
4.83 bar (70 psig) min. to 5.17 bar (75 psig) max., regulated
Pneumatic Valves Fitting Size &
Type
9.5 mm (0.375 in.) Swagelok
Pneumatic Gas Purity
CDA, ISO 8573-1:2010[4:3:2]
Pneumatic Gas Pressure
6.2 bar (90 psig) min. to 6.9 bar (100 psig) max., regulated
Exhaust
NW 40 connection Negative Draw, -38.1 mm (-1.5in) WC
Draw, 1780 slm (63 SFCM) maximum flow rate
System Coolant
5.52 bar (80 psig) max static
2.76 bar (40 psig) min. differential between machine inlet
and outlet: 38 Lpm (10 gpm) min.
Inlet temp: 15-35 ºC (60-95 ºF), 5 ºC min above dew point.
Distilled Water; Inlet Fitting: 12.7mm (0.5 in.) OD hose barb,
Outlet Fitting: 12.7mm (0.5 in.) OD hose barb
Compliance
USA
EH&S/Ergonomics
International
CE Marked
Ancillary
Equipment
Gas Generators
Nitrogen, Hydrogen
(requires Additional Non-Optional Hardware)
Facilities
Chiller, Scrubber, Transformer