PS600t_Tech-specs_revB.pdf

PS600T T echnical Specifications www .akrometrix.com sales@akrometrix.com 1-404-486-0880 w/ Base 100 lpi grating w/ Optional 50 lpi grating Vision Measur ement T echnology Shadow Moir é Shadow Moir é Maximum Field of View…

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PS600T Technical Specifications
www.akrometrix.com
sales@akrometrix.com
1-404-486-0880
w/ Base 100 lpi grating w/ Optional 50 lpi grating
Vision Measurement Technology Shadow Moiré Shadow Moiré
Maximum Field of View (FOV) (mm) 600x600 600x600
Minimum Field of View (FOV) (mm) 365x300 600x600
Maximum Sample Size (mm) - Heated Area 625x600 625x625
Maximum Sample Size (mm) - Overall 820x600 820x830
Minimum Sample Size (mm) 8x8 16x16
Maximum Measured Surface Coplanarity 4,000 microns 16,000 microns
Resolution, Z-axis (vertical displacement) 2 microns 4 microns
Accuracy, Z-axis (vertical displacement) 2.5 microns / 3% 5.0 microns / 3%
Resolution, Z-axis at max FOV (vertical displacement) 2 microns 4 microns
Maximum Measurement Points per Acquisition 1,752,000 1,752,000
Maximum Measurement Density (points per mm²) 16 4
Minimum Measurement Density (points per mm²) 4 4
Thermal Processing Technology Radiant IR
Maximum Temperature 300°C
Maximum Heating Rate °C/sec (from 50°C to 250°C)* 3.5
Maximum Cooling Rate °C/sec (from 250°C to 125°C)* 1.25
Maximum Thermal Proles Unlimited
Maximum Thermal Cycles Time Unlimited
Maximum Acquisitions per Cycle Unlimited
Independently Controlled Topside Heating? yes
Multi-Zone Bottom Heater? yes
Automated Data Collection? yes
Batch Data Analysis? yes
Electronically Controlled Lensing? yes
Compatible Modules DIC2, DFP2
Software Akrometrix Studio
Data Export Formats .dat, .txt, .png
Sample Set-up time, typical 2 minutes
Sample preparation method, typical none
Data Acquisition (Measurement) Time, approximate 2 seconds
Data Analysis Time per Acquisition, approximate 2 seconds
Appromixate Depth, Width, Height (mm) 1214x1438x2154
Appromixate Weight (kg) 735
Electrical Requirements 480VAC, 3 phase, 50/60 Hz, 50A Rating
Air Requirements N/A
Other Utilities exhaust 4000 lpm
*Thermal Ramp rates based on 27x27x1.4mm substrates sample