SP18 Mechanical.pdf - 第78页
8-C マスククリーニングユニット Mask Cleaning Unit パーツレイアウト Ki t N o . キット 品番 Kit N am e キット名称 N610027799AA ｾｸｼｮﾝNo. PARTS LAYOUT Section No. - - M63 ( KN610027799AA-25-3 )
Ref
No.
Remarks
R
1
Q'ty
8-B
マスククリーニングユニット
Mask Cleaning Unit
ｲﾗｽﾄ
No.
Part No.
品 名品番 数量
R
2
パーツリスト
Kit N
o
.
キット品
番
Kit Name
キット名称
N610027799AA
Part Name
備 考
ｾｸｼｮﾝNo.
PARTS LIST
Section No.
R
3
MANIFOLD
1
5 N210042618AA
Simplicity Making to detaching
1
6 N610097100AB
PLATE
1
8 N210041926AE
JOINT
2
10 N210158590AA
BLOCK
2
11 N210041929AB
BRACKET
1
24 N210054971AB
BRACKET
1
40 N210055858AA
BRACKET
1
41 N210055859AA
BRACKET
1
42 N210041974AA
GUIDE
1
43 N210041971AE
BRACKET
1
44 N210055860AA
BRACKET
1
45 N210055861AA
Sensor
1
54 N610026843AA Sensor:-B1011
CYLINDER
1
55 N610026841AA Limit Switch:-B1007-B1010
CYLINDER
1
58 N510015455AA SSD-L-16-15-N
JOINT
4
59 N510021104AA PL4-M5M-0.3
JOINT
3
64 N510011177AA KQ2S16-04S
JOINT
1
65 N431KQ2U1600 KQ2U16-00
JOINT
2
66 N510015459AA KQ2V16-04S
LINEAR-WAY
2
67 N510016065AA SRS9MUU+55LM(01871092K000)
PIN
1
74 KXF0CXLAA00 1017003-30010
BOLT
2
108 N510017305AA
Hexagon socket head cap screw M3X10-10.9 A2J (Trivalent)
BOLT
12
109 N510017308AA
Hexagon socket head cap screw M3X12-10.9 A2J (Trivalent)
BOLT
4
112 N510017376AA
Hexagon socket head cap screw M4X6-10.9 A2J(Trivalent)
BOLT
8
113 N510017381AA
Hexagon socket head cap screw M4X8-10.9 A2J (Trivalent)
BOLT
8
114 N510017344AA
Hexagon socket head cap screw M4X10-10.9 A2J (Trivalent)
BOLT
16
115 N510017346AA
Hexagon socket head cap screw M4X12-10.9 A2J (Trivalent)
BOLT
2
119 N510017364AA
Hexagon socket head cap screw M4X35-10.9 A2J (Trivalent)
BOLT
4
122 N510017395AA
Hexagon socket head cap screw M5X16-10.9 A2J (Trivalent)
WASHER
29
128 N510018497AA
Round finish plain washer 4 10H A2J (Trivalent)
WASHER
2
132 N510018478AA
Small round-plain washer 3 10H A2J (Trivalent)
WASHER
6
135 N510020099AA Thick washer for M4
WASHER
2
137 N510018327AA Spring lock washer No.2 3 S A2J (Trivalent)
WASHER
2
138 N510018330AA Spring lock washer No.2 4 S A2J (Trivalent)
COVER
1
145 N210048715AA
JOINT
2
149 KXF029GAA00 KJH04-00
BRACKET
1
170 N210046326AA
M62
--
( KN610027799AA-25-2 )
8-C
マスククリーニングユニット
Mask Cleaning Unit
パーツレイアウト
Ki
t
N
o
.
キット
品番
Kit Name
キット名称
N610027799AA
ｾｸｼｮﾝNo.
PARTS LAYOUT
Section No.
--
M63
( KN610027799AA-25-3 )
Ref
No.
Remarks
R
1
Q'ty
8-C
マスククリーニングユニット
Mask Cleaning Unit
ｲﾗｽﾄ
No.
Part No.
品 名品番 数量
R
2
パーツリスト
Kit N
o
.
キット品
番
Kit Name
キット名称
N610027799AA
Part Name
備 考
ｾｸｼｮﾝNo.
PARTS LIST
Section No.
R
3
PIPE
1
21 N210041954AA
HOUSING
1
23 N210041956AA
PLATE
1
32 N210041964AD
BRACKET
1
34 N210025508AA
BRACKET
1
35 N210025509AA
BRACKET
1
36 N210054975AB
PW004A0
2
37 KXFB01CCA00
BRACKET
1
38 KXFB0056A00
TANK
1
48 N610027765AA
SOCKET
2
49 N610014951AA
FILTER
1
50 N610009394AA
Sensor
1
57 N610026818AA Sensor:-B1015
JOINT
3
77 N510001107AA L4N6X4-PT1/8ST
FILTER
1
83 N510011193AA VBLF-003
BAND
2
84 N510011271AA G-12
PUMP
1
85 N510057387AA PB1013A-01-C-X31
JOINT
1
86 KXF0DYT5A00 KQ2H04-01S
PLATE
2
87 KXF05EMAA00 GP5-1
JOINT
1
88 N510028804AA PPC8-01
JOINT
1
89 N510028806AA PPV8
NIPPLE
2
91 N510019624AA (Ni)1
JOINT
2
92 N510019630AA (SL)1
HOSE
1
93 N510011280AA TAC Eco Duct D38
BAND
8
94 N510060518AA SB-50
C-RING
1
95 KXF04CVAA00 STW-16
COUPLER
1
96 N510015357AA MC10SF-304
COUPLER
1
97 N510015358AA MC10PM-304
BUSH
1
98 KXF0DX89A00 KG-032
BUSH
1
99 KXF0DX89A00 KG-032
BOLT
4
111 N510017316AA
Hexagon socket head cap screw M3X20-10.9 A2J (Trivalent)
BOLT
2
113 N510017381AA
Hexagon socket head cap screw M4X8-10.9 A2J (Trivalent)
BOLT
4
121 N510017390AA
Hexagon socket head cap screw M5X12-10.9 A2J (Trivalent)
BOLT
5
122 N510017395AA
Hexagon socket head cap screw M5X16-10.9 A2J (Trivalent)
BOLT
2
126 N510017472AA
Hexagon socket head cap screw M8X20-10.9 A2J (Trivalent)
WASHER
2
128 N510018497AA
Round finish plain washer 4 10H A2J (Trivalent)
WASHER
14
129 N510018499AA
Round finish plain washer 5 10H A2J (Trivalent)
WASHER
4
134 N510020098AA Thick washer for M3
WASHER
2
136 N510020102AA Thick washer for M8
TRIM
1
140 KXF0DULAA00 CE-024
TRIM
2
141 KXF0DUUAA00 CE-016
Valve
1
147 N610026816AC Valve:-F4021
BOLT
4
148 N510017372AA
Hexagon socket head cap screw M4X5-10.9 A2J (Trivalent)
BOLT
10
152 N510017419AA
Hexagon socket head cap screw M5X8-10.9 A2J (Trivalent)
BRACKET
1
157 N210054977AA
JOINT
1
164 KXF02T2AA00 M-5AN-6
WASHER
5
171 N510020100AA Thick washer for M5
HOSE
1
172 N510011280AA TAC Eco Duct D38
Process Pump Kit
1
176 N610122645AA
OIL-PAN
1
177 N210147735AA
M64
--
( KN610027799AA-25-3 )