YSB55w_KLG_MPL.pdf - 第53页
KLG-1608 Rev . :It had a change without the compatibility . Please be careful at the time of the parts ordering. Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。 No. Part No. Part Name Q’ty Remarks Rev. Rank Level 1 KL Y -M173C-0…

KLG-1608
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1 KLY-M173C-00 PLATE, BTN 1 /
Í
2 KLY-M173M-00 PLATE 3, SENSOR 1 /
Í
3 KLY-M173N-00 PLATE, MIRROR 1 /
Í
4 KLY-M173P-00 MIRROR 1 /
Í
5 KLY-M654D-01 SENS,RING OUT ASSY 1 B
Í
6 KLY-M17B7-01 BRACKET, EL PARTS 1 /
Í
7 KLY-M17B8-00 COVER, EL PARTS 1 /
Í
8 KLY-M17KE-00 BRKT., HNS. 1 /
Í
9 KLY-M17KR-00 PLATE, SWITCH 1 /
Í
10 KLY-M173Y-00 LEVEL ADJUSTER 4 /
11 KLL-M11AA-00 CASTER 4 /
12 KLF-M537G-30 CONTACTOR,1 1 /
Í
13 KLF-M537G-40 CONTACTOR,1 1 /
Í
14 KV5-M6442-00 RELAY SOCKET 1 /
Í
15 KV5-M6522-10 RELAY,G2R-1-SND 1 /
Í
16 KV9-M444A-00 RESISTOR 1 3 /
Í
17 95302-04700 NUT HEXAGON 2
18 90990-11J003 SCREW, PAN HEAD W/W 18
19 90990-11J004 SCREW, PAN HEAD W/W 7
20 91312-03012 BOLT HEX,SOCKET HEAD 2
21 91312-04005 BOLT HEX,SOCKET HEAD 6
22 91312-04006 BOLT HEX,SOCKET HEAD 4
23 91312-04008 BOLT HEX,SOCKET HEAD 4
24 91312-04025 BOLT HEX,SOCKET HEAD 2
25 91312-04035 BOLT HEX,SOCKET HEAD 3
26 91312-05008 BOLT HEX,SOCKET HEAD 2
27 91312-08016 BOLT HEX,SOCKET HEAD 4
28 92902-03200 WASHER,PLAIN 5
29 92902-04200 WASHER,PLAIN 6
30 92902-05200 WASHER,PLAIN 2
31 92902-08200 WASHER,PLAIN 4
32 91312-06008 BOLT HEX,SOCKET HEAD 16
33 KLG-M5126-C0 SAFETY SWITCH ASSY 1 B
Í
34
35
36
37
38
No. Part No. Part Name Q’ty Remarks Rev. Rank Level
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
12
1
EL / Foot
Wafer Elevation

KLG-1608
47
45
46
52
32
33
35
35
11
5
12
7
6
24
1
39
40
24
19
17
41
14
16
24
28
26
19
34
21
30
23
13
18
34
3
29
51
10
22
27
37
33
52
25
4
35
19
22
15
50
48
8
35
8
32
31
6
50
49
2
40
44
39
29
34
28
20
45
20
26
18
18
41
35
27
35
27
9
36
22
27
27
48
43
44
47
42
47
38
47
45
47
45
46
52
32
33
35
35
11
5
12
7
6
24
1
39
40
24
19
17
41
14
16
24
28
26
19
34
21
30
23
13
18
34
3
29
51
10
22
27
37
33
52
25
4
35
19
22
15
50
48
8
35
8
32
31
6
50
49
2
40
44
39
29
34
28
20
45
20
26
18
18
41
35
27
35
27
9
36
22
27
27
48
43
44
47
42
47
38
47
45
12
2
Rack Assy
Wafer Elevation
