晶圆测试说明书Cascade-11861-6-Manual.pdf - 第20页
xviii • Summit 11K/12K Pro be Station User’s Guide Environmental Conditions .......... ......................... ...................... .................... 10 Thermal Controls ..................... .....................…
Contents •
xvii
Contents
Before You Begin i
About This Guide .................................................................................................. i
Guide Contents ................................................................................................. i
Chapter Contents ............................................................................................ ii
Identifying Labels—Ident - Symbole—Etiquettes d'Identification ...............iii
Where to Get More Information .......................................................................v
About Summit 11K/12K Probe Stations ...........................................................v
Safety Standards vii
Introduction ....................................................................................................... vii
Software Interlocks ............................................................................................ vii
Lock Out / Tag Out ......................................................................................... vii
MicroChamber Interlock ...............................................................................viii
Safety Labels-Sicherheits Schilder-Etiquettes de sécurité ............................viii
Danger Labels—Gefahr-Symbole—Etiquettes <<Danger>> .....................viii
Warning Labels—Warn-Symbole—Etiquettes d'Avertissement ................... x
Caution Labels—Warn-Symbole—Etiquettes d'Attention ...........................xii
Manufacturer .................................................................................................... xv
Standards ........................................................................................................... xv
Station Overview 1
Features ...............................................................................................................1
Chuck: Summit 11500, 12500, 11700, 12700 and 11800, 12800 ....................1
Guarded Thermal Chuck Option .................................................................1
FemtoGuard/AttoGuard Chuck Options ....................................................2
MicroChamber .................................................................................................2
Interlock Switches for Access Door ..............................................................3
Precision Positioning .........................................................................................3
Computer Connection ....................................................................................3
Microsoft Windows-Based Software ...............................................................4
X-Y Stage ...........................................................................................................4
Roll-Out Stage .................................................................................................5
Rotating the Chuck .......................................................................................5
Connection Panels ...........................................................................................5
Applications .........................................................................................................7
Accessories ..........................................................................................................7
Large-Area Bridge Mount ................................................................................7
High-Stability Bridge Mount .............................................................................7
Optics .................................................................................................................8
RF Positioners .....................................................................................................8
DCM Positioners ................................................................................................8
Thermal Chuck Controller & Air Dryer ............................................................9
Probe Card Adapter ........................................................................................9
Standard Accessories .........................................................................................9
11100, 12100 ......................................................................................................9
11500, 12500, 11600, 12600, 11700, 12700, 11800, 12800 ..............................9
Recommended Configurations ........................................................................9
xviii
• Summit 11K/12K Probe Station User’s Guide
Environmental Conditions .............................................................................10
Thermal Controls ............................................................................................... 10
Thermal Controller and Cooler/Circulator ..................................................10
Air Dryer ...........................................................................................................10
Thermal Chuck ................................................................................................10
Station Specifications 13
All Series .............................................................................................................13
Facility Requirements .....................................................................................13
High-Stability Microscope Bridge Mount Option ........................................13
Computer ........................................................................................................13
12000-Series .......................................................................................................13
Dimensions ......................................................................................................13
Total System Planarity ....................................................................................14
12100, 12500 .................................................................................................14
12600, 12700, 12800 .....................................................................................14
Platen ............................................................................................................... 14
Roll-Out Stage ................................................................................................. 14
Chuck .............................................................................................................. 14
X-Y Stage ......................................................................................................... 15
Z Stage .............................................................................................................15
MicroChamber ............................................................................................... 15
12500, 12600, 12700, 12800 .........................................................................15
12100 Probe Stations ......................................................................................15
Chuck Specifications ...................................................................................15
12500 Guarded Probe Stations .....................................................................16
Chuck Specifications ...................................................................................16
12600 Thermal Probe Stations .......................................................................17
Chuck Specifications ...................................................................................17
12700 Guarded Thermal Probe Stations ......................................................17
Chuck Specifications ...................................................................................17
12800 Guarded Thermal Probe Stations ......................................................18
Chuck Specifications ...................................................................................18
11000-Series .......................................................................................................19
Dimensions ......................................................................................................19
Platen ............................................................................................................... 19
Rotary Stage ...................................................................................................19
Roll-out Stage ..................................................................................................19
Chuck .............................................................................................................. 19
X-Y Stage ......................................................................................................... 19
MicroChamber ............................................................................................... 19
Chuck Specifications ...................................................................................20
Total System Planarity ..................................................................................20
11500 Guarded Probe Stations .....................................................................21
Chuck Specifications ...................................................................................21
Total System Planarity ..................................................................................21
11600 Thermal Probe Stations .......................................................................22
Chuck Specifications ...................................................................................22
Total System Planarity ..................................................................................22
11700 Guarded Thermal Probe Stations ......................................................23
Contents •
xix
Chuck Specifications ...................................................................................23
Total System Planarity ..................................................................................23
11800 Guarded Thermal Probe Stations ......................................................24
Chuck Specifications ...................................................................................24
Total System Planarity ..................................................................................24
Installing 25
Before Installing .................................................................................................25
Lifting Requirements .......................................................................................25
Tools Needed ..................................................................................................25
Installation Overview ........................................................................................25
Unpack ............................................................................................................27
To unpack your probe station ....................................................................27
Remove and Save Shipping Restraints ........................................................28
To remove the roll-out stage shipping restraints .......................................28
To remove the GT chuck shipping restraints .............................................29
To remove the platen lift handle shipping restraint .................................29
To remove the platen shipping restraints ..................................................30
To remove the x-y stage shipping restraint ...............................................31
Large-Area Microscope Bridge Mount ........................................................31
To remove the optics bridge mount shipping restraints ..........................31
To remove the shipping blocks and spacers ............................................31
High-Stability Microscope Bridge Mount .....................................................33
To remove the optics bridge mount shipping restraints ..........................33
Mounting a Microscope ................................................................................35
To mount the Mitutoyo FS-60 Finescope ...................................................35
To mount the Optem A-Zoom microscope ..............................................36
To mount the Olympus Zoom Stereo microscope ...................................38
Install the Computer and Hoses ...................................................................39
To install the computer, cables, and hoses ..............................................39
Connect the Chuck Vacuum Hose .............................................................40
To connect the chuck vacuum hose ........................................................40
To add counterbalance weights ...............................................................41
To add weight to the counterbalance .....................................................41
To planarize the large-area optics bridge ................................................42
Installing Positioners and Probes ...................................................................43
To mount DCM positioners ..........................................................................43
To connect positioner vacuum ..................................................................44
Mounting RF Positioners .................................................................................45
To install the positioners one at a time ......................................................46
Installing the Probe Card Holder ..................................................................47
Installing the TopHat .......................................................................................47
To install the MicroChamber TopHat .........................................................47
Install Chuck Bias and Door Interlock ...........................................................48
Electrical isolation and chuck biasing .......................................................48
Safety interlock switch .................................................................................50
Thermal Equipment Installation .....................................................................50
Verifying and Operating 53
Using the Emergency Off Button (EMO) .........................................................53
Verifying the 11000 or 12000-Series Probe Station Manually ........................54