supersigmacm3_E.pdf
F ully di gital controlled dispenser Deliv ering e ven sma ller mic ro-dispensing. Contributing to even higher throughput and yield. Deliv ering higher thr oughput for the global semiconductor manufa cturing device …
Fully digital controlled dispenser
Delivering even smaller micro-dispensing.
Contributing to even higher throughput and yield.
Delivering higher throughput for the global
semiconductor manufacturing device industry.
Better durability and easier maintenance
Greater performance with the
Σ 3 major functions
Automatic correction of volume reduction, automatic vacuum correction,
automatic low fluid alarm
Better reliability for low-viscosity liquid materials.
Better coverage of pressure changes.
Ultra-reliable dispensing with faster cycle
time and smaller size
The ultimate air-pulse system
Applications
Ag paste dispensing for
die bonding
Dust trapping agent
dispensing on camera
modules
Conductive Ag paste
dispensing on touch panels
Pressure changes
0.5MPa 0.2MPa
Super Σ CMⅢ
Conventional
product
Major fluctuation in
dispensing volume
immediately after
changing pressure.
High-speed regulation
for fast, reliable
operation.
The Σ series will be
the defacto standard
in the global
semiconductor
manufacturing device
industry.
Dispensing volume:
approx.
1/2
Close-up photo
Conventional product SuperΣCMⅢ
Minimum dispensing
time setting:1ms
0 500μm
UPH
5 kPa 15 kPa 30 kPa
Conventional
product
SuperΣCMⅢ
Dispensing pressure
Dispensing diameter fluctuation
(CV)
1995 2000 2005 2010 2015 2020
Specifications
External Dimensions
Units: mm
S-SIGMA-CM3-V5
0.030 to 0.500 MPa
S-SIGMA-CM3-V2
0.005 to 0.200 MPa
Product name
Model
Dispensing system
Control system
Dispensing modes
Dispensing pressure setting range
Dispensing time setting range
Vacuum pressure setting range
Main functions
Fully digital controlled dispenser
Air-pulse system
Micro-computer controlled electronic-pneumatic system
TIMED/MANUAL mode
0.001 to 9999.999 s
-0.020 to 0 MPa
Automatic correction of volume reduction, automatic fluid-drip prevention,
automatic remaining, volume alert, alpha (α) correction, delta (δ) correction,
vacuum pressure correction，remaining volume display correction，dispensing shot
counter, stopwatch, Japanese-English display switch, source pressure error,
exhaust error, vacuum pressure error, solenoid valve error, solenoid valve alarm
Note: contact Musashi Engineering if syringes or cartridges exceeding 70 mL need to be used.
“ 3 major functions” help to increase yield and contribute to a smarter production line
240
30
300
300
240
100
(7)
Full amount Remaining a little
Alert of exchanging syringe
Light specification version
Equipped with
Fully automatic dispensing machine
Without function (10 mL)
Without function (50 mL)
With
∑
function
100% 80% 60% 40% 20%
Fluid remaining in syringe
Dispensing volume reduction ratio (%)
(10 mL)
(50 mL)
Time
Pressure
Vacuum
Σ
Time
Pressure
Vacuum
Σ
Time
Pressure
Vacuum
RSM Detct
Correction of reduction in dispensing amount
caused by the effects of decreased syringe volume.
Delivers reliable, high-precision dispensing throughout
the entire syringe.
Automatic correction of
volume reduction
Function 1
Constantly maintains the optimum vacuum level
automatically for more reliable dispensing precision.
Automatic vacuum
correction
Function 2
Constantly detects and monitors the
remaining fluid level in the syringe
with a high level of precision.
Automatic low
fluid alarm
Function 3
100 CH
Available
Dispense, channel switching, dispensing mode switching, channel preset,
channel specification, channel step
Ready, dispensing completion, in-dispensing, in-dispensing cycle,
solenoid valve alarm, error, remaining volume alert, power on
AC100-240 V 50/60 Hz
30 W
CE-marking (Low Voltage Directive, EMC Directive)
EU RoHS
W300×D300×H100 mm
5.8 kg
Channel number
RS-232C serial communication
Input signals
Output signals
Rated power supply and frequency
Power consumption
Conformity standards
Dimensions W
*
D
*
H
Weight