4OM-1141-001.pdf - 第104页
2.2 2.2 2.2 2.2 2.2 䞢㽖ֲ׃ખ߬㸽 䞢㽖ֲ׃ખ߬㸽 䞢㽖ֲ׃ખ߬㸽 䞢㽖ֲ׃ખ߬㸽 䞢㽖ֲ׃ખ߬㸽 乙⌠ᑉݚ⍝㗬ᅡⱙܘӋ߬㸽Ȣ䇌ԱЏগ㗘Ȣ ᳞݈䞢㽖ֲ׃ખⱙѹᤷᮎ⊪ͼವ䳕㽖傭ᑻᡕᴄͼ䇌䆷៦݁ ᳢্ࡶਭȢ ( ) ᴏẅܘӋ ゠Ԩߛ㾸 ゠Ԩߛ㾸 ゠Ԩߛ㾸 ゠Ԩߛ㾸 ゠Ԩߛ㾸 ए㒙ৢ ए㒙ৢ ए㒙ৢ ए㒙ৢ ए㒙ৢ ܘӋ㓫ৌ ܘӋ㓫ৌ ܘӋ㓫ৌ ܘӋ㓫ৌ ܘӋ㓫ৌ ܘӋৢ ܘӋৢ ܘӋৢ ܘӋৢ ܘӋৢ …
0305-001 1-92
2.2.
2.2.
2.
⍝㗬ܘӋ䞢㽖ֲ׃ખ߬㸽⍝㗬ܘӋ䞢㽖ֲ׃ખ߬㸽
⍝㗬ܘӋ䞢㽖ֲ׃ખ߬㸽⍝㗬ܘӋ䞢㽖ֲ׃ખ߬㸽
⍝㗬ܘӋ䞢㽖ֲ׃ખ߬㸽
2.2.
2.2.
2.
⍝㗬ܘӋ䞢㽖ֲ׃ખ߬㸽⍝㗬ܘӋ䞢㽖ֲ׃ખ߬㸽
⍝㗬ܘӋ䞢㽖ֲ׃ખ߬㸽⍝㗬ܘӋ䞢㽖ֲ׃ખ߬㸽
⍝㗬ܘӋ䞢㽖ֲ׃ખ߬㸽
2.2.
2.2.
2.
⍝㗬ܘӋ߬㸽⍝㗬ܘӋ߬㸽
⍝㗬ܘӋ߬㸽⍝㗬ܘӋ߬㸽
⍝㗬ܘӋ߬㸽
ϕᑉݚৄ㛒⍝㗬ᅡⱙܘӋ߬㸽Ȣ
䌂хᯋͼ䇌䆷៦্݁㧺ϯ䚽䫕ଃҸ⧛ᑬȢ
(a) ᓏ䆃ᭅЏগ㗘ؑȢ
(b) ᳞݈ܘӋⱙѹᤷᮎ⊪ͼ䇌গ✼ “ . ᅯ᳴㓉gֲݐ ”サ
㡗Ȣ
(c) ᇎᑩ⡎ࠀᓤḌȢ
() ᴏẅܘӋ
゠Ԩߛ㾸゠Ԩߛ㾸
゠Ԩߛ㾸゠Ԩߛ㾸
゠Ԩߛ㾸
ખખ
ખખ
ખ
ৢৢ
ৢৢ
ৢ
ܘӋ㓫ৌܘӋ㓫ৌ
ܘӋ㓫ৌܘӋ㓫ৌ
ܘӋ㓫ৌ
ܘӋৢܘӋৢ
ܘӋৢܘӋৢ
ܘӋৢ
㾙ḑ㾙ḑ
㾙ḑ㾙ḑ
㾙ḑ
//
//
/
ᴥ䋽ᴥ䋽
ᴥ䋽ᴥ䋽
ᴥ䋽
Ք⫽ᭅՔ⫽ᭅ
Ք⫽ᭅՔ⫽ᭅ
Ք⫽ᭅ
ᓏ䆃ᭅᓏ䆃ᭅ
ᓏ䆃ᭅᓏ䆃ᭅ
ᓏ䆃ᭅ
Fig.No Fig.No
Fig.No Fig.No
Fig.No
ໜໜ
ໜໜ
ໜ
⊽⊽
⊽⊽
⊽
/ /
/ /
/
ᑉᑉ
ᑉᑉ
ᑉ
( (
( (
(
গ㗘গ㗘
গ㗘গ㗘
গ㗘
))
))
)
(2)⬊㺚ܘӋ
゠Ԩߛ㾸゠Ԩߛ㾸
゠Ԩߛ㾸゠Ԩߛ㾸
゠Ԩߛ㾸
ખખ
ખખ
ખ
ৢৢ
ৢৢ
ৢ
ܘӋ㓫ৌܘӋ㓫ৌ
ܘӋ㓫ৌܘӋ㓫ৌ
ܘӋ㓫ৌ
ܘӋৢܘӋৢ
ܘӋৢܘӋৢ
ܘӋৢ
㾙ḑ㾙ḑ
㾙ḑ㾙ḑ
㾙ḑ
//
//
/
ᴥ䋽ᴥ䋽
ᴥ䋽ᴥ䋽
ᴥ䋽
Ք⫽ᭅՔ⫽ᭅ
Ք⫽ᭅՔ⫽ᭅ
Ք⫽ᭅ
ᓏ䆃ᭅᓏ䆃ᭅ
ᓏ䆃ᭅᓏ䆃ᭅ
ᓏ䆃ᭅ
Fig.No Fig.No
Fig.No Fig.No
Fig.No
ໜໜ
ໜໜ
ໜ
⊽⊽
⊽⊽
⊽
/ /
/ /
/
ᑉᑉ
ᑉᑉ
ᑉ
((
((
(
গ㗘গ㗘
গ㗘গ㗘
গ㗘
))
))
)
く䖜Ⓓఽく䖜Ⓓఽ
く䖜Ⓓఽく䖜Ⓓఽ
く䖜Ⓓఽ
㘯⇽䝄༎ሗ㘯⇽䝄༎ሗ
㘯⇽䝄༎ሗ㘯⇽䝄༎ሗ
㘯⇽䝄༎ሗ
ߕϟߘߕϟߘ
ߕϟߘߕϟߘ
ߕϟߘ
ߕϠߘߕϠߘ
ߕϠߘߕϠߘ
ߕϠߘ
ᬄᩦ䩝ᬄᩦ䩝
ᬄᩦ䩝ᬄᩦ䩝
ᬄᩦ䩝
ఉఉ
ఉఉ
ఉ
(Z)(Z)
(Z)(Z)
(Z)
ఉఉ
ఉఉ
ఉ
(Z2 )(Z2 )
(Z2 )(Z2 )
(Z2 )
ఉఉ
ఉఉ
ఉ
(Z3 )(Z3 )
(Z3 )(Z3 )
(Z3 )
ఉఉ
ఉఉ
ఉ
(Z4 )(Z4 )
(Z4 )(Z4 )
(Z4 )
ఉఉ
ఉఉ
ఉ
(Z52)(Z52)
(Z52)(Z52)
(Z52)
ఉఉ
ఉఉ
ఉ
(Z62)(Z62)
(Z62)(Z62)
(Z62)
ఉఉ
ఉఉ
ఉ
(Z7 )(Z7 )
(Z7 )(Z7 )
(Z7 )
ఉఉ
ఉఉ
ఉ
(Z8 )(Z8 )
(Z8 )(Z8 )
(Z8 )
ఉఉ
ఉఉ
ఉ
(Z94)(Z94)
(Z94)(Z94)
(Z94)
ఉఉ
ఉఉ
ఉ
(Z8)(Z8)
(Z8)(Z8)
(Z8)
ఉఉ
ఉఉ
ఉ
(Z552)(Z552)
(Z552)(Z552)
(Z552)
ఉఉ
ఉఉ
ఉ
(Z90 )(Z90 )
(Z90 )(Z90 )
(Z90 )
630 048 7831
630 098 5740
630 089 3335
630 086 1471
630 069 3607
630 052 9517
630 052 9524
630 052 9531
630 052 9548
630 067 1865
630 068 3103
630 052 9579
630 052 9586
630 078 2295
630 083 3430
630 079 5370
630 052 9593
AIR CLEAN
EQPT
TUBU
PLATE
PLATE
ROD
NOZZLE(Z11)
NOZZLE(Z21)
NOZZLE(Z31)
NOZZLE(Z41)
NOZZLE(Z52)
NOZZLE(Z62)
NOZZLE(Z71)
NOZZLE(Z81)
NOZZLE(Z94)
NOZZLE(Z118)
NOZZLE(Z552)
NOZZLE(Z901)
24
12
1
1
10
12
12
12
12
12
12
12
12
12
12
12
12
288
12
1
1
10
24
12
12
12
12
12
12
24
24
24
24
12
B-2
B-2
EC-1
ZS-2
ZS-2
------
------
---
⊽⊽
⊽⊽
⊽
bb
bb
b
⊽⊽
⊽⊽
⊽
bb
bb
b
⊽⊽
⊽⊽
⊽
bb
bb
b
⊽⊽
⊽⊽
⊽
CC
CC
C
---
---
---
---
---
---
---
---
---
---
---
---
---
---
---
---
---
ܘӋ䅹䆛♄ܘӋ䅹䆛♄
ܘӋ䅹䆛♄ܘӋ䅹䆛♄
ܘӋ䅹䆛♄
♄♄
♄♄
♄
((
((
(
ษ♄ษ♄
ษ♄ษ♄
ษ♄
))
))
)
LM-100
T-20,E-12
30V
ϗϗ
ϗϗ
ϗ 10W
630 036 8642
630 000 1983
LAMP
LAMP
3
3
3
----
----
---
⊽⊽
⊽⊽
⊽
bb
bb
b
EB-8
ZS-1
2.22.2
2.22.2
2.2
䞢㽖ֲ׃ખ߬㸽䞢㽖ֲ׃ખ߬㸽
䞢㽖ֲ׃ખ߬㸽䞢㽖ֲ׃ખ߬㸽
䞢㽖ֲ׃ખ߬㸽
乙⌠ᑉݚ⍝㗬ᅡⱙܘӋ߬㸽Ȣ䇌ԱЏগ㗘Ȣ
᳞݈䞢㽖ֲ׃ખⱙѹᤷᮎ⊪ͼವ䳕㽖傭ᑻᡕᴄͼ䇌䆷៦݁
᳢্ࡶਭȢ
() ᴏẅܘӋ
゠Ԩߛ㾸゠Ԩߛ㾸
゠Ԩߛ㾸゠Ԩߛ㾸
゠Ԩߛ㾸
ए㒙ৢए㒙ৢ
ए㒙ৢए㒙ৢ
ए㒙ৢ
ܘӋ㓫ৌܘӋ㓫ৌ
ܘӋ㓫ৌܘӋ㓫ৌ
ܘӋ㓫ৌ
ܘӋৢܘӋৢ
ܘӋৢܘӋৢ
ܘӋৢ
㾙ḑ㾙ḑ
㾙ḑ㾙ḑ
㾙ḑ
//
//
/
ᴥ䋽ᴥ䋽
ᴥ䋽ᴥ䋽
ᴥ䋽
Ք⫽ᭅՔ⫽ᭅ
Ք⫽ᭅՔ⫽ᭅ
Ք⫽ᭅ
ᓏ䆃ᓏ䆃
ᓏ䆃ᓏ䆃
ᓏ䆃
Fig.NoFig.No
Fig.NoFig.No
Fig.No
Ք⫽᠕Ք⫽᠕
Ք⫽᠕Ք⫽᠕
Ք⫽᠕
ໜໜ
ໜໜ
ໜ
⊽⊽
⊽⊽
⊽
(
ખৢખৢ
ખৢખৢ
ખৢ
))
))
)
ᑉᭅᑉᭅ
ᑉᭅᑉᭅ
ᑉᭅ
((
((
(
গ㗘গ㗘
গ㗘গ㗘
গ㗘
))
))
)
(a)ߜߕϟߘϠߘく䯉ভͼ᭮ᏻߜࡇϢ㡄ᯋ䖰㸡ѹᤷȢ
(b)ߛ㾸⏚ᡀৣͼҢ᳞䆍䰐ำᯋ䖰㸡ѹᤷȢ
0305-001 1-93
Ђ䯉ᅞ㺚Ђ䯉ᅞ㺚
Ђ䯉ᅞ㺚Ђ䯉ᅞ㺚
Ђ䯉ᅞ㺚
((
((
(
पܘपܘ
पܘपܘ
पܘ
))
))
)
Ђ䯉ᅞ㺚Ђ䯉ᅞ㺚
Ђ䯉ᅞ㺚Ђ䯉ᅞ㺚
Ђ䯉ᅞ㺚
((
((
(
पܘपܘ
पܘपܘ
पܘ
))
))
)
Аᴏ䚽Аᴏ䚽
Аᴏ䚽Аᴏ䚽
Аᴏ䚽
Аᴏ䚽Аᴏ䚽
Аᴏ䚽Аᴏ䚽
Аᴏ䚽
ᅞ㺚༉ᅞ㺚༉
ᅞ㺚༉ᅞ㺚༉
ᅞ㺚༉
ए㒙䚽ए㒙䚽
ए㒙䚽ए㒙䚽
ए㒙䚽
䕁䕁
䕁䕁
䕁
630 089 7784
630 092 0802
630 055 2195
630 003 6718
630 057 0076
630 084 6737
PLATE
PLATE
((
((
(BACK UP
))
))
)
VACUUM
PUMP
AIR LINE
EQPT
PIPE
FITTING
CORD
1
1
1
1
12
1
3
2
2
2
2
2
ߕϠߘߕϠߘ
ߕϠߘߕϠߘ
ߕϠߘ
ᣞᣞ
ᣞᣞ
ᣞ
ߕϠߘߕϠߘ
ߕϠߘߕϠߘ
ߕϠߘ
ᣞᣞ
ᣞᣞ
ᣞ
く⋊く⋊
く⋊く⋊
く⋊
䲛ᇭᴏ䲛ᇭᴏ
䲛ᇭᴏ䲛ᇭᴏ
䲛ᇭᴏ
䖜Ⓓఽ䖜Ⓓఽ
䖜Ⓓఽ䖜Ⓓఽ
䖜Ⓓఽ
ᮠ䕁༉ᮠ䕁༉
ᮠ䕁༉ᮠ䕁༉
ᮠ䕁༉
䘺㓛䔻䘺㓛䔻
䘺㓛䔻䘺㓛䔻
䘺㓛䔻
2.22.2
2.22.2
2.2
䞢㽖ֲ׃ખ߬㸽䞢㽖ֲ׃ખ߬㸽
䞢㽖ֲ׃ખ߬㸽䞢㽖ֲ׃ખ߬㸽
䞢㽖ֲ׃ખ߬㸽
------
------
---
------
------
---
------
------
---
------
------
---
------
------
---
------
------
---
⊽⊽
⊽⊽
⊽
(a)(a)
(a)(a)
(a)
⊽⊽
⊽⊽
⊽
(b)(b)
(b)(b)
(b)
EC-1
EC-1
D-1
LB-1
BB-3
B-4
(2) ⬊㺚ܘӋ
゠Ԩߛ㾸゠Ԩߛ㾸
゠Ԩߛ㾸゠Ԩߛ㾸
゠Ԩߛ㾸
ए㒙ৢए㒙ৢ
ए㒙ৢए㒙ৢ
ए㒙ৢ
ܘӋ㓫ৌܘӋ㓫ৌ
ܘӋ㓫ৌܘӋ㓫ৌ
ܘӋ㓫ৌ
ܘӋৢܘӋৢ
ܘӋৢܘӋৢ
ܘӋৢ
㾙ḑ㾙ḑ
㾙ḑ㾙ḑ
㾙ḑ
//
//
/
ᴥ䋽ᴥ䋽
ᴥ䋽ᴥ䋽
ᴥ䋽
Ք⫽ᭅՔ⫽ᭅ
Ք⫽ᭅՔ⫽ᭅ
Ք⫽ᭅ
ᓏ䆃ᓏ䆃
ᓏ䆃ᓏ䆃
ᓏ䆃
Fig.NoFig.No
Fig.NoFig.No
Fig.No
Ք⫽᠕Ք⫽᠕
Ք⫽᠕Ք⫽᠕
Ք⫽᠕
((
((
(
ખৢખৢ
ખৢખৢ
ખৢ
))
))
)
ᑉᭅᑉᭅ
ᑉᭅᑉᭅ
ᑉᭅ
((
((
(
গ㗘গ㗘
গ㗘গ㗘
গ㗘
))
))
)
⊽⊽
⊽⊽
⊽
::
::
:(a) TCM-X200 ⫽ܘӋȢ
(b) TCM-X00 ⫽ܘӋȢ
#AK-BX580-SAT2
#SGDH-50AE-
RY161
SGDH-50AE-R
SGDH-30AE-R
SGDH-15AE-R
SGDH-10AE-R
#AK-BX580-SAT2
#AK-BX22-SAT4
SGDH-02AE-R
D2890A
SGDH-A5AE-R
630 080 6854
630 097 1002
630 086 8159
630 006 7473
630 086 7480
630 096 9559
630 080 6854
630 086 4984
630 086 8166
630 090 9692
630 086 8630
Аᴏ䚽Аᴏ䚽
Аᴏ䚽Аᴏ䚽
Аᴏ䚽
(PMD)(PMD)
(PMD)(PMD)
(PMD)
Аᴏ䚽Аᴏ䚽
Аᴏ䚽Аᴏ䚽
Аᴏ䚽
(SMD)(SMD)
(SMD)(SMD)
(SMD)
Аᴏ䚽Аᴏ䚽
Аᴏ䚽Аᴏ䚽
Аᴏ䚽
(SMD)(SMD)
(SMD)(SMD)
(SMD)
Аᴏ䚽Аᴏ䚽
Аᴏ䚽Аᴏ䚽
Аᴏ䚽
(SMD)(SMD)
(SMD)(SMD)
(SMD)
Аᴏ䚽Аᴏ䚽
Аᴏ䚽Аᴏ䚽
Аᴏ䚽
⊽⊽
⊽⊽
⊽
aa
aa
a
(SMD)(SMD)
(SMD)(SMD)
(SMD)
⊽⊽
⊽⊽
⊽
bb
bb
b
Аᴏ䚽Аᴏ䚽
Аᴏ䚽Аᴏ䚽
Аᴏ䚽
(PMD)(PMD)
(PMD)(PMD)
(PMD)
Аᴏ䚽Аᴏ䚽
Аᴏ䚽Аᴏ䚽
Аᴏ䚽
(PMD)(PMD)
(PMD)(PMD)
(PMD)
Аᴏ䚽Аᴏ䚽
Аᴏ䚽Аᴏ䚽
Аᴏ䚽
(SMD)(SMD)
(SMD)(SMD)
(SMD)
ߛᑻ偆ࡽ䚽ߛᑻ偆ࡽ䚽
ߛᑻ偆ࡽ䚽ߛᑻ偆ࡽ䚽
ߛᑻ偆ࡽ䚽
(PMD)(PMD)
(PMD)(PMD)
(PMD)
Аᴏ䚽Аᴏ䚽
Аᴏ䚽Аᴏ䚽
Аᴏ䚽
(SMD)(SMD)
(SMD)(SMD)
(SMD)
0305-001 1-94
2.22.2
2.22.2
2.2
䞢㽖ֲ׃ખ߬㸽䞢㽖ֲ׃ખ߬㸽
䞢㽖ֲ׃ખ߬㸽䞢㽖ֲ׃ખ߬㸽
䞢㽖ֲ׃ખ߬㸽
UNIT,DRIVER
UNIT,DRIVER
UNIT,DRIVER
UNIT,DRIVER
UNIT,DRIVER
UNIT,DRIVER
UNIT,DRIVER
UNIT,DRIVER
UNIT,DRIVER
UNIT,DRIVER
UNIT,DRIVER
ܘӋ䅹䆛✼ⳍᴏ偆ࡽ䚽ܘӋ䅹䆛✼ⳍᴏ偆ࡽ䚽
ܘӋ䅹䆛✼ⳍᴏ偆ࡽ䚽ܘӋ䅹䆛✼ⳍᴏ偆ࡽ䚽
ܘӋ䅹䆛✼ⳍᴏ偆ࡽ䚽
((
((
(
CC
CC
C
XX
XX
X
䕉ȡ䕉ȡ
䕉ȡ䕉ȡ
䕉ȡ
CYCY
CYCY
CY
䕉䕉
䕉䕉
䕉
))
))
)
ӵ䗖ᏻ䚽ӵ䗖ᏻ䚽
ӵ䗖ᏻ䚽ӵ䗖ᏻ䚽
ӵ䗖ᏻ䚽
(RCVW(RCVW
(RCVW(RCVW
(RCVW
䕉ȡ䕉ȡ
䕉ȡ䕉ȡ
䕉ȡ
LCVWLCVW
LCVWLCVW
LCVW
䕉䕉
䕉䕉
䕉
))
))
)
⒦䘨偆ࡽ䚽⒦䘨偆ࡽ䚽
⒦䘨偆ࡽ䚽⒦䘨偆ࡽ䚽
⒦䘨偆ࡽ䚽
(R2CW(R2CW
(R2CW(R2CW
(R2CW
䕉ȡ䕉ȡ
䕉ȡ䕉ȡ
䕉ȡ
L2CWL2CW
L2CWL2CW
L2CW
䕉䕉
䕉䕉
䕉
))
))
)
᭮䔻偆ࡽ䚽᭮䔻偆ࡽ䚽
᭮䔻偆ࡽ䚽᭮䔻偆ࡽ䚽
᭮䔻偆ࡽ䚽
(F(F
(F(F
(F
䕉ȡ䕉ȡ
䕉ȡ䕉ȡ
䕉ȡ
F2F2
F2F2
F2
䕉ȡ䕉ȡ
䕉ȡ䕉ȡ
䕉ȡ
F3F3
F3F3
F3
䕉ȡ䕉ȡ
䕉ȡ䕉ȡ
䕉ȡ
F4F4
F4F4
F4
䕉䕉
䕉䕉
䕉
))
))
)
ᅞ㺚༉ษ偆ࡽ䚽ᅞ㺚༉ษ偆ࡽ䚽
ᅞ㺚༉ษ偆ࡽ䚽ᅞ㺚༉ษ偆ࡽ䚽
ᅞ㺚༉ษ偆ࡽ䚽
(H(H
(H(H
(H
䕉䕉
䕉䕉
䕉
))
))
)
XYXY
XYXY
XY
ᎺԱ偆ࡽ䚽ᎺԱ偆ࡽ䚽
ᎺԱ偆ࡽ䚽ᎺԱ偆ࡽ䚽
ᎺԱ偆ࡽ䚽
(X(X
(X(X
(X
䕉䕉
䕉䕉
䕉
))
))
)
XYXY
XYXY
XY
ᎺԱ偆ࡽ䚽ᎺԱ偆ࡽ䚽
ᎺԱ偆ࡽ䚽ᎺԱ偆ࡽ䚽
ᎺԱ偆ࡽ䚽
(Y(Y
(Y(Y
(Y
䕉䕉
䕉䕉
䕉
))
))
)
㒔䏄ᵔᨁ䖥偆ࡽ䚽㒔䏄ᵔᨁ䖥偆ࡽ䚽
㒔䏄ᵔᨁ䖥偆ࡽ䚽㒔䏄ᵔᨁ䖥偆ࡽ䚽
㒔䏄ᵔᨁ䖥偆ࡽ䚽
(TR(TR
(TR(TR
(TR
䕉䕉
䕉䕉
䕉
))
))
)
XYXY
XYXY
XY
⒦䘨ᆒᑻ㞿ࡽ䇘ᭉ䚽⒦䘨ᆒᑻ㞿ࡽ䇘ᭉ䚽
⒦䘨ᆒᑻ㞿ࡽ䇘ᭉ䚽⒦䘨ᆒᑻ㞿ࡽ䇘ᭉ䚽
⒦䘨ᆒᑻ㞿ࡽ䇘ᭉ䚽
(CHW(CHW
(CHW(CHW
(CHW
䕉䕉
䕉䕉
䕉
))
))
)
ফ傭ᑻ偆ࡽ䚽ফ傭ᑻ偆ࡽ䚽
ফ傭ᑻ偆ࡽ䚽ফ傭ᑻ偆ࡽ䚽
ফ傭ᑻ偆ࡽ䚽
(CZ(CZ
(CZ(CZ
(CZ
䕉䕉
䕉䕉
䕉
))
))
)
䌉㺚傭ᑻ偆ࡽ䚽䌉㺚傭ᑻ偆ࡽ䚽
䌉㺚傭ᑻ偆ࡽ䚽䌉㺚傭ᑻ偆ࡽ䚽
䌉㺚傭ᑻ偆ࡽ䚽
(MZ(MZ
(MZ(MZ
(MZ
䕉䕉
䕉䕉
䕉
))
))
)
ᅞ㺚༉偆ࡽ䚽ᅞ㺚༉偆ࡽ䚽
ᅞ㺚༉偆ࡽ䚽ᅞ㺚༉偆ࡽ䚽
ᅞ㺚༉偆ࡽ䚽
(DD(DD
(DD(DD
(DD
偁䖓䕉偁䖓䕉
偁䖓䕉偁䖓䕉
偁䖓䕉
))
))
)
XYXY
XYXY
XY
⒦䘨ӵ䗖䚽⒦䘨ӵ䗖䚽
⒦䘨ӵ䗖䚽⒦䘨ӵ䗖䚽
⒦䘨ӵ䗖䚽
(XYTR(XYTR
(XYTR(XYTR
(XYTR
䕉䕉
䕉䕉
䕉
))
))
)
4
4
1
1
1
1
1
2
2
6
1
G-3
H-3
RL-5
RM-1
RL-2
RL-2
G-3
H-3
RL-2
RM-2
B-5
RL-2