m330_01_gas_cabinet气柜.pdf.pdf - 第4页
LIST OF FIGURES List of figures Figure 1-1 Tempress L- shaped Gascabi net ............................................ 1-1 Figure 2-1 Source gas pr essure adju stment ........................................... 2-3 Figur…
TABLE OF CONTENTS
Table of contents
1. Introduction .......................................................................1-1
1.1 Scope of the manual ................................................................. 1-1
1.2 Overview................................................................................... 1-1
2. Gas System........................................................................2-1
2.1 Gassystem parts....................................................................... 2-3
2.2 Electronics .............................................................................. 2-14
2.3 Processes ............................................................................... 2-14
3. Installation .........................................................................3-1
3.1 Unpacking................................................................................. 3-1
3.2 Inspection ................................................................................. 3-2
3.3 The gas cabinet ........................................................................ 3-2
4. Start Up ..............................................................................4-1
4.1 Introduction ............................................................................... 4-1
4.2 Prerequisites............................................................................. 4-1
4.3 Gas Cabinet start up................................................................. 4-1
5. Maintenance.......................................................................5-1
5.1 Introduction ............................................................................... 5-1
5.2 Leak-checks.............................................................................. 5-1
5.2.1 Helium Leak check .................................................... 5-1
5.2.2 Pressure Leak-check ................................................. 5-2
5.3 Disassembly and cleaning of MFC’s ......................................... 5-2
5.4 Disassembly and Cleaning of all flowmeters............................. 5-2
5.5 Preventive maintenance Gassystem......................................... 5-3
5.6 Preventive maintenance processes .......................................... 5-5
6. Trouble shooting ...............................................................6-1
GAS CABINET REFERENCE MANUAL
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LIST OF FIGURES
List of figures
Figure 1-1 Tempress L-shaped Gascabinet ............................................ 1-1
Figure 2-1 Source gas pressure adjustment ........................................... 2-3
Figure 2-2 LPCVD Gaspanel and components ....................................... 2-4
Figure 2-3 Mass Flow Controller example............................................... 2-6
Figure 2-4 Mini and micro inline gas filter................................................ 2-7
Figure 2-5
Flowmeter .............................................................................. 2-7
Figure 2-6 SMC digital pressure switch................................................... 2-8
Figure 2-7 Photohelic with high and low alarm limits............................... 2-8
Figure 2-8 Schumacher ATCS bubbler system ....................................... 2-9
Figure 2-9 Coldtrap (small design) ........................................................ 2-12
Figure 2-10 Cooling Spiral tube with Ammonium chloride (NH
4
Cl) deposit2-
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GAS CABINET REFERENCE MANUAL
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INTRODUCTION
1.Introduction
1.1 Scope of the manual
This manual explains how to install, adjust or maintain the Tempress Systems Inc. gascabinet,
including its gassystem and all peripheral equipment and parts descriptions. For technical
instructions and descriptions concerning the DPC refer to the DPC reference manual
(M410.00). Before starting up, installing, operating and/or maintaining the complete gascabinet
it is mandatory to read this manual first.
1.2 Overview
The gascabinet is part of the Tempress Systems Inc. diffusion furnace. It contains all process
gas facilities as well as the Digital Process Controller (DPC) and peripheral equipment. The
standard L-shape cabinet can be replaced by a backmounted cabinet in case of limited space.
Normally the gascabinet will be placed in the grey-room.
unted cabinet in case of limited space.
Normally the gascabinet will be placed in the grey-room.
Place for
Peripheral equipment
Process gas facilities
DPC
Figure 1-1 Tempress L-shaped Gascabinet
The Tempress Systems Gas cabinets are designed for easy access to all components and
shielded with Plexiglas doors, see Figure 1-1. The cabinets are made of heavy gauge steel with
a polyurethane finish. The gas cabinet is exhausted through the full height of the cabinet. The
space saving vertically mounted gassystems offer additional space for accessory units, such as
external torch and bubbler systems, and easy tube exchange from the rear. The flexible gas
cabinet design, in combination with the small footprint furnaces, makes the Tempress
Systems furnaces adaptable to most cleanroom layouts.
GAS CABINET REFERENCE MANUAL
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