SP-0073-001.pdf - 第19页

Key No. P AR T No. P AR T NAME Q’ty REMARKS NOTE 201 0919I00K TUBE D4 1 309190800U-001 Fig. G3 1002-001 Fig. G3-3 GS-NH100

Fig. G3-3

エア配管

Air Piping

1002-001

M-3ALU-4

CDUJB10-8S-F8NS

M-3ALU-4

CDUJB10-8S-F8NS

KQ2UD04-06

KQP-04

KQ2L08-01S

JNU6

From Main Body

Stocker Up/Down

See Fig. G3-2

Key No.101

201

Fig. G3

ノズルストッカ増設

(GS-NH100)

NOZZLE STOCKER ADDITION(GS-NH100)

Key No. PART No. PART NAME Q’ty

REMARKS

NOTE

201 0919I00K TUBE D4 1 309190800U-001

Fig. G3

1002-001

Fig. G3-3

GS-NH100

MEMO