90011772-0102(E-series_electric_schematic).pdf - 第91页

Sheet Size DIN A2 E-series_electric_schematic_complete E-series_electric_schematic_complete E-series_electric_schematic_complete E-series_electric_schematic_complete 90011772-010201HX9 Replaced by DLM4 control DLM4 contr…

100%1 / 102
Sheet
Size DIN A2
E-series_electric_schematic_complete
E-series_electric_schematic_complete
E-series_electric_schematic_complete
E-series_electric_schematic_complete
90011772-010201HX9
Replaced by
DLM4 MHCU_motion
DLM4 MHCU_motion
DLM4 MHCU_motion
DLM4 MHCU_motion
Replaced by
87
Weitergabe sowie Vervielfältigung dieser Unterlage, Verwertung und
Mitteilung des Inhalts nicht gestattet, soweit nicht ausdrücklich zugestanden.
Proprietary Data, company confidential.
All rights reserved
Copying of this document, giving it to others and the use or
communication of the contents thereof, are forbidden without express authority.
Doc. No.
00 01 02 03 04 05 06 07 08 09
Privileged business information.
Do not release
Offenders are liable to payment of damages. All rights are reserved in the
event of the grant or the registration of a utility model or design.
Zuwiederhandlungen verpflichten zu Schadenersatz. Alle Rechte vorbehalten,
insbesondere für den Fall der Patenterteilung oder GM-Eintragung vorbehalten.
Page:
Function: Placement Head
==HD=E12+DLM4/87
drawing number:
03082532-010201LE3
DLM4_Head
DLM4_Head
DLM4_Head
DLM4_Head
GmbH & Co KG
ASM
Assembly Systems
Copyright reserved
Ed.
Original
liyang
Date
Date
Modification
Appr
14/11/2014
Name
25
23
21
19
17
15
13
11
9
7
5
3
1
26
24
22
20
18
16
14
12
10
8
6
4
2
-X2
-X2
-X2
-X2
Distributor
Distributor
Distributor
Distributor
Star-Motor
Star-Motor
Star-Motor
Star-Motor
33
31
29
27
34
32
30
28
39
37
35
40
38
36
25
23
21
19
17
15
13
11
9
7
5
3
1
26
24
22
20
18
16
14
12
10
8
6
4
2
-X24
-X24
-X24
-X24
33
31
29
27
34
32
30
28
39
37
35
40
38
36
1 2 3 5 7 9 11 13 15 17 19 2823 25 27 29 31 35 37 394 6 8 10 12 14 16 18 22 24 26 30 32 34 36 38 40
2 4 6 8 12 14 17 19 2823 25 27 29 31 33 35 37 393 5 7 9 11 13 15 18 20 22 24 26 30 32 34 36 38 40161 21
2120 33
10
25
23
21
19
17
15
13
11
9
7
5
3
1
26
24
22
20
18
16
14
12
10
8
6
4
2
-X26
-X26
-X26
-X26
33
31
29
27
34
32
30
28
39
37
35
40
38
36
2 4 6 8 12 14 17 19 2823 25 27 29 31 33 35 37 393 5 7 9 11 13 15 18 20 22 24 26 30 32 34 36 38 40161 2110
1 2 3 5 7 9 11 13 15 17 19 2823 25 27 29 31 35 37 394 6 8 10 12 14 16 18 22 24 26 30 32 34 36 38 402120 33
10
8
6
4
2
9
7
5
3
1
-X1
-X1
-X1
-X1
Motor/Speedo
E
1
3
5
7
9
2
4
6
8
10
-X1.A1
-X1.A1
-X1.A1
-X1.A1
G
25
23
21
19
17
15
13
11
9
7
5
3
1
26
24
22
20
18
16
14
12
10
8
6
4
2
33
31
29
27
34
32
30
28
39
37
35
40
38
36
-X2
-X2
-X2
-X2
E
GN
PK
WH
YE
GY
RD
BN
YE
BK
GN
RD
BN
PK
WH
WH GN GY
BK WH GN
E
Key5
5
-X24
-X24
-X24
-X24
Distributor
Distributor
Distributor
Distributor
Z-Motor
Z-Motor
Z-Motor
Z-Motor
3
4
5
6
7
8
9
10
2
1
11
12
14
13
15
16
18
17
19
20
21
22
24
23
25
26
28
27
29
30
31
32
34
33
35
36
38
37
39
40
3
4
5
6
7
8
9
10
2
1
11
12
14
13
15
16
18
17
19
20
21
22
24
23
25
26
28
27
29
30
31
32
34
33
35
36
38
37
39
40
-X26
-X26
-X26
-X26
Distributor
Distributor
Distributor
Distributor
Star-Motor
Star-Motor
Star-Motor
Star-Motor
1
-X13
-X13
-X13
-X13
60 1
-X16
-X16
-X16
-X16
60
1
-X2
-X2
-X2
-X2
601
-X1
-X1
-X1
-X1
60
1
2
3
5
4
-X1.ENC
-X1.ENC
-X1.ENC
-X1.ENC
9
7
1
10
8
6
4
2
-X5
-X5
-X5
-X5
3
9
7
5
3
1
8
6
4
2
-X12
-X12
-X12
-X12
5
3
1
6
4
-X6
-X6
-X6
-X6
Key8
8
Key3
3
Z-Lifting
Flex-tupe
1
3
5
7
9
2
6
10
-X3
-X3
-X3
-X3
(dejam-board)
Z-Motor
Z-Motor
Z-Motor
Z-Motor
8
4
Key4
4
25
23
21
19
17
15
13
11
9
7
5
3
1
26
24
22
20
18
16
14
12
10
8
6
4
2
-X1
-X1
-X1
-X1
Distributor
Distributor
Distributor
Distributor
Z-Motor
Z-Motor
Z-Motor
Z-Motor
33
31
29
27
34
32
30
28
39
37
35
40
38
36
25
23
21
19
17
15
13
11
9
7
5
3
1
26
24
22
20
18
16
14
12
10
8
6
4
2
33
31
29
27
34
32
30
28
39
37
35
40
38
36
-X1
-X1
-X1
-X1
1
3
5
7
9
6
8
10
-X10
-X10
-X10
-X10
Light-sensor-top
Light-sensor-top
Light-sensor-top
Light-sensor-top
Z-Axis
Z-Axis
Z-Axis
Z-Axis
2
4
1
5
7
2
4
6
-X11
-X11
-X11
-X11
Sensor-down
Sensor-down
Sensor-down
Sensor-down
Z-Axis
Z-Axis
Z-Axis
Z-Axis
8
3
9
7
5
3
1
10
8
6
-X10
-X10
-X10
-X10
7
5
1
6
4
2
-X11
-X11
-X11
-X11
9
7
5
3
1
10
6
2
-X3
-X3
-X3
-X3
Key8
8
9
7
5
3
1
10
6
4
2
-X4
-X4
-X4
-X4
100 mm
4x0,14
Encoder Cable
03082806
03082806
03082806
03082806 -01
-01
-01
-01
-W4
-W4
-W4
-W4
Key8
8
1
3
7
9
2
4
6
8
10
-X5
-X5
-X5
-X5
Star-Motor
Star-Motor
Star-Motor
Star-Motor
5
1
3
5
7
9
2
4
6
10
-X4
-X4
-X4
-X4
Z-Motor Encoder
Z-Motor Encoder
Z-Motor Encoder
Z-Motor Encoder
8
1
3
5
7
9
2
4
6
8
-X12
-X12
-X12
-X12
Star-Motor Encoder
Star-Motor Encoder
Star-Motor Encoder
Star-Motor Encoder
10
Key10
10
Key2
2
-X1.ENC_TS
-X1.ENC_TS
-X1.ENC_TS
-X1.ENC_TS
Encoder
2
3
5
4
1
7
8
9
6
10
Key2
2
Key4
4
MHCU-PM-SH6-DM8
**Reserve**
1
3
5
7
9
2
4
6
8
-X7
-X7
-X7
-X7
Turn-Motor Encoder
Turn-Motor Encoder
Turn-Motor Encoder
Turn-Motor Encoder
9
7
5
3
1
8
6
4
2
-X7
-X7
-X7
-X7
1
3
5
4
6
-X6
-X6
-X6
-X6
blow-unit
blow-unit
blow-unit
blow-unit
2
-ae
-ae
-ae
-ae
MHCU-Module
MHCU-Module
MHCU-Module
MHCU-Module
03090976
-ac.1
-ac.1
-ac.1
-ac.1
Gantry Head Interface
DLM-Head
03102932
PE
DLM_DP_AXIS_P_CMC
DLM_DP_AXIS_M_CMC
DLM_Z_AXIS_P
DLM_Z_AXIS_P
DLM_Z_AXIS_M
DLM_Z_AXIS_M
VENT_BLASLUFT
nc
DLM_LIS_Z_OBEN
DLM_LIS_Z_UNTEN
nc
DGND
nc
nc
nc
DGND
DLM_DP_AXIS_REF_I_N
DLM_DP_AXIS_REF_I_P
P5V
DLM_DP_AXIS_TRACK_B_N
DLM_DP_AXIS_TRACK_B_P
DGND
DLM_DP_AXIS_TRACK_A_N
DLM_DP_AXIS_TRACK_A_P
N15V
DLM_Z_AXIS_TACHO_P
DLM_Z_AXIS_TACHO_N
P15V
DLM_Z_AXIS_REF_I_N
DLM_Z_AXIS_REF_I_P
P5V
DLM_Z_AXIS_TRACK_B_N
DLM_Z_AXIS_TRACK_B_P
DGND
DLM_Z_AXIS_TRACK_A_N
DLM_Z_AXIS_TRACK_A_P
PE
PE
nc
nc
DLM_S_AXIS_W
DLM_S_AXIS_W
DLM_S_AXIS_V
DLM_S_AXIS_V
P24V
nc
nc
DLM_LIS_Z_UNTEN_A_5V
nc
BLASLUFT_AN5
nc
nc
nc
DGND
nc
nc
P5V
nc
nc
DGND
nc
nc
N15V
SDA_ZV_I2C
SCL_I2C
P15V
DLM_S_AXIS_REF_I_N
DLM_S_AXIS_REF_I_P
P5V
DLM_S_AXIS_TRACK_B_N
DLM_S_AXIS_TRACK_B_P
DGND
DLM_S_AXIS_TRACK_A_N
DLM_S_AXIS_TRACK_A_P
PE
DLM_S_AXIS_U
DLM_S_AXIS_U
-ag
-ag
-ag
-ag
intermediate-distributor
intermediate-distributor
intermediate-distributor
intermediate-distributor
SP6 12 digital DLM4
SP6 12 digital DLM4
SP6 12 digital DLM4
SP6 12 digital DLM4
340 mm
40x0,14
Flat Cable
03084789
03084789
03084789
03084789 -01
-01
-01
-01
-W1
-W1
-W1
-W1
340 mm
40x0,14
Flat Cable
03084789
03084789
03084789
03084789 -01
-01
-01
-01
-W2
-W2
-W2
-W2
Z_MOT+W
Z_MOT-V
Z_Tacho+
Z_Tacho-
-A1
-A1
-A1
-A1
Z-Motor dejam-board
Z-Motor dejam-board
Z-Motor dejam-board
Z-Motor dejam-board
GND
Spur_N
VCC
Spur_.B
Spur_A
A GND
A GND
MOT_W
MOT_V
MOT_U
AGND
SPUR_A_D
SPUR_BX_D
SPUR_N_D
SPUR_B_D
SPUR_AX_D
SPUR_NX_D
+5V1
Sig.blow
24V
AGND
LStop
GND
+15V
VCC
GND
AGND
LSd_+15V
LS-down
AGND
LP5
Z_MOT+W
LP6
Z_MOT-V
PL7
Z_Tacho+
LP8
Z_Tacho-
-M1.Z
-M1.Z
-M1.Z
-M1.Z
Z-Axis/Speedo/Encoder
Z-Axis/Speedo/Encoder
Z-Axis/Speedo/Encoder
Z-Axis/Speedo/Encoder
00341011
2
1
M
-Z_ENC
-Z_ENC
-Z_ENC
-Z_ENC
GND
EN
EA
VCC
EB
U
-X2.ENC
-X2.ENC
-X2.ENC
-X2.ENC
Encoder
VCC
2
3
5
4
GND
AM
AP
BM
-M2
-M2
-M2
-M2
Star_Motor_C28
03018507
3~
M
RD WH
RD
OR WH
OR
YE WH
YE
BN WH
BN
140 mm
8x0,5
Motor litz-wire
03031187
03031187
03031187
03031187 -01
-01
-01
-01
-W5
-W5
-W5
-W5
-M2.S
-M2.S
-M2.S
-M2.S
Star-Motor C28 kpl.
Star-Motor C28 kpl.
Star-Motor C28 kpl.
Star-Motor C28 kpl.
03031187
-ENC
-ENC
-ENC
-ENC
Star_Encoder
DGVHS DLM 100F 50ns/900strokes
03098823
1
7
8
9
6
Shield
1
GND
-B1
-B1
-B1
-B1
Light-Sensor
Light-Sensor
Light-Sensor
Light-Sensor
Z-Axis above
Z-Axis above
Z-Axis above
Z-Axis above
03053294
1
2
3
4
LP5
PE
LP6
PE
LP7
GND
LP8
+5V
LP9
Signal
LP10
+15V
LP1
LP2
LP3
LP4
155 mm
10x0,08 (AWG28)
Flat Cable
03053294
03053294
03053294
03053294 -01
-01
-01
-01
-W10
-W10
-W10
-W10
1
250 mm
3x0,09
Flat Cable
00321524
00321524
00321524
00321524 -05
-05
-05
-05
-W11
-W11
-W11
-W11
1
-B2
-B2
-B2
-B2
Sensor
Sensor
Sensor
Sensor
Z-Axis down
Z-Axis down
Z-Axis down
Z-Axis down
00321524
nc
NM
AP
GND
AM
NP
-ENC.TS
-ENC.TS
-ENC.TS
-ENC.TS
Encoder turn-station
Encoder turn-station
Encoder turn-station
Encoder turn-station
Signals for DGVHS DLM 100F 50ns
00335990
nc
120 mm
10x0,08 (AWG28)
Flat Cable
00335990
00335990
00335990
00335990 -01
-01
-01
-01
-W7
-W7
-W7
-W7
1
-Y1
-Y1
-Y1
-Y1
Blow-unit
Blow-unit
Blow-unit
Blow-unit
GAS MV 15 D 2-2
03003526
x1x2
100 mm
2x0,14
Valve-wire
03003526
03003526
03003526
03003526 -03
-03
-03
-03
-W6
-W6
-W6
-W6
BK RD
100 mm
4x0,25
Litz-wire
03082806
03082806
03082806
03082806 -01
-01
-01
-01
-W3
-W3
-W3
-W3
WH
BU
BK
RD
BN GNWH GYYE
150 mm
10x0,14
Encoder-cable
03031187
03031187
03031187
03031187 -01
-01
-01
-01
-W12
-W12
-W12
-W12
LP1
LP2
LP3
LP4
NM
BM
VCC
RD
WH
BU
BK
LP1
GND
LP2
+15V
LP3
OUT
PB
NP
BP
nc
nc
1
3
5
9
2
4
6
8
10
-X8
-X8
-X8
-X8
Power connector
Power connector
Power connector
Power connector
POWERFAIL_24V
P1V2
P2V5
P1V5
P3V3
N15V
P24V
DGND
P5V
7
P15V
-X2
-X1
GND
SPUR_A_B
SPUR_AX_B
SPUR_B_B
SPUR_BX_B
+5V1
SPUR_N_B
SPUR_NX_B
Key
10
10
M3.TS Motor-turn-station
/88.00
-X24ac1
==GA+GA1/75.01
DLM Distribution X1
-X26ac1
==GA+GA1/75.02
DLM Distribution X2
2
1
Sheet
Size DIN A2
E-series_electric_schematic_complete
E-series_electric_schematic_complete
E-series_electric_schematic_complete
E-series_electric_schematic_complete
90011772-010201HX9
Replaced by
DLM4 control
DLM4 control
DLM4 control
DLM4 control
Replaced by
88
Weitergabe sowie Vervielfältigung dieser Unterlage, Verwertung und
Mitteilung des Inhalts nicht gestattet, soweit nicht ausdrücklich zugestanden.
Proprietary Data, company confidential.
All rights reserved
Copying of this document, giving it to others and the use or
communication of the contents thereof, are forbidden without express authority.
Doc. No.
00 01 02 03 04 05 06 07 08 09
Privileged business information.
Do not release
Offenders are liable to payment of damages. All rights are reserved in the
event of the grant or the registration of a utility model or design.
Zuwiederhandlungen verpflichten zu Schadenersatz. Alle Rechte vorbehalten,
insbesondere für den Fall der Patenterteilung oder GM-Eintragung vorbehalten.
Page:
Function: Placement Head
==HD=E12+DLM4/88
drawing number:
03082532-010201LE3
DLM4_Head
DLM4_Head
DLM4_Head
DLM4_Head
GmbH & Co KG
ASM
Assembly Systems
Copyright reserved
Ed.
Original
liyang
Date
Date
Modification
Appr
14/11/2014
Name
G
-M3.TS
-M3.TS
-M3.TS
-M3.TS
Turn_Station
Turn_Station
Turn_Station
Turn_Station
DC_Motor Maxon_S2322 (18V/6W)
(G = no Speed detect)
00320628
2
1
M
2
1
E
Counter
Key6
6
Key7
7
*** elektronic-assembly 03083835 ***
*** elektronic-assembly 03083835 ***
*** elektronic-assembly 03083835 ***
*** elektronic-assembly 03083835 ***
Counter
15
13
11
9
7
5
3
1
16
14
12
10
8
6
4
2
-X14
-X14
-X14
-X14
15
13
11
9
7
5
3
1
16
14
12
10
8
6
4
2
-X1
-X1
-X1
-X1
15
13
11
9
7
5
3
1
16
14
12
10
8
6
4
2
-X1
-X1
-X1
-X1
VAC-S1
VAC-S1
VAC-S1
VAC-S1
hold-circuit
hold-circuit
hold-circuit
hold-circuit
VAC-S2
VAC-S2
VAC-S2
VAC-S2
set-circuit
set-circuit
set-circuit
set-circuit
** Option **
-X23
-X23
-X23
-X23
Steppermotor
Steppermotor
Steppermotor
Steppermotor
"ZHS"
"ZHS"
"ZHS"
"ZHS"
1
3
6
9
2
4
8
10
7
1
3
5
7
9
11
13
15
2
4
6
8
10
12
14
16
-X14
-X14
-X14
-X14
Vacuum-board
Vacuum-board
Vacuum-board
Vacuum-board
7
1
3
5
9
2
4
6
8
10
-X17
-X17
-X17
-X17
BE-Sensor
BE-Sensor
BE-Sensor
BE-Sensor
U
9
7
3
1
10
8
6
4
2
-X22
-X22
-X22
-X22
5
-X22
-X22
-X22
-X22
Steppermotor
Steppermotor
Steppermotor
Steppermotor
"DZS"
"DZS"
"DZS"
"DZS"
1
3
6
9
2
4
8
10
7
5
9
5
3
1
10
8
4
2
-X28
-X28
-X28
-X28
** No Speed detect **
Genarator function is for old DLM
- Service-connection -
- Service-connection -
- Service-connection -
- Service-connection -
"S0"
"S1"
"R_XCU"
"R_X167"
"GANTRY_ID0"
"GANTRY_ID1"
*Default set all to off
*Default set all to off
*Default set all to off
*Default set all to off
& Logic
9
7
3
1
10
8
6
4
2
-X23
-X23
-X23
-X23
DZS_SM_INT
-ac.1
-ac.1
-ac.1
-ac.1
Gantry Head Interface
DLM-Head
03102932
ZHS_SM_INT
DLM_DP_AXIS_P_CMC
DLM_DP_AXIS_M_CMC
nc
nc
nc
nc
SCL_I2C
SDA_BE_I2C
AVCC
BE_SENS_INT
BE_SENS_PRESENT_N
PE
BE_SENS_AN3
AGND
BE_SENS_ON_5V_N
P15V
N15V
AVCC
AVCC
VAK_BESTUECK_ZU_AN0
PE
VAK_BESTUECK_MITTE_AN1
PE
VAK_BESTUECK_OFFEN_AN6
PE
PE
VAK_HALTE_AN7
PE
VAK_BOARD_PRESENT_N
AGND
AGND
7
1
3
5
9
2
4
8
10
-X28
-X28
-X28
-X28
DP-DRIVE
DP-DRIVE
DP-DRIVE
DP-DRIVE
ZHS_OUT1A
ZHS_OUT1B
ZHS_OUT2A
ZHS_OUT2B
ZHS_SM_B_IN
DGND
P5V
PLED_SM
DZS_OUT1A
DZS_OUT1B
DZS_OUT2A
DZS_OUT2B
PE
DGND
P5V
PLED_SM
PE
-A3
-A3
-A3
-A3
DP-Motor dejam-board
DP-Motor dejam-board
DP-Motor dejam-board
DP-Motor dejam-board
LP1
LP2
LP3
LP4
-A4
-A4
-A4
-A4
Steppermotor
Steppermotor
Steppermotor
Steppermotor
turn-set-unit
turn-set-unit
turn-set-unit
turn-set-unit
240 mm
10x0,14 (AWG26)
Motor Flat-Cable
-W20
-W20
-W20
-W20
1
2
OUT1B
3
OUT2A
4
OUT2B
5
6
7
GND
8
PV5
9
DZS_INT
10
PLED_SM
1
2
3
4
1
2
3
4
1
OUT1A
PE
-M4.TSU
-M4.TSU
-M4.TSU
-M4.TSU
Steppermotor
Steppermotor
Steppermotor
Steppermotor
turn-set-unit
turn-set-unit
turn-set-unit
turn-set-unit
03029481
1 2 3 4
M
6
-A5
-A5
-A5
-A5
Steppermotor
Steppermotor
Steppermotor
Steppermotor
valve-set-unit
valve-set-unit
valve-set-unit
valve-set-unit
354 mm
10x0,14 (AWG26)
Motor-Cable
03048533
03048533
03048533
03048533 -01
-01
-01
-01
-W23
-W23
-W23
-W23
1
2
OUT1B
3
OUT2A
4
OUT2B
5
A_IN
6
B_IN
7
GND
8
PV5
9
ZHS_INT
10
PLED_SM
1
2
3
4
1
OUT1A
-M5.VSU
-M5.VSU
-M5.VSU
-M5.VSU
Steppermotor
Steppermotor
Steppermotor
Steppermotor
valve-set-unit
valve-set-unit
valve-set-unit
valve-set-unit
ESCAP P110.34
00368094
1 2 3 4
M
-A6
-A6
-A6
-A6
Vacuum-board
Vacuum-board
Vacuum-board
Vacuum-board
P15V
N15V
AVCC
AVCC
VAK_ASSEMB_CLOSED_AN0
PE
VAK_ASSEMB_MIDDLE_AN1
PE
VAK_ASSEMB_OPEN_AN2
PE
PE
VAK_HOLD_AN4
PE
VAK_BOARD_PRESENT_N
AGND
AGND
150 mm
16x0,09 (AWG28)
Flat-Cable
00363738
00363738
00363738
00363738 -01
-01
-01
-01
-W23
-W23
-W23
-W23
1
-P1
amplify
-P2
offset
-P3
amplify
-P4
offset
260 mm
4x0,25
Motor Cable
-W25
-W25
-W25
-W25
RD
WH
BU
BK
WH
BU
BK
RD
LP5
DP_MOT+W
LP6
DP_MOT-V
LP7
DP_Tacho+
LP8
DP_Tacho-
BN
OR
RD
YE
BN
OR
RD
YE
"Z-D-A"
"Z-D-A"
"Z-D-A"
"Z-D-A"
LED Green
LED Green
LED Green
LED Green
LED10
"ZHS_INT"
"ZHS_INT"
"ZHS_INT"
"ZHS_INT"
LED Green
LED Green
LED Green
LED Green
LED1
"DZS_INT"
"DZS_INT"
"DZS_INT"
"DZS_INT"
LED4
"Z_UP"
"Z_UP"
"Z_UP"
"Z_UP"
LED5
"Z_DOWN"
"Z_DOWN"
"Z_DOWN"
"Z_DOWN"
LED6
"LED22 OK"
"LED22 OK"
"LED22 OK"
"LED22 OK"
LED8
"LED23 OK"
"LED23 OK"
"LED23 OK"
"LED23 OK"
LED11
"AIR"
"AIR"
"AIR"
"AIR"
LED7
"FPGA Ok"
"FPGA Ok"
"FPGA Ok"
"FPGA Ok"
LED13
"Base_Power Fail"
"Base_Power Fail"
"Base_Power Fail"
"Base_Power Fail"
LED RED
LED RED
LED RED
LED RED
LED2
"EMERGENCY_STOP"
"EMERGENCY_STOP"
"EMERGENCY_STOP"
"EMERGENCY_STOP"
LED3
"Local_Power Fail"
"Local_Power Fail"
"Local_Power Fail"
"Local_Power Fail"
LED16
"X Motor_Temperature"
"X Motor_Temperature"
"X Motor_Temperature"
"X Motor_Temperature"
LED24
"LED22 ERROR"
"LED22 ERROR"
"LED22 ERROR"
"LED22 ERROR"
LED14
"+V-LS"
"+V-LS"
"+V-LS"
"+V-LS"
LED RED
LED RED
LED RED
LED RED
LED19
"LED23 ERROR"
"LED23 ERROR"
"LED23 ERROR"
"LED23 ERROR"
LED15
LED9
LED RD
"DZS-ERR"
"DZS-ERR"
"DZS-ERR"
"DZS-ERR"
LED18
LED RD
"ZHS-ERR"
"ZHS-ERR"
"ZHS-ERR"
"ZHS-ERR"
nc
nc
5
ZHS_SM_A_IN
1
2
3
4
5
6
7
8
9
10
-X25
-X25
-X25
-X25
Service
Service
Service
Service
11
12
13
14
1
-X29
-X29
-X29
-X29
Service
Service
Service
Service
JTAG-UHM
JTAG-UHM
JTAG-UHM
JTAG-UHM
2
3
4
5
6
7
8
-XCU
-XCU
-XCU
-XCU
Display
LED22
-XE167
-XE167
-XE167
-XE167
Display
LED23
2
3
4
5
6
-SW2
-SW2
-SW2
-SW2
1
MCAN_L
MCAN_H
FDB_UHM_XCU_CH7_BUS_P
FDB_UHM_XCU_CH7_BUS_N
nc
FDB_UHM_XCU_CH8_BUS_P
FDB_UHM_XCU_CH8_BUS_N
GCAN_H
GCAN_L
DGND
EMERGENCY_STOP_3V3_N
POWERFAIL_BASE_3V3_N
nc
FPGA_TDI
FPGA_TDO
FPGA_TCK
DGND
P2V5
FPGA_DEBUG_TX
FPGA_DEBUG_RX
FPGA_TMS
1
-X11
-X11
-X11
-X11
TEST
TEST
TEST
TEST
XE167
XE167
XE167
XE167
2
3
4
5
6
7
8
9
10
1
2
3
4
5
6
7
8
9
10
11
12
-X33
-X33
-X33
-X33
JTAG
JTAG
JTAG
JTAG
XE167
XE167
XE167
XE167
nc
DGND
XE167_TCK
XE167_TDI
XE167_BRKOUT_N
nc
PORST_N
XE167_TMS
XE167_TRST_N
XE167_TDO
XE167_BRKIN_N
P3V3
P3V3
PLD-I/O-0
PLD-I/O-1
PLD-I/O-2
PLD-I/O-3
PLD-I/O-4
PLD-I/O-5
PLD-I/O-6
PLD-I/O-7
DGND
-J1
-J1
-J1
-J1
-J2
-J2
-J2
-J2 -J3
-J3
-J3
-J3
-X1
-X1
-X1
-X1
-X2
-X2
-X2
-X2
-X1
-X1
-X1
-X1
-X2
-X2
-X2
-X2
P3V3
5
ENC.TS Encoder-turn-station
/87.09
-X28ac1
==GA+GA1/75.02
DP-DRIVE
-X22ac1
==GA+GA1/75.01
Steppermotor
"DZS"
-X23ac1
==GA+GA1/75.02
Steppermotor
"ZHS"
-X14ac1
==GA+GA1/75.02
Vacuum-board
Sheet
Size DIN A2
E-series_electric_schematic_complete
Ed.
Original
90011772-010201HX9
version_service_11.2014
liyang
Date
Date
Replaced by
Vacuum Pump Control 03103163-010101LX3
Modification
Appr
Replaced by
14/11/2014
89
Name
Weitergabe sowie Vervielfältigung dieser Unterlage, Verwertung und
Mitteilung des Inhalts nicht gestattet, soweit nicht ausdrücklich zugestanden.
Proprietary Data, company confidential.
All rights reserved
Copying of this document, giving it to others and the use or
communication of the contents thereof, are forbidden without express authority.
Doc. No.
GmbH & Co KG
ASM
Assembly Systems
Copyright reserved
0 1 2 3 4 5 6 7 8 9
Privileged business information.
Do not release
Offenders are liable to payment of damages. All rights are reserved in the
event of the grant or the registration of a utility model or design.
Zuwiederhandlungen verpflichten zu Schadenersatz. Alle Rechte vorbehalten,
insbesondere für den Fall der Patenterteilung oder GM-Eintragung vorbehalten.
Page:
Function: Vacuum Pump
==VAC_P=E12+VAC/89
1/
drawing number:
-K6
DILEM-01-G(24VDC)
03102038
A1
A2
/89.5
/89.5
/89.5
1
2
3
4
5
6
21 3 4 5 6
-X142
Power
Power
Power
Power
Vacuum pump
Vacuum pump
Vacuum pump
Vacuum pump
-X142
-X142
-X142
-X142
1 2 43 5 6
-X1(VAC)
-X1(VAC)
-X1(VAC)
-X1(VAC)
Vacuum pump signal
1 2
Vacuum Pump Connection:
Vacuum Pump Connection:
Vacuum Pump Connection:
Vacuum Pump Connection:
Voltage 330V-500V:
Star Configuration
Voltage 190V to 290V:
Delta Configuration
T1 T2 T3 T1 T2 T3
52 1 3 6 4
1 65432
3 ~
-Z1
MURR 23050
EMV Suppressor
03097216
U
V
W
Vacuum Pump Unit
Vacuum Pump Unit
Vacuum Pump Unit
Vacuum Pump Unit
**Optional - Not required in Twin Head Variant**
**Optional - Not required in Twin Head Variant**
**Optional - Not required in Twin Head Variant**
**Optional - Not required in Twin Head Variant**
**Cable 03102652-W134 is pre-layed inside base
**Cable 03102652-W134 is pre-layed inside base
**Cable 03102652-W134 is pre-layed inside base
**Cable 03102652-W134 is pre-layed inside base
machine for all head variants**
machine for all head variants**
machine for all head variants**
machine for all head variants**
160 mm
3x2,5
Single wire
03101688
03101688
03101688
03101688 -01
-01
-01
-01
-W131
-W131
-W131
-W131
BK
BK
-Q3
ZE-4
Overload Relay
03102037
1
2
-Q3-S1
Overload relay
95
96
310 mm
6x1,5
Einzelader Multinorm
03101689
03101689
03101689
03101689 -01
-01
-01
-01
-W133
-W133
-W133
-W133
BK
BK
BK
BK
BK
BK
2520 mm
7G0,75
ÖLFLEX 150CY UL
03102652
03102652
03102652
03102652 -01
-01
-01
-01
-W134
-W134
-W134
-W134
4
5
GNYE
3
2
1
PE
PE
PE
PET2
T2
T2
T2 T3
T3
T3
T3 PTC1
PTC1
PTC1
PTC1 PTC2
PTC2
PTC2
PTC2T1
T1
T1
T1
U1 V1 W1 PE
-M4
3
M
-M4-B1.PTC
temperatur-
control PTC
-M4
-M4
-M4
-M4
Becker Vacuum-Pump
Becker Vacuum-Pump
Becker Vacuum-Pump
Becker Vacuum-Pump
Type: Becker VX4.16 (0,55KW, 16m³/h)
03115911-
6
GNYE
300 mm
2x1,0
Einzelader Multinorm
03108651
03108651
03108651
03108651 -01
-01
-01
-01
-W132
-W132
-W132
-W132
BK
BK
-nc
-nc
-VAC_PE
==PS005+PS/37.2
-VAC_POWL3
==PS005+PS/37.2
-VAC_POWL2
==PS005+PS/37.2
-VAC_POWL1
==PS005+PS/37.2
-VAC_24V
==CH+DI/53.5
-VAC_GND
==CH+DI/53.5
K6.A2
/89.5
K6.A2
/89.4