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FasTRA K ™ Plasma System For more in formation, speak with your local representative or contact your regional office. nordsonma rch.com North America Headquar ters Concord, CA, USA +1.925.827.1240 info@nordsonmarc h.com …

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Specifications: FasTRAK
™
Plasma System
Enclosure
Dimensions
W x D x H – Footprint
1650 W x 1500 D x 2100 H mm
(64.96 W x 59.06 D x 82.68 H in.)
Net Weight
909 kg (2000 lb)
Effective Footprint – Clearances
Right, Left, Back – 914 mm (36 in.)
Front – 914 mm (36 in.)
Chamber
Dimensions
330 W x 330 D x 50 H mm
(13 W x 13 D x 2 H in.)
Volume
5.5 liters (338 in³)
Variable Electrode Configurations
Power-Ground; Ground-Power; Power-Power
Electrodes
Powered Electrode Dimensions
325 W x 325 D x 50 H mm (12.8 W x 12.8 D x 2 H in.)
Working Area
305 W x 305 D mm
RF Power
Standard Wattage
600 W
Frequency
13.56 MHz
Gas Control
Maximum Number of MFCs
4
Control
System
PLC Control with PC Based
Touch Screen Interface
Remote
Interface
SMEMA; SECS/GEM
Optional
Vacuum
Pump
Dry vacuum pump
16 CFM
Variable Frequency Drive
Facilities
Power Supply
220VAC, 15A, 50/60Hz, Single Phase, 12 AWG, 3-Wire
Process Gas Fitting Size & Type
.25-in. OD Swagelok Tube
Process Gas Purity
Industrial grade or better
Process Gas Pressure
Regulated from .69 bar (10 psig) min. to 1 bar (15 psig) max.
Purge Gas Fitting Size & Type
.25-in. OD Swagelok Tube
Purge Gas Purity
Industrial grade Nitrogen or CDA
Purge Gas Pressure
Regulated from 2 bar (30 psig) min. to 5.5 bar (80 psig) max.
Pneumatic Valves Fitting Size &
Type
.25-in. OD Swagelok Tube
Pneumatic Gas Purity
CDA, Oil Free, Dewpoint <=7°C /45°F, Particulate Size <5
micron
Pneumatic Gas Pressure
Regulated from 3.4 bar (50 psig) min. to 5.5 bar (80 psig) max.
Exhaust
25.4mm (1 in.) OD Pipe Flange
Vacuum Source
-80 kPa (-23.3 in. Hg)
Compliance
Certifications
CE Marked, SEMI S2/S8 (EH&S/Ergonomics), Cleanroom,
SEMI E-10
Ancillary
Equipment
Optional Equipment
Nitrogen generator, Hydrogen generator (Requires Additional
Non-Optional Hardware), Scrubber
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Dimensions: FasTRAK
™
Plasma System
FasTRAK Plasma System – Front View
FasTRAK Plasma System – Right Side View
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FasTRAK
™
Plasma System
For more information,
speak with your local
representative or
contact your regional
office.
nordsonmarch.com
North America
Headquarters
Concord, CA, USA
+1.925.827.1240
info@nordsonmarch.com
China
Shanghai
+8621.3866.9166
Europe & Africa
Maastricht, Netherlands
+31.65.155.4996
S.E. Asia
Singapore
+65.6796.9500
Korea
Seoul
+82.31.736.8321
India
Chennai
+91.44.43539024
Nordson MARCH
+1.800.326.1151
Phone
info@nordsonmarch.com Email
2470-A Bates Avenue
Concord, CA, 94520-1122 U.S.A.
www.nordsonmarch.com
Revision B