SQ3000-CMM.pdf - 第2页
Multi-Reec tion Suppression (MRS) T echnology SQ3000™ oers unmat ched accuracy with the revolutionary MRS technology by meticulously identifying and r ejecting reections caused by shiny c omponents. E ective suppress…

SQ3000™ 3D CMM
Contact CyberOptics today for more information
+1 800.366.9131 or +1 763.542.5000 | CSsales@cyberoptics.com | www.cyberoptics.com
Copyright © 2018. CyberOptics Corporation. All rights reserved. Specications subject to change without notice. 8025678 Rev F
SQ3000
™
3D CMM
The Ultimate in Speed and Accuracy for Industrial Metrology,
Semiconductor, Microelectronics and SMT Applications
Powered by
MRS Technology
NEW
CMM
Suite
Fastest – Seconds, not Hours
– Signicantly speeds attaining coordinate measurements vs. traditional CMMs
– Reduces engineering resource time
Easy-to-use Interface
– Simplies process with award-winning, intuitive, touch screen experience
– Quick programming for complex applications
– Multi-process capable – AOI, SPI, AOM, CMM
Metrology-grade Accuracy
– Achieve metrology-grade accuracy with MRS-enabled technology
– Repeatable and reproducible measurements for Metrology, Semiconductor,
Microelectronics and SMT Applications
Inspection Capabilities MRS Sensor Ultra High Resolution MRS Sensor
Inspection Speed 40 cm
2
/sec (2D+3D), High Speed option
available: 50 cm
2
/sec (2D+3D)
15 cm
2
/sec (2D+3D)
XY Resolution 10 µm 7 µm
Z Resolution 1 µm 1 µm
Maximum Weight SQ3000: 3 kg (5 kg Option), SQ3000-X: 10 kg
Minimum Feature Size 10 µm 7 µm
Minimum Feature Height 2 µm 2 µm
Maximum Feature Size SQ3000: 510 x 510 mm (20 x 20 in.), SQ3000-X: 710 x 610 mm (27.9 x 24 in.)
Maximum Feature Height 24 mm 10 mm
XY R&R < 3 µm 1 sigma < 2 µm 1 sigma
Z R&R < 2 µm 1 sigma < 2 µm 1 sigma
Accuracy XY 3 µm 2 µm
Accuracy Z 2 µm 2 µm
Height Clearance Top: 50 mm, Bottom: 30 mm
Carrier Thickness 0.3 - 5 mm (10 mm Option)
Coordinate Measurement
Capability
Line / Distance / X,Y / Mid Line, Inter Point / Regression Shifted, Datum X,Y / LSF X,Y Oset,
X,Y Oset / Value / Location / List of X,Y Values, Height / Local Height / Regression / Radius,
Coplanarity/ Distance to plane / 2nd Order tting, Dierence / Absolute / 2sqrt / VC, Max / Min /
Ave / Sigma / Plus / Minus / Multiple
Vision System & Technology
Imagers Multi-3D sensors
Resolution Sub 10 µm 7 µm
Image Processing Autonomous Image Interpretation (AI
2
) Technology, Coplanarity and Lead Measurement
Programming Time <15 minutes (for established libraries)
CAD Import Any column-separated text le with ref designator, XY, Angle, Part no info; Valor process
preparation
System Specications
Machine Interface SMEMA, RS232 and Ethernet
Power Requirements 100-120 VAC or 220-240 VAC, 50/60 hz, 10 amp max.
System Dimensions 110 x 127 x 139 cm (W x D x H)
Weight ≈965 kg (2127 lbs.)
Options
Barcode Reader, Rework station, SPC Software, Alignment Target
SQ3000-X (Large Board Capability), SQ3000-D (Dual Lane), and SQ3000-DD (Dual Lane - Dual Sensor) models available
Front Side

Multi-Reection Suppression (MRS)
Technology
SQ3000™ oers unmatched accuracy with the revolutionary
MRS technology by meticulously identifying and rejecting
reections caused by shiny components. Eective suppression
of multiple reections is critical for accurate measurement
making MRS an ideal technology solution for a wide range
of applications including those with very high quality
requirements.
CyberOptics has advanced the proprietary Multi-Reection
Suppression (MRS) sensor to an even ner resolution. The
Ultra-High Resolution MRS sensor enhances the SQ3000 3D
CMM platform, delivering superior inspection performance,
ideally suited for mechanical parts inspections, socket
metrology and micro-electronic applications where an even
greater degree of accuracy and inspection reliability is critical.
SQ3000
™
The Ultimate in Speed and Accuracy
High Precision Accuracy with Multi-Reection
Suppression (MRS) Sensor Technology
The SQ3000™ is powered by CyberOptics’ breakthrough 3D sensing
technology comprising four multi-view 3D sensors and a parallel
projector delivering metrology grade accuracy at production speed.
CyberOptics’ unique sensor architecture simultaneously captures
and transmits multiple images in parallel while proprietary 3D fusing
algorithms merge the images together. The result is ultra-high
quality 3D images and high-speed inspection.
AI
2
- Faster, Smarter Programming
AI
2
(Autonomous Image Interpretation) technology is all about keeping it
simple - no parameters to adjust or algorithms to tune. And, you don’t need
to anticipate defects or pre-dene variance either - AI
2
does it all for you.
With AI
2
, you have the power to inspect the most comprehensive list
of features and identify the widest variety of defects. AI
2
oers precise
discrimination with just one panel inspection making it a perfect solution
for high-mix and high-volume applications.
Fast, Scalable SPC Solution
CyberReport™ oers full-edged machine-level to
factory-level SPC capability with powerful historical
analysis and reporting tools delivering complete
traceability for process verication and yield
improvement. CyberReport™ is easy to setup and
simple to use while providing fast charting with a
compact database size.
Factory-level SPC
Line-level SPC
Machine-level SPC
Yield
Intuitive, Easy-to-Use Software
The SQ3000™ software is a powerful yet extremely simple
design with an intuitive interface that reduces training eorts
and minimizes operator interaction – saving time and cost. The
software includes multi-touch controls and 3D image visualization
tools, taking ease-of-use to a whole new level.
Seconds, not Hours - Faster, Highly Accurate
Coordinate Measurement Suite (CMM)
CyberCMM™, a comprehensive software suite of coordinate measurement
tools provides highly accurate, 100% metrology-grade measurement on
all critical points much faster than a traditional CMM, including coplanarity,
distance, height and datum X, Y to name a few. A fast and easy set-up can
be performed in less than an hour for programming
complex applications as compared to slow,
engineering resource-intensive set-up that typically
requires multiple adjustments with traditional
coordinate measurement machines (CMMs)
Fast and highly accurate with repeatable and
reproducible coordinate measurements for Industrial
Metrology, Semiconductor, Microelectronics and
SMT applications.
NEW
CYBERREPORT
SPISOFTWARE
AOISOFTWARE
CYBERREPORT
CYBERCMM
SPISOFTWARE
AOISOFTWARE
CYBERCMM
CYBER
PRINTOPTIMIZER
CYBER
PRINTOPTIMIZER
CYBERREPORT
SPISOFTWARE
AOISOFTWARE
CYBERREPORT
CYBERCMM
SPISOFTWARE
AOISOFTWARE
CYBERCMM
CYBER
PRINTOPTIMIZER
CYBER
PRINTOPTIMIZER