S20_LF4_mpl.pdf - 第33页
LF4-191 1 13 15 12 11 13 11 7 11 9 13 13 5 1 4 3 12 8 15 6 14 11 13 11 11 11 13 13 10 13 11 11 2 13 13 16 13 15 12 11 13 11 7 11 9 13 13 5 1 4 3 12 8 15 6 14 11 13 11 11 11 13 13 10 13 11 11 2 13 13 16 5 3 Cover / Valve …
LF4-1911
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
5
2
Z-axis
Head
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1 LC1-M71GN-30 SCREW,PAN HEAD 4 /
39 99480-03008 PIN,PARALLEL 1
2 LC6-M714R-00 LEAF,SPRING 1 2 E
40
3 LC6-M714S-00 LEAF,SPRING 2 2 E
41
4 LC6-M714T-00 LEAF,SPRING 3 2 E
42
5 LC6-M714U-00 LEAF,SPRING 4 2 E
43
6 LC6-M71AY-00 PIN,PARALLEL 2 E
44
7 LE2-M90D2-01 JOINT 2 /
Í
45
8 LE6-M716J-00 PLATE,JOINT 2 4 /
Í
46
9 LE6-M716K-00 PLATE,JOINT 1 4 /
Í
47
10 LE6-M71A4-00 BRG. 6 /
Í
48
11 LE6-M71F2-00 NUT,HEXAGON(M1.6) 2 /
Í
49
12 LF1-M71AC-00 LM GUIDE 2 /
Í
50
13 LF3-M7121-00 FRAME,Z 1
/
Í
51
14 LF3-M7122-00 HOLDER,TR 1
/
Í
52
15 LF3-M7123-00 HOLDER,TL 1
/
Í
53
16 LF3-M7124-00 PLATE,BRG. 2
/
Í
54
17 LF3-M712F-00 COUPLING,Z AXIS 2
/
Í
55
18 LF3-M712G-00 PLATE,BRG. 1 2
/
Í
56
19 LF3-M712L-00 PLATE,MAGNET 2
/
Í
57
20 LF3-M712Y-00 NUT,LOCK 2
/
Í
58
21 LF3-M717L-00 BLOCK,BRG. 2
/
Í
59
22 LF3-M717M-00 HOUSING,NOZZLE 2
/
Í
60
23 LF3-M71AB-00 BALL SCREW 2
/
Í
61
24 LF3-M71AR-00 COVER,JOINT 2
/
Í
62
25 LF3-M71AS-00 BEARING 2
/
Í
63
26 LE6-M7130-00 HOLDER NOZZLE ASSY 1 /
Í
64
27 LF3-M7140-00 HOLDER NOZZLE SET 1
/
Í
65
28 90112-02J006 BOLT HEX,SOCKET HEAD 8 66
29 90112-2AJ006 BOLT, HEX.SOCKET HEAD 26 67
30 90112-2AJ010 BOLT, HEX.SOCKET HEAD 4 68
31 90115-2AJ010 BOLT, HEX. SOCKET HEAD 8 69
32 90440-10J023 CIRCLIP 2 70
33 90933-02J683 BEARING 2 71
34 90990-01J101
BOLT HEX,SOCKET HEAD
2 72
35 90990-22J010 PACKING 4 73
36 91312-03016 BOLT HEX,SOCKET HEAD 2 74
37 92990-03600
WASHER,PLAIN
4 75
38 95602-04100 NUT,S/L 2 76
LF4-1911
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1 LC6-M5UH1-00 BASE,TIE 6 /
Í
39
2 LE6-M712E-00 GROMMET 6 /
Í
40
3 LF1-M71A8-00 VALVE ASSY. 1 spare B
41
4 LF3-M65H5-00 VALVE PRESS ASSY. 1 B
Í
42
5 LF3-M7471-00 BRACKET,VALVE 1 /
Í
43
6 LF3-M7472-00 STAY,COVER R. 1 /
Í
44
7 LF3-M7473-00 STAY,COVER L. 1 /
Í
45
8 LF3-M7474-01 BRACKET,COVER 1
/
Í
46
9 LF3-M7475-00 PLATE,GEAR 1 /
Í
47
10 LF3-M7476-00 PLATE,COVER 1 /
48
11 90172-00J030 WASHER, EXTL, TOOTHED 20 49
12 90172-00J040 WASHER, EXTL, TOOTHED 4 50
13 91317-03006 BOLT HEX,SOCKET HEAD 22 51
14 91317-03016 BOLT HEX,SOCKET HEAD 3 52
15 91317-04008 BOLT HEX,SOCKET HEAD 4 53
16
54
17 55
18
56
19
57
20
58
21 59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
5
3
Cover / Valve (6×2)
Head