SP-0073-001.pdf - 第31页
Key No. P AR T No. P AR T NAME Q’ty REMARKS NOTE 201 0919I00K TUBE D4 1 2091908207-001 Fig. I1 1002-001 Fig. I1-3 GS-NS100
Fig. I1-3
エア配管
Air Piping
1002-001
From Main Body
Stocker Up/Down
201
See Fig. I1-2
Key No.121
See Fig. I1-2
Key No.125
Fig. I1
中異形ノズルストッカ増設
(GS-NS100)
MIDDLE SIZE ODD-SHAPED NOZZLE ADDITION(GS-NS100)
Key No. PART No. PART NAME Q’ty
REMARKS
NOTE
201 0919I00K TUBE D4 1 2091908207-001
Fig. I1
1002-001
Fig. I1-3
GS-NS100
MEMO