SP22P Mechanical20091001.pdf - 第171页

1 18B4C011010 BLOCK 1 2 18B4C011021 PLATE 1 3 18B4C061040 BRACKET 1 4 18B4C061051 BRACKET 1 5 KXF02C7AA00 JOINT KQL08-01S 3 6 KXF02C9AA00 JOINT KQL08-02S 3 7 KXF05K3AA00 PLUG MSWT2 1 8 KXF09FFAA00 FILTER ZFA200-02 1 9 KX…

1 18B4C011010 BLOCK 1

2 18B4C011021 PLATE 1

3 18B4C061040 BRACKET 1

4 18B4C061051 BRACKET 1

5 KXF02C7AA00 JOINT KQL08-01S 3

6 KXF02C9AA00 JOINT KQL08-02S 3

7 KXF05K3AA00 PLUG MSWT2 1

8 KXF09FFAA00 FILTER ZFA200-02 1

9 KXF0A38AA00 SENSOR AP-31 1

10 KXF07CVAA00 JOINT KQT08-02S 1

11 KXF02C1AA00 JOINT KQL06-08 1

12 KXF02BXAA00 JOINT KQL06-01S 1

13 KXF02C3AA00 JOINT KQL06-M5 1

14 KXF00WEAA00 SILENCER AN203-02 1

15 KXF0A39AA00 VALVE VP342-5GZ-F 1

16 KXF00WCAA00 SILENCER AN120-M5 1

17 KXF02ANAA00 JOINT KQE12-00 1

18 KXF03UQAA00 TUBE TU0805B-20 1

19 KXF03TZAA00 TUBE TU0604B(2m) 1

20 KXF09W7AA00 ELBOW Female/male elbow 1 1

21 KXF04ZPAA00 ELBOW Elbow 1 1/4 1

番号

ＭＯ機番

ユニット名称

基板吸着U(真空ﾎﾟﾝﾌﾟ):SP20P-MA1

UNIT NAME

PART NUMBER

品番部品名型式数量ﾗﾝｸ備考

Board pick-up unit(vacuum pump):SP20-

PART LIST

MODULE NUMBER

パーツリスト

18B4C0M0000

3-B

UNIT NUMBER

ユニットＮｏ.

PART NAME TYPE Q'TY RANK REMARKS

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