松下NPM-D3^D3A操作说明书.pdf - 第559页
NPM- D3 EJM6DC-MB-07O-01 7-1-2 -4 3 16 16 -80 -100 0 12 12 -80 -100 0 8 8 -84 -100 0 2 2 -90 -100 0 L W OK 0.0 0.0 150.0 (2/2)
NPM-D3 EJM6DC-MB-07O-01
2
2
7-1-2
7-1-2
-3
2
( ) [mm/s]
( 2 )
2 2
10
3.0 100.0
2
( ) [mm/s]
( 2 )
2
2
5
3.0 100.0
2 1
[mm/s]
( 2 )
2
1
5
3.0 100.0
[%]
20
0.1 100.0
[%]
8 2
20
1.0 100.0
[ ]
0
0 200
(1/2)
[mm]
1
0.01 1.50
[mm]
1.5
0.01 1.50
XY (2/2)
NPM-D3 EJM6DC-MB-07O-01
7-1-2
-4
3
16
16
-80
-100 0
12
12
-80
-100 0
8
8
-84
-100 0
2
2
-90
-100 0
L W
OK
0.0
0.0
150.0
(2/2)
NPM-D3 EJM6DC-MB-07O-01
7-1-2
4
3
7-1-2
-5
Y
[mm]
Y
1.00
1.00
5.00
[mm]
: 6 m
1 : 8 mm
1000.0
500.0
3000.0
( )
ON
- -
[ ]
- -
[ ]
5
2 10
(1/4)
[mm]
5
0 20
[ / ]( 1)
( 1)
0
0 20
[ / ]( 2)
( 2)
0
0 20
[mm]
0
0 100