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Nordson DAGE Quadra W8 W afer X-ray Inspection | 5 4 | Nordson DAGE Quadra W8 W afer X-ray Inspection Invested in cor e technology Nordson DAGE design and manufactur e every key component in the X-ray image chain ensurin…

Nordson DAGE Quadra W8 Wafer X-ray Inspection | 32 | Nordson DAGE Quadra W8 Wafer X-ray Inspection

Your Defect Detection Expert

Nordson DAGE has a rich heritage pioneering test and inspection solutions for semiconductor

applications.

Founded in 1961, Nordson DAGE is part of the Nordson Corporation with a revenue of over $1.8 billion

annually and over 6,000 employees worldwide.

Over 25% of Nordson DAGE employees are dedicated to research, design and development. Our

vertically integrated approach to core technologies gives full control over all key components in our X-ray

inspection product lines.

Dedicated X-ray and semiconductor teams have focused their expertize to

create the ultimate platforms for wafer and package level quality inspection.

Automated wafer bond

testing

Operator free X-ray

metrology

Operator controlled X-ray

inspection

Your Wafer Inspection Solution

MEMS InspectionTSV Inspection

Check for bump presence, inspect shape,

position and voiding.

Find defects such as cold joints, head in pillow

and misalignment in 2.5D and 3D packages.

Inspect build quality, wire bonds, component

alignment and solder as well as adhesive

voiding and quality.

Check shape, ll and voiding of through

silicon vias.

Wafer Bump Inspection Wafer Level Packaging

Position

Count, Volume

Silicon substrate

Void Count

Silicon substrate

Fill

Misaligned

Cold Joint

Head in

Pillow

Silicon substrate

TSV

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Invested in core technology

Nordson DAGE design and manufacture every key component in the X-ray image chain ensuring Quadra W8 achieves the highest quality images.

X-ray inspection should be as easy

and intuitive to use as possible.

Quadra W8 allows occasional users

and experienced operators to see

incredible X-ray images quickly, easily

and with minimal training.

Easy to learn

Get working quickly with Gensys

proprietary control

and measurement software which features an intuitive

“point and click” user interface and full mouse based

control of the manipulator system.

Maintenance free

Quadra is the only maintenance free X-ray inspection

platform in its class. Regular preventative maintenance

visits are not required to guarantee optimum X-ray

performance.

Ergonomically designed

Comfortable to use for prolonged periods without

fatigue, Quadra W8 is inspected to SEMI S2, S8 and

S22 standards.

Quadra

™

W8 creates unbeatable

images making it easy to see even the

tiniest details and nd defects quickly.

Unbeatable resolution

The Aspire™ Flat Panel detector from Nordson DAGE

makes it easy to see even the smallest defects. Aspire FP

combines 16 bit contrast with 6.7 megapixel resolution to

produce images of unrivalled quality.

Bring out the nest details

Over 30 advanced enhancement lters bring out the

sharpest images and show the nest details, allowing

you to nd defects faster. HDR Imaging increases the

dynamic range so defects in both dark and light areas

can be seen clearly on one image.

Turn Images into Solutions

Simplicity as Standard

QuadraNT™ Tube Aspire™ Flat Panel Detector Quadra™ GEN Power Supply

Gensys

X-ray Inspection Software

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Wafer Safety Wafer Solutions

Compliance made easy

Customers increasingly demand robotic wafer

handling throughout the entire manufacturing and

inspection process. Quadra W8 ensures you remain

compliant.

Error free wafer management

Robot handling ensures

the correct wafer is loaded,

inspected and returned to

the FOUP correctly.

SECS/GEM as standard

Quadra W8 is compatible with all SECS/

GEM factory host systems. Feed back

inspection results automatically to optimize

FAB performance and ensure complete

traceability.

Inspect wafers straight from the FOUP. Quadra™ W8 ensures

maximum wafer integrity by removing any operator manual wafer

handling.

Integrated EFEM pre-aligns and delivers

wafers straight from the FOUP.

High resolution versatile

solution with industry leading

magnication and image

quality.

Ofine failure analysis and

sample based quality control

with completely robotic wafer

handling.

Complete automated

solution for 100% inspection

inline in clean production

environments.

Feature

recognition

0.1µm

Handling

Manual load

wafer tray

Inline FOUP carrier

Inspection

Operator controlled inspection Operator free

Throughput

Designed for

clean room

- Wafer handling Complete system

SECS/GEM

- Yes

Metrology

- 5% GR&R