ModVIA-Plasma-System-NordsonMARCH-Ltr.pdf

The ModVIA ™ Plasma System maintains a perf ect b alanc e betw een its prede c essors, the PCB-800/1600, and its contemporaries, the Pro- and M axVIA ™ systems. The ModVIA syst em pr ovides: Industry-Le ading Eiciency a…

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The ModVIA
™
Plasma System maintains a perfect balance
between its predecessors, the PCB-800/1600, and its
contemporaries, the Pro- and MaxVIA
™
systems.
The ModVIA
system provides:
Industry-Leading Eiciency and Plasma Uniformity
• The chamber is designed to process PCB panels in separate
plasma cells to deliver high etch rates with excellent
treatment uniformity.
• The system is self-contained and requires minimal oor
space. The chassis houses the plasma chamber, control
electronics, 40 kHz RF generator, pump/blower package
and automatic matching network. Maintenance access is
available from either front or rear access panels.
Application Flexibility
• Three electronically controlled mass ow controllers
(MFCs) are standard, which enable optimal gas control. An
additional two MFCs are available as an option.
• The system accommodates a wide range of process gases
to meet specic requirements (typical process gases may
include Ar, O2, N2, and CF4).
• The system accommodates a variety of panel sizes and can
process low-volume, high-mixture products, which is ideal
for small- to medium-sized businesses or R&D institutions.
Key Application Details
• Designed to process rigid and exible
PCB panels of various shapes and sizes
for through-hole, blind via, etchback, and
desmear applications.
• Upgrade the system from four plasma
cells to a maximum of eight as production
volumes increase.
• The ModVIA incorporates the same High
Flux Electrodes (HFE) design found in
the MaxVIA
™
-Plus plasma system. The
HFE design with a temperature-controlled
cooling loop delivers superior plasma
treatment uniformity for PCB panel,
desmear, and etchback applications.
• The plasma chamber is constructed of high-
quality aluminum for durability.
• Incorporates VIA
™
Series technology
to minimize CF4 gas usage for desmear
applications during PCB panel plasma
treatment.
MARCH ModVIA
Plasma System
PCB Plasma Treatment
Specications
MARCH ModVIA
™
Plasma System
Enclosure
Dimensions
W x D x H – Footprint 1652 W x 1747 D x 2445 H mm (65 W x 69 D x 97 H in.)
Net Weight 1776 kg (3915 lbs.)
Chamber
Available Cells 3, 5 or 7
Electrodes
Conguration Temperature Controlled Power-Power
Working Area 1118 D x 660 H mm; (44 D x 26 H in.)
RF Power
Standard Wattage 5 kW
Frequency 40 kHz
Gas Control
Available Flow Volumes 500, 1000, 2000 or 5000 sccms
Maximum Number of MFCs 5
Control System
Interface PLC Control with PC-Based Touch Screen Interface
Vacuum Pump
Standard Purged Pump Package 530 cfm, Variable Frequency
Cooling Water Flow 9.5 slm
N2 Pump Purge Flow 14 slm
Facilities
Power Supply 208 VAC, 50 A, 3-Phase + Ground; 50/60 Hz
Process Gas Fitting Size & Type 6.35 mm (0.25 in.) Swagelok
Process Gas Purity CF4 = 99.97%; O2 = 99.996%; N2 = 99.99%;
Ar = 99.999%; H2 = 99.999%
Process Gas Pressure 1.03 bar (15 psig) min. to 1.38 bar (20 psig) max., regulated
Purge Gas Fitting Size & Type 6.35 mm (0.25 in.) Swagelok Tube
Purge Gas Purity N2 = 99%
Purge Gas Pressure 1.03 bar (15 psig) min. to 1.38 bar (20 psig) max., regulated
Pneumatic Valve Fitting Size & Type 6.35 mm (1/4 in.) Swagelok
Pneumatic Gas Purity CDA, Oil Free, Dewpoint ≤7°C (45°F), Particulate Size <5 µm
Pneumatic Gas Pressure 5.52 bar (80 psig) min. to 6.89 bar (100 psig) max., regulated
Exhaust Fitting NW 40 @ Utility Panel
Compliance
USA EH&S/Ergonomics
International CE Marked
Ancillary
Equipment
Gas Generators Nitrogen, Hydrogen
(requires Additional Non-Optional Hardware)
Facilities Chiller, Scrubber, Transformer
For more information,
speak with your Nordson
representative or contact
your Nordson regional
oce.
We have several global
locations to serve you.
Americas
Asia Pacic
EMEA
https://www.nordson.com/en/
divisions/march/contact-us/
global-locations-and-sales-
contacts
+1.925.827.1240
nordsonmarch.com
MARCH Products
2470-A Bates Avenue
Concord, CA 94520-1294, U.S.A
info@nordsonmarch.com
Published July 2021