P-0292-004.pdf - 第14页
MODEL MS-G300L 0801-002 HT -3 illust-1 CQSB16-5D KQL08-01S KQH04-M5 KQH04-M5 AS1001F-04 KQP-04 From Main Body Stocker Up/Down KQH04-M5 AS1001F-04 M-5HL-4 See Fig. HT -1 Key No.30 See Fig. HT -2 Key No.122 See Fig. HT -2 …
MODEL MS-G300L
1004-004
HT-2 list-2
Key No. PART No. PART NAME Q’ty REMARKS New Code
NOTE
HT-2
156 6300007756 BOLT,HEX-SCT 1 M5X12 221A0030
157 6300007770 BOLT,HEX-SCT 1 M5X20 221A0032
158 4110392604 SCR PAN 2X6 2 M2X6 PAN 221E0483
159 4110407803 SCR PAN 3X12 2 M3X12 PAN 221E0489
160 6300008883 SET SCREW 2 M3X4 SET 221C0001
161 4110157609 RING E 1.5 1 RING E 1.5 221K0094
162 4111409202 NUT HEX 2 2 M2 221F0075
166 4111412608 WASHER SPR 2 8 SW2 221H0277
167 4111416606 WASHER SPR 2.5 6 SW2.5 221H0279
168 4111412806 WASHER SPR 3 6 SW3 221H0281
169 4110864408 WASHER SPR 3 2 SW3F 221H0280
170 4111412905 WASHER SPR 4 2 SW4 221H0284
171 4111416705 WASHER SPR 5 1 SW5 221H0287
176 4111416903 WASHER V 2X5X0.3 8 FW2 221H0308
177 4111413803 WASHER V 2.5X6.5X0.5 6 FW2.5 221H0310
178 4111413902 WASHER V 3X7X0.5 2 FW3 221H0312
179 4111191909 WASHER V 3X7X0.5 2 FW3F 221H0311
180 4111414008 WASHER V 4X9X0.8 2 FW4 221H0315
181 4111414107 WASHER V 5X10X1 1 FW5 221H0318
182 4111415807 WASHER F 3X6X0.5 4 FWS3 221H0338
MODEL MS-G300L
0801-002
HT-3 illust-1
CQSB16-5D
KQL08-01S
KQH04-M5
KQH04-M5
AS1001F-04
KQP-04
From Main Body
Stocker Up/Down
KQH04-M5
AS1001F-04
M-5HL-4
See Fig. HT-1
Key No.30
See Fig. HT-2
Key No.122
See Fig. HT-2
Key No.120
217
218
223
226
231
218
ノズルストッカ
1,4
Nozzle Stocker 1,4
Fig. HT-3
エア配管
Air Pipng
MODEL MS-G300L
1004-004
Key No. PART No. PART NAME Q’ty REMARKS New Code
NOTE
HT-3 list-1
HT-3
217 6300037326 PIPE FITTINGS 1 868HT-100-017 225F0026
218 6300036909 PIPE FITTINGS 8 868HT-100-018 225F0001
223 6300884463 PIPE FITTINGS 2 868HT-100-023 225F0371
226 6300482935 AIR LINE EQPT 2 868HT-100-026 225B0251
231 6300037777 PIPE FITTINGS 4 868HT-100-031 225F0063