Quadra W8 Brochure v4c web.pdf - 第4页
Nordson DAGE Quadra W8 W afer X-ray Inspection | 7 6 | Nordson DAGE Quadra W8 W afer X-ray Inspection W afer Safety W afer Solutions Compliance made easy Customers increasingly demand r obotic wafer handling throughout t…
Nordson DAGE Quadra W8 Wafer X-ray Inspection | 54 | Nordson DAGE Quadra W8 Wafer X-ray Inspection
Invested in core technology
Nordson DAGE design and manufacture every key component in the X-ray image chain ensuring Quadra W8 achieves the highest quality images.
X-ray inspection should be as easy
and intuitive to use as possible.
Quadra W8 allows occasional users
and experienced operators to see
incredible X-ray images quickly, easily
and with minimal training.
Easy to learn
Get working quickly with Gensys
TM
proprietary control
and measurement software which features an intuitive
“point and click” user interface and full mouse based
control of the manipulator system.
Maintenance free
Quadra is the only maintenance free X-ray inspection
platform in its class. Regular preventative maintenance
visits are not required to guarantee optimum X-ray
performance.
Ergonomically designed
Comfortable to use for prolonged periods without
fatigue, Quadra W8 is inspected to SEMI S2, S8 and
S22 standards.
Quadra
™
W8 creates unbeatable
images making it easy to see even the
tiniest details and nd defects quickly.
Unbeatable resolution
The Aspire™ Flat Panel detector from Nordson DAGE
makes it easy to see even the smallest defects. Aspire FP
combines 16 bit contrast with 6.7 megapixel resolution to
produce images of unrivalled quality.
Bring out the nest details
Over 30 advanced enhancement lters bring out the
sharpest images and show the nest details, allowing
you to nd defects faster. HDR Imaging increases the
dynamic range so defects in both dark and light areas
can be seen clearly on one image.
Turn Images into Solutions
Simplicity as Standard
QuadraNT™ Tube Aspire™ Flat Panel Detector Quadra™ GEN Power Supply
Gensys
TM
X-ray Inspection Software
Nordson DAGE Quadra W8 Wafer X-ray Inspection | 76 | Nordson DAGE Quadra W8 Wafer X-ray Inspection
Wafer Safety Wafer Solutions
Compliance made easy
Customers increasingly demand robotic wafer
handling throughout the entire manufacturing and
inspection process. Quadra W8 ensures you remain
compliant.
Error free wafer management
Robot handling ensures
the correct wafer is loaded,
inspected and returned to
the FOUP correctly.
SECS/GEM as standard
Quadra W8 is compatible with all SECS/
GEM factory host systems. Feed back
inspection results automatically to optimize
FAB performance and ensure complete
traceability.
Inspect wafers straight from the FOUP. Quadra™ W8 ensures
maximum wafer integrity by removing any operator manual wafer
handling.
Integrated EFEM pre-aligns and delivers
wafers straight from the FOUP.
High resolution versatile
solution with industry leading
magnication and image
quality.
Ofine failure analysis and
sample based quality control
with completely robotic wafer
handling.
Complete automated
solution for 100% inspection
inline in clean production
environments.
Feature
recognition
0.1µm
Handling
Manual load
wafer tray
Inline FOUP carrier
Inspection
Operator controlled inspection Operator free
Throughput
Designed for
clean room
- Wafer handling Complete system
SECS/GEM
- Yes
Metrology
- 5% GR&R
Specications at a Glance
X-ray Tube QuadraNT
TM
Filament Free Transmissive
Feature recognition 0.1 µm (0.3 µm above 10 W)
Tube target power 20 W
Voltage 30 - 160 kV
Detector Aspire
TM
Flat Panel Detector
Resolution 6.7 MP
Frame rate 30 fps
Digital image processing 16 bit
Inspection
Operation Mouse point and click (joysticks optional)
Oblique angle view 2 × 70° - No sample rotation required
Inspection area Entire wafer
Anti vibration AXiS Active X-ray Image Stabilization
Geometric magnication Up to × 2,500
Total magnication Up to × 68,000
Display Twin 24” 4K UHD 3840 × 2160
Sample Handling
Loader 300 mm or 200 mm dual port EFEM
Communications SECS/GEM over Ethernet
Installation
Footprint (W x D x H) 1.91 x 2.71 x 1.94 m
Weight 2,650 kg (5,840 lbs)
Power Single phase 200-230 Vac, 50/60 Hz, 16 A
Air 5-8 bar clean dry air
X-ray safety < 1 µSv / hour
Americas + 1 760 930 3307
sales@nordsondage.com
Europe +44 1296 317800
globalsales@nordsondage.com
China +86 512 6665 2008
sales.ch@nordsondage.com
Germany +49 89 2000 338 270
sales.de@nordsondage.com
Japan +81 3 3599 5920
sales.jp@nordsondage.com
South East Asia +65 6552 7533
sales.sg@nordsondage.com
Taiwan +886 2 2902 1860
globalsales@nordsondage.com
United Kingdom +44 1296 317800
globalsales@nordsondage.com
www.nordsondage.com
Specications subject to change without prior notice.
Copyright © Nordson DAGE 2018. Other products and company names
mentioned are trademarks or trade names of their respective companies.
Nordson DAGE products are patent protected and covered by the
patent listed at www.nordson.com/dagepatents.
BR-QW8-010718-V1