yvp-e.pdf - 第4页
2 Maintenance P arts ■ R-Axis ■ SY -Axis 1 3 2 No. Part No. Part Name Q'ty Remarks Rank 1 KW3-M3172-00X BEL T 1 A 2 KW3-M653A-10X SENSOR,1-1 ASSY 1 B 3 90K55-41070R AC SER VO MOTOR 1 B 1 1 1 5 5 4 2 5 5 1 1 3 No. Pa…
1
Maintenance Parts
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Base
■
Top Cover
No. Part No. Part Name Q'ty Remarks Rank
1 KG2-M8582-40X VALVE 9 Spare B
2 KG7-M8501-40X AIR FILTER ELEMENT 1 Spare A
3 KG7-M8502-40X MIST FILTER ELEMENT 1 Spare A
4 KG7-M8501-00X AIR FILTER 1 /
5 KG7-M8502-00X AIR FILTER 1 /
1
4
2
5
3
1
No. Part No. Part Name Q'ty Remarks Rank
1
KW3-M1354-10X FLUORESCENT LAMP 1 10W A
KW3-M1354-30X GLOW TUBE 1 FG-7E A
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Maintenance Parts
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R-Axis
■
SY-Axis
1
3
2
No. Part No. Part Name Q'ty Remarks Rank
1 KW3-M3172-00X BELT 1 A
2 KW3-M653A-10X SENSOR,1-1 ASSY 1 B
3 90K55-41070R AC SERVO MOTOR 1 B
1
1
1
5
5
4
2
5
5
1
1
3
No. Part No. Part Name Q'ty Remarks Rank
1 KW3-M2619-01X CYLINDER,MASK 4 B
2 KW3-M2621-00X SIDE CLAMPER,MASK 1 C
3 KW3-M653A-10X SENSOR,1-1 ASSY 2 B
4 90K56-871743 AC SERVO MOTOR 1 B
5 KL0-M655G-30X SENSOR,1-4 ASSY 4 Mask Clamp Cylinder Sensor B
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Maintenance Parts
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SZ-axis
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XY-axis
2
3
1
4
5
3
6
No. Part No. Part Name Q'ty Remarks Rank
1 KHT-M9116-00X BELT(501-3GT-9) 1 A
2 KW3-M2221-00X SPRING 1 1 A
3 KW3-M2229-01X SPG 2 2 A
4 KW3-M653A-10X SENSOR,1-1 ASSY 1 SZ-Axis Origin Sensor B
5 90K55-523784 AC SERVO MOTOR 1 B
6 KG2-M8582-40X VALVE 2 Spare B
1
1
2
3
No. Part No. Part Name Q'ty Remarks Rank
1 KW3-M653A-01X SENSOR,1-1 ASSY 4 X,Y-Axis Origin Sensor B
2 90K56-87174Y AC SERVO MOTOR 1 B
3 90K56-87175X AC SERVO MOTOR 1 B