m330_01_gas_cabinet气柜.pdf.pdf

Gas cabinet Reference Manual Tempress ® Systems, Inc. Gas cabinet manual M330_01 Janu ary 2004

Gas cabinet Reference Manual

Tempress

Systems, Inc.

Gas cabinet manual

M330_01 January 2004

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TABLE OF CONTENTS

Table of contents

1. Introduction .......................................................................1-1

1.1 Scope of the manual ................................................................. 1-1

1.2 Overview................................................................................... 1-1

2. Gas System........................................................................2-1

2.1 Gassystem parts....................................................................... 2-3

2.2 Electronics .............................................................................. 2-14

2.3 Processes ............................................................................... 2-14

3. Installation .........................................................................3-1

3.1 Unpacking................................................................................. 3-1

3.2 Inspection ................................................................................. 3-2

3.3 The gas cabinet ........................................................................ 3-2

4. Start Up ..............................................................................4-1

4.1 Introduction ............................................................................... 4-1

4.2 Prerequisites............................................................................. 4-1

4.3 Gas Cabinet start up................................................................. 4-1

5. Maintenance.......................................................................5-1

5.1 Introduction ............................................................................... 5-1

5.2 Leak-checks.............................................................................. 5-1

5.2.1 Helium Leak check .................................................... 5-1

5.2.2 Pressure Leak-check ................................................. 5-2

5.3 Disassembly and cleaning of MFC’s ......................................... 5-2

5.4 Disassembly and Cleaning of all flowmeters............................. 5-2

5.5 Preventive maintenance Gassystem......................................... 5-3

5.6 Preventive maintenance processes .......................................... 5-5

6. Trouble shooting ...............................................................6-1

GAS CABINET REFERENCE MANUAL

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