P-310-004(2_2)e.pdf - 第18页
MEMO
Key No. PART No. PART NAME Q’ty
REMARKS
NOTE
201 0919I00K TUBE D4 1 2091908207-001
Fig. I1
1007-001
Fig. I1-3
SIGMA-G5SA
SIGMA-G5SB
SIGMA-G5SC
SIGMA-G5SD
UNIT-8
Fig. I1
STOCKER
MEMO
ࡁ࠭࡞ࠬ࠻࠶ࠞㇱFig. J2
Nozzle Stocker Section
ࡋ࠶࠼ㇱFig. J1
Head Section
1007-003
UNIT-9: MULTI-FUNCTIONAL HEAD, NOZZLE STOCKER SECTION
MULTI-FUNCTIONAL HEAD, NOZZLE STOCKER SECTION