P-0227-001.pdf - 第144页
MODEL TCM-3200J 0102-001 142 XY テーブル部 XY TABLE SECTION Fig. 6-8 配線支持部 Wiring Support 1 1 2 2 2 2 A A 25 22 113 113 116 116 115 113 113 115 115 116 116 23 23 24 24 26 Fig.6-8 TCM-3200J See Fig.6-2 See Fig.6-2 Key No.1 Key…
MODEL TCM-3200J
0102-001
Key No. PART No. PART NAME Q’ty REMARKS
NOTE
141
6-7
1 630 061 8211 BRACKET 1 759J--01B-048
2 630 000 0252 SENSOR,PHOTO 2 PHS105, PHS106 759J--01H-047
3 630 000 0269 SENSOR,PHOTO(CONNECTOR) 2 759J--01H-048
4 411 119 1909 WASHER V 3X7X0.5 4 FW3 F
5 411 086 4408 WASHER SPR 3 4 SW3 F
6 630 000 7534 BOLT,HEX-SCT 4 M3X12
7 630 061 2462 COVER 1 759J--01B-046
8 630 061 2486 COVER 1 759J--01B-052
9 411 051 1708 SCR TRS 4X6 4 M4X6 TRS
10 630 061 8204 COVER 1 759J--01B-047
11 411 051 1708 SCR TRS 4X6 2 M4X6 TRS
21 630 061 8235 PLATE 1 759J--01B-056
22 630 061 8242 PLATE 1 759J--01B-057
23 411 051 1708 SCR TRS 4X6 4 M4X6 TRS
26 630 061 5036 PLATE 1 759J--01B-058
27 630 000 7602 BOLT,HEX-SCT 3 M4X6
MODEL TCM-3200J
0102-001
142
XY テーブル部 XY TABLE SECTION
Fig. 6-8 配線支持部 Wiring Support
1
1
2
2
2
2
A
A
25
22
113
113
116
116
115
113
113
115
115
116
116
23
23
24
24
26
Fig.6-8
TCM-3200J
See Fig.6-2
See Fig.6-2
Key No.1
Key No.1
21
21
26
111
111
See Fig.6-4
See Fig.6-4
Key No.112
Key No.112
MODEL TCM-3200J
0102-001
Key No. PART No. PART NAME Q’ty REMARKS
NOTE
143
6-8
1 630 053 2173 GUIDE 4 759J--01B-023
2 411 051 1708 SCR TRS 4X6 8 M4X6 TRS
21 630 053 2166 BRACKET 1 759J--01B-022
22 411 141 4107 WASHER V 5X10X1 4 FW5
23 411 141 6705 WASHER SPR 5 4 SW5
24 630 000 7756 BOLT,HEX-SCT 4 M5X12
25 630 095 6719 MECH PARTS 1 759J--01H-026
26 411 113 9109 SCR TRS 5X10 8 M5X10 TRS
111 630 076 2006 ASSY,CORD (C30-X-SP1-C) 1
113 630 076 1979 ASSY,CORD (C30-Y-CORD) 1
115 630 091 5822 CORD(C32-Y-PO) 1 759FB-01D-812
116 630 091 8144 CORD(C32-Y-PG) 1 759FB-01D-810