m330_01_gas_cabinet气柜.pdf.pdf - 第3页

TABLE OF CONTENTS Table of contents 1. Introduction ....................................................................... 1-1 1.1 Scope of the manual ................................................................. 1-…

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TABLE OF CONTENTS

Table of contents

1. Introduction .......................................................................1-1

1.1 Scope of the manual ................................................................. 1-1

1.2 Overview................................................................................... 1-1

2. Gas System........................................................................2-1

2.1 Gassystem parts....................................................................... 2-3

2.2 Electronics .............................................................................. 2-14

2.3 Processes ............................................................................... 2-14

3. Installation .........................................................................3-1

3.1 Unpacking................................................................................. 3-1

3.2 Inspection ................................................................................. 3-2

3.3 The gas cabinet ........................................................................ 3-2

4. Start Up ..............................................................................4-1

4.1 Introduction ............................................................................... 4-1

4.2 Prerequisites............................................................................. 4-1

4.3 Gas Cabinet start up................................................................. 4-1

5. Maintenance.......................................................................5-1

5.1 Introduction ............................................................................... 5-1

5.2 Leak-checks.............................................................................. 5-1

5.2.1 Helium Leak check .................................................... 5-1

5.2.2 Pressure Leak-check ................................................. 5-2

5.3 Disassembly and cleaning of MFC’s ......................................... 5-2

5.4 Disassembly and Cleaning of all flowmeters............................. 5-2

5.5 Preventive maintenance Gassystem......................................... 5-3

5.6 Preventive maintenance processes .......................................... 5-5

6. Trouble shooting ...............................................................6-1

GAS CABINET REFERENCE MANUAL

III

LIST OF FIGURES

List of figures

Figure 1-1 Tempress L-shaped Gascabinet ............................................ 1-1

Figure 2-1 Source gas pressure adjustment ........................................... 2-3

Figure 2-2 LPCVD Gaspanel and components ....................................... 2-4

Figure 2-3 Mass Flow Controller example............................................... 2-6

Figure 2-4 Mini and micro inline gas filter................................................ 2-7

Figure 2-5

Flowmeter .............................................................................. 2-7

Figure 2-6 SMC digital pressure switch................................................... 2-8

Figure 2-7 Photohelic with high and low alarm limits............................... 2-8

Figure 2-8 Schumacher ATCS bubbler system ....................................... 2-9

Figure 2-9 Coldtrap (small design) ........................................................ 2-12

Figure 2-10 Cooling Spiral tube with Ammonium chloride (NH

Cl) deposit2-

GAS CABINET REFERENCE MANUAL