00195963-03_MM SWS-EN.pdf - 第12页
Wear Part s Item number Vacuum p late compl. DLM/R - lig htbeig e Part o f Serv icebox 03037984 - 03 Sealing unit Part of Servicebox [003875 80 - 01] O- Ring 5 X 2 NBR Waf ersupport Part of Servicebox [030734 57S01…
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Tools and Equipment
Have the following tools and equipment to hand before you start the maintenance:
Tools and Equipment
Item number
Waste bin
Vacuum cleaner
Collecting container
Brush
Set hexagon ball-point angle screwdriver
e.g. 00376492-01
Set Hexagon socket head cap screw driver (0,7 - 2,0 mm)
00320265-01
Laboratory gloves (cotton)
00359087-02
Protective latex gloves
00372972-01
Service Box SWS (for Siplace CA)
00519790-01 or
00388421-01
Consumables and Wearparts
Have the following consumables to hand before you start the maintenance:
Consumables
Item number
Lint-free cloths
cleaning buds, lint-free
in Service Box SWS
00352931-02
SIPLACE cleaning tissue
00315253-02
Lens cloth / optical cloth
Ethyl alcohol
Compressed air
Oil dispenser with Structovis GHD
00367071-01
Multipette plus 4981 data sheet 613-3669 T22
00386154-01
Combitips Plus 0.2 ml blue T22
03070440-01
Lubcon Thermoplex ALN 1001/00 50 ml (blue) C10
03078556-01
Fin Grease spray grease (aerosol)
03020782-01
DIN A 3 paper
Have the following wear parts to hand before you start the maintenance:
Wear Parts
Item number
Vacuum plate compl. DLM/R-lightbeige
Part of Servicebox
03037984-03
Sealing unit
Part of Servicebox
[00387580-01]
O-Ring 5 X 2 NBR Wafersupport
Part of Servicebox
[03073457S01]
Vacuumpump Sound Absorber U-1/8 (Festo)
[03050536-01]
Sparepart set Vacuum pump
Part of Servicebox
[03079140-0]
Fuse SMD Flip-Chip F1 - 24V/3AT
[03078645-01]
Fuse SMD Wafertable F1 - 24V/2AT
[03078644-01]
Fuse SMD Wafertable F2 - 5V/0,5A-FF
[03078647-01]
Fuse SMD Waferlift 24V - 3AT
[03078645-01]
Fuse SMD Supply F1 - 24V - 3AT
[03078645-01]
Fuse SMD Supply F2 - 5V/1AT
[03078643-01]
Micro Fuse Waferheating 6,3AT (Glas)
[03078846-01]
Important Points to Note when Carrying out Maintenance Work
The given maintenance intervals for checking and exchanging the filter elements are valid for the
specified compressed air quality only (see the compressed air specifications in the User Manual
[00195941-xx]). If other qualities are used, the maintenance intervals should be shortened accord-
ingly.
CAUTION
It is strictly prohibited, to clean any modules within the SWS by means of compressed air.
Enter the completed maintenance work in the maintenance schedule. We recommend that you
carry out the jobs in the order given in the maintenance schedule.
Before Carrying out Maintenance Work
Unless stated differently for the individual tasks, proceed as follows:
Shut down the placement machine and the SWS properly and switch them off.
Secure the placement machine and the SWS against unauthorized reactivation.
Make the required modules of the SWS accessible (See ”Opening and Closing the Interior of
the SWS” on page - 14.).
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After Completing the Maintenance Work
Close all protective covers of the placement machine and all previously opened modules of
the SWS (See ”Opening and Closing the Interior of the SWS” on page - 14.).
Remove the devices against unauthorized reactivation.
Switch on the SWS and the placement machine.
Opening and Closing the Interior of the SWS
Opening and Closing the Protective Covers of the Placement Machine
Open the relevant protective cover of the placement machine, to make the interior of the SWS
accessible from above.
Carry out the necessary maintenance work and close the protective cover.
Swiveling out the Magazine Lift
For maintenance work on modules that cannot be accessed from above, it is necessary to make
the interior of the SWS accessible via the front.
CAUTION
Make absolutely sure that the supporting foot of the SWS is swung out to the side, before you
swivel open the magazine lift. Otherwise you risk that the magazine lift may tilt.
Swing the support foot of the SWS out to the side.
Open the lower door of the magazine lift using the machine key.