yvp-e.pdf - 第5页
3 Maintenance P arts ■ SZ-axis ■ XY -axis 2 3 1 4 5 3 6 No. Part No. Part Name Q'ty Remarks Rank 1 KHT -M9116-00X BEL T(501-3GT -9) 1 A 2 KW3-M2221-00X SPRING 1 1 A 3 KW3-M2229-01X SPG 2 2 A 4 KW3-M653A-10X SENSOR,1…
2
Maintenance Parts
■
R-Axis
■
SY-Axis
1
3
2
No. Part No. Part Name Q'ty Remarks Rank
1 KW3-M3172-00X BELT 1 A
2 KW3-M653A-10X SENSOR,1-1 ASSY 1 B
3 90K55-41070R AC SERVO MOTOR 1 B
1
1
1
5
5
4
2
5
5
1
1
3
No. Part No. Part Name Q'ty Remarks Rank
1 KW3-M2619-01X CYLINDER,MASK 4 B
2 KW3-M2621-00X SIDE CLAMPER,MASK 1 C
3 KW3-M653A-10X SENSOR,1-1 ASSY 2 B
4 90K56-871743 AC SERVO MOTOR 1 B
5 KL0-M655G-30X SENSOR,1-4 ASSY 4 Mask Clamp Cylinder Sensor B
3
Maintenance Parts
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SZ-axis
■
XY-axis
2
3
1
4
5
3
6
No. Part No. Part Name Q'ty Remarks Rank
1 KHT-M9116-00X BELT(501-3GT-9) 1 A
2 KW3-M2221-00X SPRING 1 1 A
3 KW3-M2229-01X SPG 2 2 A
4 KW3-M653A-10X SENSOR,1-1 ASSY 1 SZ-Axis Origin Sensor B
5 90K55-523784 AC SERVO MOTOR 1 B
6 KG2-M8582-40X VALVE 2 Spare B
1
1
2
3
No. Part No. Part Name Q'ty Remarks Rank
1 KW3-M653A-01X SENSOR,1-1 ASSY 4 X,Y-Axis Origin Sensor B
2 90K56-87174Y AC SERVO MOTOR 1 B
3 90K56-87175X AC SERVO MOTOR 1 B
4
Maintenance Parts
■
Head
■
Cleaner Base
2
2
3
3
4
4
1
1
No. Part No. Part Name Q'ty Remarks Rank
1 KW3-M7104-00X CYLINDER, SQZ 2 B
2 KW3-M653B-01X LOAD-CELL ASSY 2 B
3
KW3-M7126-00X SQUEEGEE,M 2 A
KGJ-M7163-03X METAL SQG, 185 2 L=185 for METAL SQG A
KGJ-M7173-03X METAL SQG, 350 2 L=350 for METAL SQG A
4 KW3-M653C-00X SENSOR,3-1 ASSY 4 B
1
2
3
4
No. Part No. Part Name Q'ty Remarks Rank
1 KW3-M653H-00X SENSOR,7-1 ASSY 1 B
2 KW3-M653J-00X CHANGE,PN ASSY 1 B
3 KW3-M3763-01X BOTTLE 1 C
4 90990-22J016 PACKING 1 C