FF35-CT_Brochure_en-LR.pdf - 第5页
2 Granit -based manipulator - S mallest th ermal exp ansion an d high sta bilit y of temperature - V ibr ation isol ation from the s ystem by acti ve dampe rs - H igh - precisi on Heid enhain enc oder o n all axes - 6 a …
Based on the Yxlon system software Geminy which offers
easy, intuitive operation with touch screens and graphical
user interface, the FF35 CT / FF35 CT Metrology provide
numerous special features. The users benefit from
unrivaled image quality, utmost flexibility regarding the
bandwidth of applications, and compact cabinet design.
Various automated functions help to save time. Different
user levels support unskilled operators as well as
experienced experts to achieve optimum results in their
inspection tasks. Health monitor and push messages keep
the user informed about system status and inspection
progress.
A detailed description of the software platform Geminy is
available in a separate brochure.
It’s the inside
that matters
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1 YXLON 225 kV micro-focus directional beam tube
- 320 W power and water-cooled target for
short scan times
- 2 modes for optimal adjustment of focal spot size
with respect to power
- 4 µm spatial resolution (2D image)
- TXI – „True X-ray Intensity“ for a long-term stable dose
Optional: YXLON 190 kV nano-focus transmission tube
- Water-cooled target and coils for quick temperature
balance and highest focal spot stability
- Diamond target for high power
- 4 modes for optimal adjustment of focal spot size
with respect to power
- 150 nm detail detectability (2D image)
- TXI – „True X-ray Intensity“ for long-term stability
Special system
characteristics
2 Granit-based manipulator
- Smallest thermal expansion and high stability of
temperature
- Vibration isolation from the system by active dampers
- High-precision Heidenhain encoder on all axes
- 6 axes for utmost versatility of applications
- Swivel mechanism for tube selection
3 Extremely precise turntable
- Joint development of Yxlon and Heidenhain
- Highly precise angle encoder
- Heavy load possible
- Low-maintenance, no need for compressed air supply
- Optional: tilting function
4 Selection of detectors
- Up to 430 mm x 430 mm active area for large field
of view
- CsI scintillator for high local resolution and
high efficiency
- Qualified acc. to ASTM E2597
- Optimized for microfocus CT applications
5 X-ray warning lamp
6 ESD connections
- Safe static discharge for the work with semiconductor
components
- ESD-proved construction by use of appropriate
materials
7 Integrated, ventilated control cabinet
- Outstanding accessibility for service
- Integrated high-power generator for fast installation
and smallest footprint
8 Vacuum and tube cooling components
- Easy service access
- Vibration isolation from the manipulator
Software platform Geminy
The novel software platform Geminy is the heart of the
computed tomography system FF35 CT. Its great number
of various trajectories provides enormous flexibility regard-
ing part sizes and inspection tasks. Details on Geminy are
described in a separate brochure.
YXLON 190 kV nano-focus transmission tube
SEM (Scanning Electron Microscope) image shows the exact
dimensions of the test pattern 150 nm gap clearly visible in the
x-ray image
bar
1.160 nm
gap
150 nm
bar
gap
YXLON FF35 CT Metrology
cylinderform
0.1000
Object: Cylinder 2
Dev: 0.0988 mm
Zone: Cylindrical
Target: Actual fit points (Cylinder)
Status: Ok
MR Type: None
The FF35 CT Metrology additionally offers
the following features:
Stabilization of interior temperature
- Smart fan control depending on door and detector
position
- Separate heat exchanger which can be placed outside
the measuring room
- Temperature range acc. to measuring quality class 3
defined by VDI 2627
- Display of readiness for measurement and fulfillment of
temperature requirements in the health monitor
Ruby Gauge
- Execution of five different SD measurements in seven
directions following VDI/VDE 2630 – sheet 1.3
- Automatic measuring process of the maximal
SD deviation incl. test report
- Convenient access to the history of SD measurements
for further analysis
Strengths of YXLON FF35 CT Metrology
- Non-destructive measurement of finest inner structures
- Capture of nearly unlimited measuring points in one
CT scan decoupled from the measurement evaluation
- Considerable time savings due to seamless defect
analysis and nominal-actual comparison
- Reduced correction loops and correction costs for
product samplings
- Conformity with standard VDI/ VDE 2630
YXLON FF35 CT Metrology
for accurate measurements of inner structures