00195963-03_MM SWS-EN.pdf - 第2页
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SIPLACE Wafer System
Maintenance Manual
Ed. 03/2021 EN
All names identified by ® are registered trademarks of the ASM Assembly Systems GmbH & Co. KG. The remaining trademarks in this publication
may be trademarks whose use by third parties for their own purposes could violate the rights of the owner.
We have reviewed the contents of this publication to ensure consistency with the hardware and software described. Since variance cannot be
precluded entirely, we cannot guarantee full consistency.
However, the information in this publication is reviewed regularly and any necessary corrections are included in subsequent editions.
Copyright © ASM Assembly Systems Technical data subject to change
ASM Assembly Systems GmbH& Co. KG
Rupert-Mayer-Strasse 44
81379 München
Germany
www.asm-smt.com
Item no.: 00195963-03
Printed by ASM Assembly Systems
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Table of Contents
Containment of Service Box SWS (00519790-01) ....................................................... 10
Tools and Equipment .................................................................................................... 11
Consumables and Wearparts ....................................................................................... 11
Important Points to Note when Carrying out Maintenance Work .............................. 12
Before Carrying out Maintenance Work .................................................................................................... 12
After Completing the Maintenance Work .................................................................................................. 13
Opening and Closing the Interior of the SWS .......................................................................................... 13
Using the Multipette .................................................................................................................................... 15
Overview of the Modules of the SWS .......................................................................... 20
Maintenance Schedule.................................................................................................. 22
Maintenance Schedule According to Intervals ........................................................................................ 22