4000Plus Brochure.pdf - 第3页
Confidence In Y our Results Data T raceability e 4000 Plus is calibrated in accordance with I nternational standards, pro viding full traceability and integrity in product testing. Calibration is performed using O.I.M.L …
XY Stage
A range of XY stages are available from
160mm x 160mm right through to 300mm
x 210mm. Including high precision,
higher speed and zone shear options.
In addition to this there is even the
option of a heated work stage up to 400 degrees C at 200kg
max, complete with adjustable temperature control.
Irrespective of the industry: semiconductors, or the various
microelectronics sectors of automotive, power, hybrid, or high
reliability, the Nordson DAGE 4000Plus has the versatility and
accuracy that gives its users total condence in the quality
of its products. It features the latest patented bond testing
technology, for example the anti-backlash system. e Nordson
DAGE 4000Plus is capable of testing from 250 milligrams right
through to 500kg, catering for both standard and specialized
applications. Remember too, that the 4000Plus builds on
the success of the Nordson DAGE 4000, so data correlation
between the machines is assured.
The Nordson DAGE 4000Plus is the
most advanced bondtester on the
market, offering unsurpassed
accuracy and repeatability.
Developed by the world leader in
bond testing technology, the Nordson
DAGE 4000Plus represents the
industry standard in bond testing.
Image Capture System
Quick and simple to set-up, located in close
proximity to the test head to aid faster
testing. Improves test automation.
Featured Applications
Ribbon pull – With an extensive range of load
tools including hooks and tweezer jaws, all
sizes and types of ribbons can be tested.
Hot bump/pin pull – A new load cartridge
makes this groundbreaking test even
better, especially for evaluating PCB
substrate materials and low prole solder
bumps.
First bond ball pull of copper wires and pull of
studs, bumps and pillars – For the rst time
custom pull jaws enable tensile tests on these
important interconnects.
Fatigue pull and shear – Fatigue analysis is
emerging as an increasingly important
method in evaluating solder joint reliability.
A mix of software control and hardware
enables fatigue testing in both pull and
shear modes.
Passivation layer shear – A combination of
software and a special load tool provides a
solution to ball shear where access is
limited by the passivation layer.
Highly Configurable
e Nordson DAGE 4000Plus provides ultimate versatility.
Choose from a range of XY stages up to 300mm of travel in
one axis, and a unique range of load cartridges including push
cartridges up to 50kg, pull cartridges up to 100kg and shear
cartridges up to 200kg (500kg capable using special xtures
for shear). An extensive range of load tools provides for
standard and specialized applications. A wide choice of
optics is available to suit every application. e standard
mainframe vertical working envelope of 120mm will meet
most applications. However please consult factory for any
special requirements.
Pull/Push Test Shear Tests
Wire Ball
Ribbon Solder ball
Hot bump/pin pull Standard die shear
Cold bump pull Cavity
Copper wire bonds, studs and pillars Passivation layer
Stud bump Low profile zone shear
Vector Wafer bump
Fatigue Fatigue
Push Low profile die shear
Tweezer peel High force die shear
High force pull (up to 100kg) Horizontal stud pull
Vertical stud pull Cu pillar shear
Extensive Testing Capability
Current and emerging applications are fully catered for
with load cartridges combined with standard and
specialized fixtures to perform shear tests up to 500kg,
pull tests up to 100kg and push tests up to 50kg.
Leading The Way In Bond Testing
Flexural Testing
Fatigue Testing
Torsion Testing
Brittle Fracture Testing
Die pull/flip chip pull Micro bump shear
Nordson DAGE 4000Plus | 32 | Nordson DAGE 4000Plus
Confidence In Your Results
Data Traceability
e 4000Plus is calibrated in accordance with International
standards, providing full traceability and integrity in product
testing. Calibration is performed using O.I.M.L class M1
tolerance weights directly traceable to National Standards;
UKAS or optional NIST Class 1 weights.
Automatic Load Tool Alignment
e optional self-aligning shear tool sleeves ensure that
the correct load is applied by compensating for misaligned
die attach.
Data Correlation
Nordson DAGE recognizes that data correlation is
fundamental for cross referencing test results between old
and new platforms. Existing users of Nordson DAGE
bondtesters (4000 Optima and 4000) can condently
compare data between old and new machines. Further, we
know that many users collect data on the same product from
multiple machines, either on the same site or even dierent
sites, and need to be sure that the data will correlate with
ultimate integrity given identical congurations and
test parameters.
Nordson DAGE have carried out exhaustive internal GR&R
studies to prove correlation between old and new machines.
e 4000Plus plays a critical role in data correlation but
equally important is Paragon™, our bond testing software.
Import and export protocols and database management tools
also ensure data streams from new, old or multiple machines
can be compared.
Data Integrity
e 4000Plus oers exceptional repeatability and
reproducibility of results, with a total system accuracy
of +/-0.1% of the load range selected (see detailed
specications).
Ultimate Step Back Accuracy
Control of shear height (step back) is critical to
consistent test results in shear applications.
Nordson DAGE has developed a unique patented
anti-backlash system that aids setting and control
of step back. Shear height can be set and maintained
to single micron accuracy across the range of load
cartridges. Additionally, on the S25G load cartridge
the step back accuracy is a superlative +/- 0.25 microns.
e accuracy is qualied through laser measurement.
Increased Efficiency
Image Capture Camera
e image capture system provides high resolution images for
failure mode analysis and ducial alignment. Its close proximity
to the tool maximizes throughput, particularly for automated
tests.
e camera has a built-in light source to provide optimal
illumination and ne focus is achieved using the precise
movement capabilities of the 4000Plus test platform.
A wide range of objective lenses ensure that the optimal
resolution and depth of eld can be achieved with
magnications up to 1500x.
The 4000Plus test platform offers a wide range of
optical solutions for bond testing and materials
testing, featuring imaging systems for failure mode
analysis, alignment and live recording of tests.
Image Capture System Borescope Imaging System
Trinocular Camera Side Alignment Camera System
Borescope Imaging System
e borescope provides high magnication imaging, ideal for
precise tool alignment. Based on medical endoscope technology,
it is perfect for ultra ne pitch devices such as ne wire bonds or
very small geometries such as micro bumps and copper pillars.
e borescope contains its own light source and can be positioned
in and out of the viewing position using its precision slide with
constant focus on the test sample.
Trinocular Camera
e trinocular camera can be attached to any stereo zoom
microscope with a C-mount.
With an appropriate microscope, the eld of view can be adjusted
from wide to close up and is ideally suited for macro positioning.
Used in conjunction with the side alignment camera, the two
views (front and side) enable precise tool alignment, particularly
for small, delicate or dicult samples.
Side Alignment Camera
e side view camera is ideal for testing micro features such as
copper pillars, micro bumps and TSVs. e system enables a
secondary view point of feature to be tested, providing accurate
and repeatable tests.
e side alignment camera is attached to the cartridge mount,
giving ultra stable, vibration free, imaging with constant focus
on the tool tip.
All camera systems use a USB connection and can be
field retrofitted.
Image capture camera can be utilized as a fiducial
alignment camera for automation.
You can test faster with the unique vector controls, utilizing
the newly styled key-pad featuring programmable nudge
buttons for precise positional alignment.
Paragon™ software’s virtual map for programming a pattern
Ultimate step back accuracy
shear
tool
gold ball bond
passivation
layer
silicon
4 | Nordson DAGE 4000Plus Nordson DAGE 4000Plus | 5
Z-Axis and Working Envelope
4000Plus-Mainframe 75mm Z-axis travel; 120mm working envelope
Specifications
Footprint W= 630mm (including left and right joysticks), D=600mm, H=830mm
Weight 90kg including XY table
Power Supply 90-264VAC single phase
Pneumatic Supply 4 bar minimum, 6mm OD plastic pipe. Note some specialized applications may require increased pressure, clean dry air
Vacuum Supply 500mm Hg (67kPa) minimum, 6mm OD plastic pipe
Accuracy
Total system accuracy using load cartridges +/- 0.1% full scale deflection for selected load range (see detailed load cell specifications)
Shear (ball and die) load cartridge step back accuracy (excl. S25) +/- 1μm over 2mm of travel in Z-axis
S25 step back accuracy +/- 0.25μm over 2mm of travel in Z-axis
Standards
Cold bump pull/Hot bump pull JEITA EIAJ ET-7407/IPC-9708
BGA bump shear JEDEC JESD22-B117A
Cold bump pull JEDEC JESD22-B115
au ball shear JEDEC JESD22-B116
Ball bond shear ASTM F1269
Wire pull DT/NDT MIL STD 883
Stud pull MIL STD 883
Flip chip pull JEDEC JESD22-B109
Die shear MIL STD 883
e Nordson DAGE 4000Plus conforms to, and in many cases exceeds, the
following industry standards:
Intelligent Software
e 4000Plus utilizes Nordson DAGE’s next
generation Paragon™ software. Paragon boasts a
highly congurable and intuitive interface as well
as a wide variety of advanced functionality, such as
automatic GR&R calculation, built-in diagnostics,
a range of charts and a unique database search
engine wizard. e superior reporting capability
enables the creation of personalized reports and
provides the ability to easily manipulate data using
interactive graphs.
Reduced Cost of Ownership
Downtime Minimized
Every aspect of the 4000Plus’ robust design has
been thoroughly tested to ensure superb reliability.
A new ergonomic design for load cartridges signicantly
improves handling when changing them on the machine
and reduces the risk of damage. In addition, the 4000Plus
is manufactured in accordance with ISO 9001: 2008,
meeting the Machinery Safety Directive, Low Voltage
Directive, EMC Compliance, SEMI Safety Guideline
(S2 ESH) and RoHS as well as designed to comply
with UL requirements.
Compatibility
e 4000Plus has been designed with continuity in
mind. Some accessories from the Nordson DAGE 4000
are forwardly compatible with the 4000Plus, so you can
use your existing stock of equipment and upgrade at
your own pace.
Nordson DAGE Paragon bond testing software
Switch Applications in Just Seconds
e industry-unique multi-function cartridges (MFC’s) are
designed for use with automatic test routines on the 4000Plus
bondtester enabling multi-surface test patterns for complex
hybrid packages and ultra-quick application changeover.
Unique Features of the Industry Leading
Multi-Function Cartridges
*
n
Guaranteed correlation with both 4000 and
4000Plus cartridges
n
Operators can easily identify which transducer is
active when not in use, via the cartridge window
n
‘Park Position’ protects the transducers inside the
cartridge rather than leaving one of them exposed
and susceptible to damage
n
Quick and easy to interchange with single load
cartridges
n
Frictionless pull to record true load
n
Patented air bearing technology for shear testing
n
Minimum off-axis tool deection
n
Automatic electromagnetic damping at low loads
n
Dual application calibration jigs
n
Majority of control electronics and rotation mechanism
are inside the cartridge, ensuring zero machine
downtime and easy serviceability
n
Unique damping system for wire pull
Unique multi-function
cartridges
4000Plus Load Cartridges, XY Tables and Z-axis
Nordson DAGE provides a comprehensive range of load cartridges supporting both standard and custom bond testing applications. A 500kg high force shear jig is available
- please consult factory for further details. e list above should not be considered exclusive – our experienced engineers can provide advice on every application.
Detailed specications on individual load cells are available in a separate publication.
Pull - Wire Load Ranges Shear – Ball/Wedge Load Ranges
P25 25g, 10g, 5g S25 25g, 10g, 5g, 2g
P50KG 50kg, 20kg, 10kg S5KGR 5kg, 2kg, 1kg, 400g
HBP10KG 10kg, 5kg, 2.5kg, 1kg
PP500g 500g, 250g, 100g
Pull – Vector
VP250 250g, 100g, 50g, 25g
VP5KG 5kg, 2kg, 1kg, 400g
Push/Pull
Pull – Tweezers/CBP/HBP Shear – Die/Zone/Stud Pull
T100 100g, 50g, 25g, 10g S50KG 50kg, 20kg, 10kg, 5kg
T1KG 1kg, 500g, 250g, 100g S200KG 200kg, 100kg, 50kg, 20kg
T5KG 5kg, 2.5kg, 1kg, 500g ZS50KG 50kg, 20kg, 10kg, 5kg
P100 100g, 50g, 25g, 10g S250 250g, 100g, 50g, 25g
P500 500g, 250g, 100g, 50g S250R 250g, 100g, 50g, 25g
P1KG 1kg, 500g, 250g, 100g S2.5KG 2.5kg, 1kg, 500g, 200g
P10KG 10kg, 5kg, 2.5kg, 1kg S5KG 5kg, 2kg, 1kg, 400g
HBP2.5KG 2.5kg, 1kg, 500g
PP5KG 5kg, 2.5kg, 1kg
PP50KG 50kg, 40kg, 20kg, 10kg
P100KG 100kg, 50kg, 20kg, 10kg
XY Tables
A variety of XY tables are available according to your test needs. is list is not exclusive and you should consult the factory for special applications.
160mm x 160mm Forces up to 20kg at 20mm/s
160mm x 160mm High precision up to 5kg
300mm x 210mm Large area XY stage
160mm x 160mm for high speed zone shear Zone shear: 20kg max at 50mm/s test speed
160mm x 160mm for high force zone shear Zone shear: 40kg max at 5mm/s test speed
Standard 160mm x 160mm Forces up to 200kg
Multi-Function Cartridges
Semiconductor Load Ranges
S250 250g, 100g, 50g, 25g
S5KG 5kg, 2kg, 1kg, 400g
P100 100g, 50g, 25g, 10g
Hybrid
S20KG 20kg, 10kg, 5kg, 2kg
P1KG 1kg, 500g, 250g, 100g
P10KG 10kg, 5kg, 2.5kg, 1kg
*Patent pending.
Nordson DAGE 4000Plus | 76 | Nordson DAGE 4000Plus