IPS Datasheet EN.pdf
www .nordson.c om/T estInspec t WS Of small particles in g as and vacuum lines. Based on our Waf erSense® Airborne P article Sensor™ technology, IP S utilizes a high power blue laser to quickly monitor , identify and ena…
www.nordson.com/TestInspect
WS
Of small particles in gas and vacuum lines.
Based on our WaferSense® Airborne Particle Sensor™ technology, IPS utilizes a high power blue laser to quickly
monitor, identify and enable troubleshooting of particles down to 0.1μm within gas and vacuum line locations
for process sensitive applications.
24/7 detection
WaferSense
®
In-Line Particle Sensor™ (IPS)
Semiconductor fabs and OEMs worldwide value the accuracy, precision and versatility
of Nordson TEST & INSPECTION’s semiconductor measurement devices. The most eicient
and eective measurement devices for tool optimization, stabilization and standardization.
Save Time Save Expense Improve Yields
NEW
DS-IPS-180424
For more information,
speak with your Nordson
representative or contact
your Nordson regional oice
Nordson Test & Inspection
Europe, SEA, Africa
ti-sales-eu@nordson.com
Nordson Test & Inspection
Americas
ti-sales-us@nordson.com
Nordson Test & Inspection China
ti-sales-cn@nordson.com
Nordson Test & Inspection Japan
ti-sales-jp@nordson.com
Nordson Test & Inspection
Singapore
ti-sales-eu@nordson.com
Nordson Test & Inspection
Taiwan
ti-sales-tw@nordson.com
Nordson Test & Inspection Korea
ti-sales-korea@nordson.com
www.nordson.com/TestInspect
Lower Equipment Expenses
With objective and reproducible data.
Reduce the need, cost and complexity
of particle adder testing that requires
usage of test wafers and masks.
Receive early warning for impending
equipment failures and optimize your
preventative maintenance plans.
Multiple Line Locations
Install IPS in multiple line locations for
a variety of applications.
Versatile particle sensing for any
application that is process sensitive
to particles including semiconductor
processing equipment, EUV chambers,
vacuum chambers, 3D metal printing
equipment, equipment in controlled
environments and more.
Speed Equipment Qualification
With real-time 24/7 monitoring.
Collect and display particle data using IPS
and the new CyberSpectrum™ soware for
real-time equipment diagnostics.
Compare past and present data as well as
one tool to another easier and faster with
CyberSpectrum.
Save time by swily locating contamination
sources. See the eect of cleanings,
adjustments and repairs in real time.
Shorten Maintenance Cycles
Shorten equipment maintenance cycles
with inline particle sensing.
Detect particles in real-time and correlate
measurements with tool events.
Develop a baseline performance for tool
and process.
Simplify maintenance cycles by selectively
servicing portions of a tool causing particle
generation.
In-Line Particle Sensor™ (IPS)
Specifications
Mechanical interface
ISO-63 flange (standard
configuration)
Soware
CyberSpectrum
Accuracy
Measures particles greater than
0.1μm
Less than 5 false counts per hour
Vacuum exposed
materials
Aluminum, Glass, Viton O-Rings,
Stainless steel hardware
Vacuum integrity
Less than 10-6 atm-l/sec leak rate
Operating pressure
PN: 8027544: < 10
-6
to 250 Torr
PN: 8029580: < 10
-6
to 1520 Torr
Operating temperature
15 °C to 45 °C
Operating humidity
20-90% RH, non-condensing
Laser
Certified to Laser Class 1
Input voltage
12 VDC
IPS Link
Bluetooth, Class 1, 2.4GHz
Operating system
Windows 10
Product components
Sensor head, stainless cross fitting,
clamps, power supply, Bluetooth
communications link
module
CyberSpectrum
TM
Soware
Displays real-time numeric and
visual feedback, cumulative or
dierential counting modes and
particle frequency.
Review functionality integrated;
replays log file data for review and
analysis.
Real-time data.
WaferSense
®
Dimensions
Ships with blank flanges on vacuum ports.
Consult factory for installation instructions.