NXT-0167.pdf - 第23页

Module Nicknam e Module Serial Number Head Nicknam e Head Serial Number M3 M3XNo1141 5 H 08 00191 7 No Holder Side Degree X [um ] Y [um] 1 0 0 0 15.956435 -1.948981 2 1 0 0 17.503808 2.251953 3 2 0 0 17.860163 -18.39374 …

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344
7
0
0
-16.208367
14.560627
345
8
0
0
-15.197658
10.872151
346
9
0
0
-6.351756
14.00193
347
10
0
0
-5.163429
-4.882958
348
11
0
0
-15.712995
15.398118
349
0
0
90
-16.112893
10.57341
350
1
0
90
-7.159516
16.187838
351
2
0
90
-0.685597
15.92643
352
3
0
90
1.278622
10.857631
353
4
0
90
2.913681
10.015434
354
5
0
90
2.491085
1.628059
355
6
0
90
-8.482218
-10.011504
356
7
0
90
-11.381957
7.152975
357
8
0
90
-13.781974
2.657492
358
9
0
90
-10.767098
8.911188
359
10
0
90
-8.305872
12.845226
360
11
0
90
-10.559284
11.470477
361
0
0
180
-2.608175
6.61921
362
1
0
180
-2.62343
1.041608
363
2
0
180
11.013215
11.628523
364
3
0
180
5.559503
16.666977
365
4
0
180
-0.388542
12.331379
366
5
0
180
-3.860651
5.252122
367
6
0
180
2.56754
3.167898
368
7
0
180
-4.731418
12.181936
369
8
0
180
-14.167105
12.95525
370
9
0
180
-5.139968
10.74874
371
10
0
180
4.112078
16.608729
372
11
0
180
-10.224138
13.024717
373
0
0
270
-11.33246
15.933059
374
1
0
270
8.073214
10.703698
375
2
0
270
1.729283
12.813857
376
3
0
270
-12.383312
12.982716
377
4
0
270
-2.831372
12.937891
378
5
0
270
-6.00701
10.543424
379
6
0
270
13.33292
13.169003
380
7
0
270
1.889407
12.768258
381
8
0
270
1.303739
3.731384
382
9
0
270
0.834678
3.484042
383
10
0
270
5.543435
-2.357082
384
11
0
270
-18.347679
0.210911
-6.99
4.71
8.06
8.89
50
50
-50
-50
2.07
1.87
1.78
1.70
Form# 12-ME80-0GEN-0229-01-WI-D
Cpk
Average
STDEV
USL
LSL
CP
M03
Module
Nickname
Module Serial
Number
Head
Nickname
Head Serial
Number
M3 M3XNo11415 H08 001917
No
Holder
Side
Degree
X [um]
Y [um]
1
0
0
0
15.956435
-1.948981
2
1
0
0
17.503808
2.251953
3
2
0
0
17.860163
-18.39374
4
3
0
0
6.633346
-6.479442
5
4
0
0
-13.224621
-9.043675
6
5
0
0
-12.628727
1.790818
7
6
0
0
-13.890073
4.1343
8
7
0
0
-6.182695
5.620457
9
0
0
180
-9.933117
-0.807416
10
1
0
180
-1.904942
-5.896744
11
2
0
180
-1.263694
-9.909391
12
3
0
180
-18.577455
-10.207354
13
4
0
180
-3.004355
-13.678781
14
5
0
180
-14.435351
-13.255451
15
6
0
180
-15.031664
-3.055466
16
7
0
180
-13.564125
4.64593
17
0
0
90
-5.223293
-9.628247
18
1
0
90
-15.030811
4.410486
19
2
0
90
-1.949609
-8.16665
20
3
0
90
-7.013203
13.188634
21
4
0
90
-7.256622
-9.399742
22
5
0
90
-3.015513
-9.479252
23
6
0
90
-10.370911
-11.809091
24
7
0
90
-11.444605
-9.828371
25
0
0
270
-10.550214
1.578395
26
1
0
270
-7.712692
-7.561753
27
2
0
270
-10.160386
-10.659955
28
3
0
270
-3.417758
-24.490263
29
4
0
270
-15.424656
-7.59645
30
5
0
270
-12.361624
-2.057805
31
6
0
270
-17.472537
0.43304
32
7
0
270
-10.081617
4.960925
33
0
0
0
-13.1641
-4.523362
34
1
0
0
-18.626736
1.215189
35
2
0
0
-12.452342
2.015506
36
3
0
0
-20.591544
3.707655
37
4
0
0
2.288668
2.750487
38
5
0
0
8.311668
-2.369379
39
6
0
0
-6.347551
-10.366482
40
7
0
0
8.311654
-2.35349
41
0
0
180
-1.198574
-4.319575
42
1
0
180
-16.461341
-0.350328
43
2
0
180
-18.39795
0.974105
44
3
0
180
-3.999903
-3.21679
45
4
0
180
-13.034532
-11.330594
46
5
0
180
-0.795837
-15.869653
47
6
0
180
-14.567138
-9.360582
48
7
0
180
-12.814322
-4.024275
49
0
0
90
0.999524
-1.370466
50
1
0
90
-12.789531
1.6562
51
2
0
90
-0.465647
-3.64219
52
3
0
90
-13.135071
-6.558603
53
4
0
90
-15.890048
-1.633286
M04
54
5
0
90
-16.451226
-2.475721
55
6
0
90
-17.123402
0.961208
56
7
0
90
-13.425721
-4.817903
57
0
0
270
-9.353938
-6.062897
58
1
0
270
-7.673721
-3.788276
59
2
0
270
-6.353193
-10.119606
60
3
0
270
-11.418434
-13.104719
61
4
0
270
-10.385741
-7.512357
62
5
0
270
-16.313093
-5.219134
63
6
0
270
-16.878814
4.58016
64
7
0
270
-13.144981
-2.960028
65
0
0
0
3.98506
-3.553837
66
1
0
0
-7.080022
2.717525
67
2
0
0
-7.669445
-6.932088
68
3
0
0
4.718581
0.392569
69
4
0
0
-0.348344
0.118396
70
5
0
0
-4.900227
5.718862
71
6
0
0
-6.618344
-4.171949
72
7
0
0
-6.543534
-4.543359
73
0
0
180
-7.060284
-1.443585
74
1
0
180
-13.196811
-5.205223
75
2
0
180
-7.65284
4.202212
76
3
0
180
-9.827114
5.617101
77
4
0
180
-9.719956
0.318643
78
5
0
180
-14.401781
-7.294323
79
6
0
180
-14.406252
-5.046197
80
7
0
180
-12.686735
2.683589
81
0
0
90
-2.703423
-6.945635
82
1
0
90
-19.035094
-3.350927
83
2
0
90
-0.086735
-1.429096
84
3
0
90
-7.202947
4.622811
85
4
0
90
-0.92169
-0.527093
86
5
0
90
-2.595061
6.159831
87
6
0
90
1.269491
-4.309225
88
7
0
90
-1.559115
-11.633763
89
0
0
270
-10.16495
-2.425492
90
1
0
270
-3.44167
2.998332
91
2
0
270
-8.724972
1.324376
92
3
0
270
-5.749652
0.890119
93
4
0
270
-10.523731
-1.125035
94
5
0
270
-3.383737
-3.563661
95
6
0
270
-8.442819
-5.254497
96
7
0
270
-8.8397
-4.920387
97
0
0
0
-10.071349
3.345331
98
1
0
0
-6.728746
15.767326
99
2
0
0
2.500585
3.258528
100
3
0
0
0.701054
7.99428
101
4
0
0
3.243628
-0.158036
102
5
0
0
3.997987
-3.50742
103
6
0
0
-13.947994
-5.860157
104
7
0
0
3.644438
-0.154335
105
0
0
180
-14.975276
6.811332
106
1
0
180
-12.229678
3.693879
107
2
0
180
-3.760695
6.591475
108
3
0
180
-7.942167
6.698392
109
4
0
180
-9.82935
-3.890967
110
5
0
180
-3.947442
-8.076509
111
6
0
180
-19.9755
-6.435067
M04