SM321 Technical Reference_Ver3.pdf - 第37页

Page SAMSUNG TECHWIN 37 SM321 H ea d As s’y _4 Spi nd le P a r t L i s t NO. LEVEL PART NO. PART NAME Q'TY TYPE Old No. Stock 1 J90551071A HEAD_ASSY_4SPINDLE J90551071A 1 J90551071A 2 ..2 J90831189A R12_STEP_MOTOR_C…

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SAMSUNG TECHWIN
36
SM321
Head Ass’y_4Spindle (4/4)
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38
11- B
11- A
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SAMSUNG TECHWIN
37
SM321
Head Ass’y_4Spindle
P art L is t
NO. LEVEL PART NO. PART NAME Q'TY TYPE Old No. Stock
1 J90551071A HEAD_ASSY_4SPINDLE J90551071A
1
J90551071A
2 ..2 J90831189AR12_STEP_MOTOR_CABLE_ASSY[SM21-MD038]
1
SM21-MD038
○
No.4 at 102 page
3 ..2 J9083179A SIDE ILL U/D SENSOR CABLE ASSY[SM21-HD00
1
SM21-HD006
○
No.6 at 92 page
4 ..2 J90831009A R34_MOTOR_CABLE_ASSY
1
SM21-MD039
○
5 ..2 J90800829B SWING MOTOR CABLE ASSY
1
SM_MD032
○
6 ..2 J9080823A Z1 MOTOR CABLE ASSY[SM_MD026]
1
SM_MD026
○
7 ..2 J9080824A Z2 MOTOR CABLE ASSY[SM_MD027]
1
SM_MD027
○
8 ..2 J9080825A TIMING BELT[384-1.5GT-9]
1
SM_MD028
○
9 ..2 J9080826A Z4 MOTOR CABLE ASSY[SM_MD029]
1
SM_MD029
○
○
10 ..2 J90601021A SM321E_VACUUM_SENSOR_BOARD VER 1.1
1
VER 1.1
11 ..2 J90551068B AIR_MODULE
1
J90551068B
11-A ...3 J6711261A ONE TOUCH FITTING[FSC04-M5C]
4
FSC04-M5C
○
11-B ...3 J6711260A ONE TOUCH FITTING[FSE04-M5C]
2
FSE04-M5C
○
11-C ...3 J6705009A SILENCER[AS-5]
1
AS-5
○
12 ...3 J6702048A SOLENOID VALVE[VA01PEP34-1U-F]
4
SM21-HI001
○
13 ...3 J6711262A MINI FITTING[BC-03-M5]
4
BC-03-M5
○
14 ...3 J6703039A SPEED CONTROLLER[SPR-Z-M3N]
2
SPR-Z-M3N
○
15 ...3 J6711263A MINI FITTING[BE-04-M3]
2
BE-04-M3
○
16 ...3 J67081010A ATMOSPHERIC_FILTER LF-M3-Z07-021
4
LF-M3-Z07-021
○
17 ...3 J9058090A FILTER ASSY[J9058090A]
4
J9058090A
○
18 ..2 J7458002A FILTER ELEMENT[LF-M5-60-Z-ELEMENT]
6
LF-M5-60-Z-ELEMENT
○
19 ...3 J6702049A SOLENOID VALVE[RCS242-M3-D24NP]
1
RCS242-M3-D24NP
○
20 ..2 J9055357A PULLEY ASSY (Z-AXIS 2)
4
J9055357A
○
21 ..2 J9055209A COMMON NOZZLE HOLDER ASSY[J9055209A]
4
J9055209A
○
22 ..2 J90551013A MIRROR_ASSY
1
J90551013A
23 ...3 J90551011A SIDE_ILLUM_GUIDE
2
J90551011A
○
24 ..2 J90551009A MIRROR_ARM-R_ASSY
1
J90551009A
○
Reference
Page
SAMSUNG TECHWIN
38
SM321
Head Ass’y_4Spindle
Reference
P art L is t
NO. LEVEL PART NO. PART NAME Q'TY TYPE Old No. Stock
25 ..2 J90551008A MIRROR_ARM-L_ASSY
1
J90551008A
○
26 ..2 J7055542C BALL SPLINE[J7055542C]
4
J7055542C
○
27 ...3 J6611017A BALL SPLINE[WSPFL6H200CM/A]
1
WSPFL6H200CM/A
○
28 ..2 J70551001A BELT_CLAMP1
4
J70551001A
○
29 ..2 J70551002A BELT_CLAMP2
4
J70551002A
○
30 ..2 J7055548A SPRING[J7055548A]
4
J7055548A
○
31 ..2 J7455026A SPRING BUSH[J7455026A]
2
J7455026A
○
32 ..2 J6602076A TIMING BELT[384-1.5GT-9]
4
384-1.5GT-9
○
33 ..2 J6602077A TIMING BELT[236-2GT-4]
2
236-2GT-4
○
34 ..2 J6602078A TIMING BELT[255-3GT-6]
1
255-3GT-6
○
35 ..2 J6607055A LM GUIDE [LWLG7C1R140BT1H]
4
LWLG7C1R140BT1H
○
36 ..2 J6711156A HOSE NIPPLE [M-5H-4](D/C용)
1
M-5H-4
○
37 ..2 J6711180B ROTARY JOINT[RC3-M5M-STN]
4
RC3-M5M-STN
○
38 ..2 J6713022B COIL TUBE(POLYURETHANE) [J6713022B]
4
J6713022B
○
39 ..2 J9083173A HEAD SIDE/OUTER ILL CABEL ASSY[SM21-HI00
1
SM21-HI001
○
No.1 at 91 page
40 ..2 J9083176A HEAD IO/ILL POWER CABLE ASSY[SM21-HD001]
1
SM21-HD001
○
No.2 at 91, 92 page
41 ..2 J90831242A FLAT_FIDUCIAL_CAMERA_CABLE_ASSY SM21E-VI
1
SM21E-VIS006
42 ..2 J90830177B SIDE ILL UP/DN SOL CABLE ASSY SM21-HD002
1
SM21-HD002
○
No.1 at 91 page
43 ..2 J9083172A HDIO-HILL CAN CABLE ASSY[SM21-CA006]
1
SM21-CA006
○
No.3 at 91, 92 page
44 ..2 J90831239A R_STEP_MOTOR_POWER_CABLE_ASSY SM21E-MD03
1
SM21E-MD033
○
No.1 at 102 page
45 ..2 J90800710D FLY CAM PWR/SYNC EXT CABLE ASSY SM-VIS00
1
SM-VIS008
46 ..2 J90831235A FLY_CAM_SIGNAL_CABLE_ASSY SM21E-VIS010
1
SM21E-VIS010
47 ..2 J90831236A HEAD_BLOW_SOL_CABLE_ASSY SM21E-HD012
1
SM21E-HD012 No.1 at 93 page
48 ..2 J90831237A HEAD_VACUUM_SOL_CABLE_ASSY SM21E-HD011
1
SM21E-HD011 No.2 at 93 page
49 ..2 J9083181A HEAD VAC SENSOR CABLE ASSY[SM21-HD009]
1
SM21-HD009
○
No.3 at 93 page
50 ..2 J9083185A SW HOME SENSOR CABLE ASSY[SM21-HD014]
1
SM21-HD014
○
○
No.4 at 92 page
51 ..2 J90831233A R_HOME_SENSOR_CABLE_ASSY SM21E-HD013
1
SM21E-HD013 No.5 at 92 page