MN-E00372EDW-XX_B(1).pdf - 第176页
在线预览 MN-E00372EDW-XX_B(1).pdf PDF 文档。
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(WBFC) WAFER BLOWER
01-E17822
CS-01-E17822
11
FROM: 01-E17822_D_2012.07.19
D1
D
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
ITEM PART NO. DESCRIPTION QTY.
1 02-E04020 (WBFC) BLOWER ELEC ASSY 1
2 26-F78354 NOZZLE FOR BLOWER 1
Assembly View
2
1
Section 12(WBFC) WAFER BLOWER
12-1
Section 13
Part NoDescriptionRevPage
01-E36201(WC83) WAFER CASSETTE ELEVATORB13-1
01-E10990(WC) CASSETTE PLATFORM (G2)A13-4
01-E10991(WC) PLATFORM BASE ASSY (G2)B13-5
01-E10988(WC) PLATFORM BASE (G2)D13-6
01-E18997(WC) CASSETTE PRESENT SNR ASSY (6 INCH)A13-7
01-E19000(WC) CASSETTE PRESENT SNR MECH ASSYA13-8
01-E18998(WC) CASSETTE PRESENT SNR ASSY (8 INCH)A13-9
01-E18999(WC) CASSETTE PRESENT SNR ASSY (12 INCH)A13-10
01-E19121(WCFC) SAFETY GUARD SOL ASSYB13-11
01-E19779(WCG2) Z- TRANSPORTERC13-12
01-E28759(WC) SAFETY GUARD ASSY_G2_NUB13-13
01-E28760(WC) SAFETY GUARD ASSY_NUI13-14