晶圆测试说明书Cascade-11861-6-Manual.pdf - 第18页
xvi • Summit 11K/12K Probe Station User’s Guide
Declaration of Conformity
•
xv
Declaration of Conformity
Manufacturer
Cascade Microtech, Inc.
2430 NW 206
th
Avenue
Beaverton, OR 97006 USA
Product: Summit 11000/12000-Series Prober
Serial No.: __________________________
Date of Shipment: ___________________
Standards
This product has been assessed against the Machinery Directive
1
(89/392/EEC),
annex1 (as amended) and complies with the Essential Health and Safety
Requirements therein. This product has also been assessed against the Low
Voltage Directive (93/68/EEC) and EN61010 and complies with the safety
requirements for electrical equipment for measurement control and laboratory
use.
This product has been assessed against the EMC Directive (89/336/EEC) and
complies with EN55011 (CISPR 11, Class A), radiated and conducted emissions,
and with immunity standard EN50082-1.
This Declaration of Conformity is based on the results of analysis, testing, and
evaluation performed by Cascade Microtech, Inc. and with the assistance of a
body notified to the Member States and Commission of the European
Communities.
Signature: _______________________________
Date: ___________________________________
Position: ________________________________
1. As permitted by 93/465/EEC, ‘Council Decision concerning the modules for the
various phases of the conformity assessment procedures and the rules for the affix-
ing and use of the CE conformity marking, which are intended to be used in the
technical harmonization directives’ dated 22 July 1993, “Where one or more of
these directives allow the manufacturer, during a transitional period, to choose
which arrangements to apply, the CE marking indicates conformity to the provi-
sions only of those directives applied by the manufacturer.”
xvi
• Summit 11K/12K Probe Station User’s Guide
Contents •
xvii
Contents
Before You Begin i
About This Guide .................................................................................................. i
Guide Contents ................................................................................................. i
Chapter Contents ............................................................................................ ii
Identifying Labels—Ident - Symbole—Etiquettes d'Identification ...............iii
Where to Get More Information .......................................................................v
About Summit 11K/12K Probe Stations ...........................................................v
Safety Standards vii
Introduction ....................................................................................................... vii
Software Interlocks ............................................................................................ vii
Lock Out / Tag Out ......................................................................................... vii
MicroChamber Interlock ...............................................................................viii
Safety Labels-Sicherheits Schilder-Etiquettes de sécurité ............................viii
Danger Labels—Gefahr-Symbole—Etiquettes <<Danger>> .....................viii
Warning Labels—Warn-Symbole—Etiquettes d'Avertissement ................... x
Caution Labels—Warn-Symbole—Etiquettes d'Attention ...........................xii
Manufacturer .................................................................................................... xv
Standards ........................................................................................................... xv
Station Overview 1
Features ...............................................................................................................1
Chuck: Summit 11500, 12500, 11700, 12700 and 11800, 12800 ....................1
Guarded Thermal Chuck Option .................................................................1
FemtoGuard/AttoGuard Chuck Options ....................................................2
MicroChamber .................................................................................................2
Interlock Switches for Access Door ..............................................................3
Precision Positioning .........................................................................................3
Computer Connection ....................................................................................3
Microsoft Windows-Based Software ...............................................................4
X-Y Stage ...........................................................................................................4
Roll-Out Stage .................................................................................................5
Rotating the Chuck .......................................................................................5
Connection Panels ...........................................................................................5
Applications .........................................................................................................7
Accessories ..........................................................................................................7
Large-Area Bridge Mount ................................................................................7
High-Stability Bridge Mount .............................................................................7
Optics .................................................................................................................8
RF Positioners .....................................................................................................8
DCM Positioners ................................................................................................8
Thermal Chuck Controller & Air Dryer ............................................................9
Probe Card Adapter ........................................................................................9
Standard Accessories .........................................................................................9
11100, 12100 ......................................................................................................9
11500, 12500, 11600, 12600, 11700, 12700, 11800, 12800 ..............................9
Recommended Configurations ........................................................................9