RS-1-Rev01PDFA.pdf - 第5页
42 . F EE DER BAN K COMP ON EN TS (5) .... .. ..... ... .... ..... ... ..... .. ..... .. ..... ..... .. ..... ... ..... ..... .. ..... .. ..... ..... .. ..... ..... ..... .. ..... ... ..... ..... . 83 フ ィー ダバンク 関係（５ ） 43…
20. ATC & CAL BLOCK COMPONENTS.............................................................................................................................. 39
ＡＴＣ・ＣＡＬ ブロック関係
21. PWB CONVEYOR COMPONENTS (1) .......................................................................................................................... 41
基板搬送関係（１）
22. PWB CONVEYOR COMPONENTS (2) .......................................................................................................................... 43
基板搬送関係（２）
23. PWB CONVEYOR COMPONENTS (3) .......................................................................................................................... 45
基板搬送関係（３）
24. PWB CONVEYOR COMPONENTS (4) .......................................................................................................................... 47
基板搬送関係（４）
25. PWB CONVEYOR COMPONENTS (5) .......................................................................................................................... 49
基板搬送関係（５）
26. PWB CONVEYOR COMPONENTS (6) .......................................................................................................................... 51
基板搬送関係（６）
27. PWB CONVEYOR COMPONENTS (7) .......................................................................................................................... 53
基板搬送関係（７）
28. PWB CONVEYOR COMPONENTS (8) .......................................................................................................................... 55
基板搬送関係（８）
29. PWB CONVEYOR COMPONENTS (9) .......................................................................................................................... 57
基板搬送関係（９）
30. AIR COMPONENTS........................................................................................................................................................ 59
エアー関係
31. ACCESSORIES PART COMPONENTS......................................................................................................................... 61
梱包添付品関係
OPTION
オプション
32. NOZZLE ASSEMBLY COMPONENTS ........................................................................................................................... 63
ノズルアッセンブリ関係
33. REAR MONITOR COMPONENTS.................................................................................................................................. 65
背面モニタ関係
34. VCS COMPONENTS ...................................................................................................................................................... 67
ＶＣＳ 関係
35. FCS COMPONENTS ...................................................................................................................................................... 69
ＦＣＳ 関係
36. TRAY HOLDER COMPONENTS .................................................................................................................................... 71
トレイホルダ関係
37. MINI SIGNAL TOWER COMPONENTS ......................................................................................................................... 73
ミニシグナルタワー関係
38. FEEDER BANK COMPONENTS (1)............................................................................................................................... 75
フィーダバンク関係（１）
39. FEEDER BANK COMPONENTS (2)............................................................................................................................... 77
フィーダバンク関係（２）
40. FEEDER BANK COMPONENTS (3)............................................................................................................................... 79
フィーダバンク関係（３）
41. FEEDER BANK COMPONENTS (4)............................................................................................................................... 81
フィーダバンク関係（４）
42. FEEDER BANK COMPONENTS (5) ............................................................................................................................... 83
フィーダバンク関係（５）
43. REPLACING OVERALL CHANGER TRUCK COMPONENTS(1) ..................................................................................85
一括交換台車関係（１）
44. REPLACING OVERALL CHANGER TRUCK COMPONENTS(2) ..................................................................................87
一括交換台車関係（２）
45. REPLACING OVERALL CHANGER TRUCK COMPONENTS(3) ..................................................................................89
一括交換台車関係（３）
46. REPLACING OVERALL CHANGER TRUCK COMPONENTS(4) ..................................................................................91
一括交換台車関係（４）
47. CONVEYOR EXTENTION COMPONENTS ................................................................................................................... 93
搬送延長関係
48. CONVEYOR COVER COMPONENTS ...........................................................................................................................95
搬送カバー関係
49. IFS-NX COMPONENTS..................................................................................................................................................97
ＩＦＳ−ＮＸ関係
50. ISM/MES COOPERATION COMPONENTS...................................................................................................................99
ＩＳＭ ／ ＭＥＳ 連携関係
51. SYSTEM DIAGRAM (1) ................................................................................................................................................ 101
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（１）
52. SYSTEM DIAGRAM (2) ................................................................................................................................................ 103
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（２）
53. SYSTEM DIAGRAM (3) ................................................................................................................................................ 105
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（３）
54. SYSTEM DIAGRAM (4) ................................................................................................................................................ 107
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（４）
55. SYSTEM DIAGRAM (5) ................................................................................................................................................ 109
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（５）
- 1 -
MAIN UNIT
本体
1. BASE FRAME COMPONENTS(1)
ベースフレーム関係（１）
66
13
14
10
8
11
9
67
12
6
13
7
20
4
3
21
72
16
71
74
73
15
69
68
64
65
34
33
32
31
30
29
55
60
62
57
56
58
50
49
45
47
46
48
24
22
36
35
38
39
37
26
53
29
30
31
32
33
29
30
31
32
33
34
34
43
44
51
52
42
41
59
61
23
25
29
31
34
32
30
33
44
63
5
17
19
18
27
21
40
28
19
18
54 70